SMC Wireless System EtherNet/IP ® compatible

), ACMA (Australia/New Zealand), IMDA (Singapore), SIRIM (Malaysia), ENACOM (Argentine), ICASA (South Africa), NCT (Philippines), FAC (Russia), CoC (Ukraine), ANRT (Morocco) -67No.EX-OMU0028-D Models EX600-WSV1 EX600-WSV2 Enclosure rating Conforms to IP67 (with manifold assembled) Ambient temperature (Operating temperature) -10 to +50 oC Ambient temperature (storage temperature) -20 to +60

EtherNet/IP TM Compatible Fieldbus System

Order 42 Summary of Product parts 42 Mounting and Installation 43 Installation 43 Separate power supply 46 LED Display and Settings 47 Specification 48 Specifications 48 Dimensions 49 1 No.EX-OMS0014-A Input unit Model Indication and How to Order 50 Summary of Product parts 50 Mounting and Installation 51 Installation 51 Wiring 52 LED Display 58 Specification 59 Specifications 59 Dimensions 60

SMC Wireless System PROFINET compatible

), ACMA (Australia/New Zealand), IMDA (Singapore), SIRIM (Malaysia), ENACOM (Argentine), ICASA (South Africa), NCT (Philippines), FAC (Russia), CoC (Ukraine), ANRT (Morocco) -78No.EX-OMW0006-D Models EX600-WSV1 EX600-WSV2 Enclosure rating Conforms to IP67 (with manifold assembled) Ambient temperature (Operating temperature) -10 to +50 oC Ambient temperature (storage temperature) -20 to +60

Vacuum Unit Ejector / Vacuum Pump System

Port Layout 60 11. Exhaust/Flow Rate Characteristics 70 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics 70 11.2. Vacuum Pump System Flow Rate Characteristics 72 11.3. Vacuum Release Flow Rate Characteristics 72 12. Limitations of Use 74 13. Troubleshooting 76 -1No.

Electric Actuator Miniature Rod Type Miniature Slide table Type

Model Motor size Set value of pushing force[%] LEPY6 LEPS6 Basic 70 to 100% LEPY10 LEPS10 Basic 50 to 100% Compact 60 to 100% 43 - a. Posn failed alarm is generated The product cannot reach a pushing start position due to variation in the width of workpieces. b. Pushing ALM alarm is generated The product is pushed back from a pushing start position after starting to push. c.

CU

If operated beyond the limiting ranges, excessive impact will occur and this may cause damage to equipment. 2.00 25 1.50 20 1.00 0.50 0.00 20 30 40 50 60 70 80 90 100 Stroke (mm) Cushion Needle Adjustment Caution : Operating pressure 0.5MPa : Operating pressure 0.4MPa Graph 1 1.

IR1000/2000/3000

50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (optional) 30 82 Mounting hole Pressure gauge (optional) 60 2.3 48 Bracket (optional) 5.5 9.5 M5 depth 7 75 83 Approx. 119 18 1 1 SMC IN Bleed Pressure gauge (optional) Exhaust SUP(1) OUT(2) OUT 43 Approx. 60 50 50 2-Rc(PT) 1/4 Port size Rc(PT) 1/8 Pressure gauge port M6 x P0.5 15.5 9 82 60 IR3120-0 Mounting hole 48 2.3 76 Approx. 148 22

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

SRP

80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l

SRP

80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Hz 00 01 Without sub-plate Rc 1/8 (6A) Accessory 2 200 VAC, 50/60 Hz Without sub-plate (For manifold) 4 Indicator light (DC is possible only for DL.)

Coolant Valve: Air Operated/External Pilot Solenoid VNC Series

Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Symbol A: Non-locking push type A (projecting) N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa 4 1 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz Valve size 1 7 5 6 24 VDC 12 VDC B: Slotted locking type B (tool required) 7 240 VAC 50/60 Hz 15 (11) 2 Semi-standard For other rated voltages, please consult with SMC. 20 (14) 3 25 (16) 4 1 1

Magnetically Coupled

NCY3B10 0.10 NCY3B6 0.05 0.00 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85 Stroke (inch) The above deflection data represent values at the time when the external sliding part moves to the middle of the stroke. Vertical Operation The load should be guided by a ball type bearing (linear guide, etc.).

Lubricator

Bowl assembly for AL40, 50, 60-D Semi-standard symbol 6 3 36 Semi-standard: (Standard) Semi-standard: 3 Piping port thread ty pe Piping port thread ty pe (7) Part No. (7) Part No. Rc Rc C4SL-D C4SL-3-D G G NPT C4SL-3(Z)-D NPT C4SL(-Z)-D Appearance and part No. Semi-standard: 36 Semi-standard: 6 Piping port thread ty pe Piping port thread ty pe (7) Part No. (7) Part No.

Title not found

Hz 50/60 Hz 50/60 Hz Maximum micro power cut 10ms 10ms 5ms 10ms 5ms Maximum inrush current 0.7A 1.5A 0.7A 1.5A 7A 0.7A 1.5A 7A Maximum power 3W 4W 3W 8W 6W consumption ANALOGUE INPUT CHARACTERISTICS AC INPUT CHARACTERISTICS 10 6 inputs from I01 to I06 Input voltage 100-240 VAC + 10% 15%, 20 8 inputs from I01 to I08 50-60 Hz Measurement range 0-255 Input impedance >or = 800 kOhms Resolution

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

87 60 112 112 17-5-55 14 Series LVD Fitting Assembly Procedure Assemble fittings following the procedure shown below.

VCA

All types are equipped with surge voltage suppressor. 17-2-10 5 Series VCA Direct Operated 2 Port Solenoid Valve For Air Standard Specifications Valve construction Direct operated poppet Fluid Air, Inert gas, Low vacuum (133 Paabs) Withstand pressure (MPa) 2.0 Body material Al Seal material HNBR Valve specifications Ambient temperature (C) 20 to 60 Fluid temperature (C) 10 to 60 (No freezing

VCS

power (VA) 50/60 Hz VXA Holding VCS2: 10/8, VCS3: 15/13, VCS4: 19/16 Note 1) For low pressure steam at a temperature of 120C or less, use FKM for the seal material.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Foot bracket VZS 5 1 3 VFS 22.2 Die cast hole For manifold gasket positioning PE port VS VS7 L plug connector (L): VQZ112 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ112 wMwC3, C4, C6, M5 0 1 Cover diameter 1.5 Cross section 0.23mm2 34 <39> 300 (Lead wire length) 76 (Metal seal) <77> 73.5 (Rubber seal) <74.5> 300 82 (Metal seal) <83> 54 <55> (Lead wire length) 80 (Rubber seal) <81> 60

PF2D

Note 8) For details about wiring, refer to the Operation Manual that can be downloaded from SMC website (http://www.smcworld.com). 1.0 Operating pressure [MPa] PF2D 504/520 0.5 PF2D 540 Made to Order 20 40 60 80 100 0 90 LQ1 series fluoropolymer fittings mounting type is also available. Refer to page 392.