Pressure characteristics Flow rate characteristics Set pressure: 20kPa Supply vacuum pressure: 100kPa Flow rate characteristic measurement conditions 0 1.0 Exhaust flow rate of the vacuum pump used for measurement: 500l/min (ANR) 10 Set point Upstream vacuum pressure: 100kPa (when downstream flow rate is 0l/min (ANR)) 20 0.5 Output deviation (%F.S.) 30 Maximum flow rate: 132l/min (ANR)
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)0.8 to 5 V ?2.5% F.S.?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?
10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?