Clean Regulator SRH Series

Clean Regulator SRH Series ARJ AR425 to 935 How to Order ARX 02 SRH 3 0 0 0 AMR Gauge port orientation ARM Body size 3 4 1/4 3/8 Nil: Standard ARP OUT IN Washing grade IR-A 0 1 Grade A Grade B Knob Gauge port IR R: R Specification Set pressure Gauge port IRV 0 1 0.02 to 0.2 MPa 0.05 to 0.7 MPa OUT IN VEX Relief mechanism There is only one gauge port. 0 1 Non-relief Relief SRH SRH Made to

Precision Clean Regulator SRP Series

.: 4) IR-A Gauge port orientation IR Nil: Standard Port size IRV OUT IN Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 VEX Knob Gauge port SRH R: R specifications Symbol Gauge port SRP SRP OUT IN SRF Gauge port positions are indicated with the knob on the top side.

VEX1

Body size Port size Port M5 01 Nil M5 01 1(P), 2(A), 3(R) M5 IR-A A Body ported 8 1 Without sub-plate M5 IR Base mounted B Position for port P1 8 1 IRV 3 VEX1 3 10 G 5 VEX VEX SRH Regulator valve Option Bracket Foot Pressure gauge Silencer for bleed port Dimensions of port P1 B F G SRP Type Precision regulator Operation Air operated type Manual knob type Fixed orifice SRF

VEX5

Model Basic type Select type Port size Model Air operated External pilot solenoid Port 1 (P), 2 (A) Air operated External pilot solenoid Port 3 (R) , , 1 1 2 3 4 , , 1 1 2 3 4 VEX5500 1, 1 VEX5700 1 4 1 , 2 VEX5900 VEX5510 VEX5710 VEX5910 VEX5511 VEX5711 VEX5911 1 2 11 4 2 VEX5501 VEX5701 VEX5901 Economy valve VEX VEX 2445

Electro-Pneumatic Proportional Valve Series VEF/VEP

1(P) 3(R) 03 04 06 25 3/8 1/2 3/4 1 4 Note) Does not conform to ISO1179-1. 886

VG342

Option] How to Order Low power consumption 4.8 W DC (Standard type) 2 W DC (Energy-saving type) No lubrication required Possible to use in vacuum or under low pressures External pilot Vacuum: Up to 101.2 kPa Low pressure: 0 to 0.2 MPa Changeable actuation: N.C., N.O., or external pilot Can be used as a selector or divider valve (External pilot) VG342 04 G 1 A Valve option CE-compliant Nil R

Series VP300/500/700 Rubber Seal 3 Port/Pilot Poppet Type Body Ported/Single Unit

How to Order VP 3 4 2 5 G 1 01 A Body ported Series 3 5 7 Pilot type VP300 VP500 VP700 Thread type Bracket Nil R Internal pilot External pilot Nil F N T Rc G NPT NPTF Nil F Without bracket With bracket Pressure specification Nil K Standard (0.7 MPa) High-pressure type (1.0 MPa) Coil specification Nil T Standard Rated voltage With power saving circuit (DC only) Type of actuation A B N.C.

VP500/700 Series How to Order VP 5 1 7 5 D Y 1 Modular connection type Flow direction Series Nil Left to right 5 VP500 R Right to left 7 VP700 Bracket Pressure specification Nil Without bracket Nil Standard (0.7 MPa) With bracket*1 B K High-pressure type

VP500/700 Series RoHS How to Order VP 5 1 7 5 D 1 Y Modular connection type Flow direction Series Nil Left to right R Right to left 5 VP500 7 VP700 Bracket Pressure specication Nil Without bracket B With bracket*1 Nil Standard (0.7 MPa) K High-pressure type (1.0 MPa) *1 Brackets are supplied loose, not assembled, at time of shipment. Includes 2 mounting screws.

VQ7-6

is Rc 3/8 Seal FHG Nil R Metal seal Rubber seal 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Option FJG None Light/Surge voltage suppresor Individual pilot exhaust Nil Z V 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 When two or more symbols are specified, indicate them alphabetically.

VQD1000

With light/surge voltage suppressor 1 (P) 3 (R) Body type LO: Plug lead type L plug connector, Without connector With light/surge voltage suppressor 2 3 5 Body ported (Single unit) Body ported (Manifold) Base mounted Note) Latching type: Base mounted type only.

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

Option (A) 2 1 Nil: F: None With bracket 1 (P) 3 (R) Body type Bracket Function AC Symbol Specifications DC Port size [2(A) port] (0.35 W) p (0.9 W) p Note 3) Nil p Standard C3 C4 C6 M5 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting M5 thread (Replaceable type) R Note 1, 2) K Note 1) High pressure type p p External pilot type KR Note 1, 2) (0.9 W) p High pressure/External

VS7-6 How to Order E Q VS7 6 FG S 1 Symbol Option Connector Rated voltage Port size of sub-plate Number of solenoid Single — Without sub-plate None 100V AC 1 S — — Connector SV ∗ Indicator light 1 4 A02 200V AC 2 0 N Double D FG Side piping FJG W/o conn

Wedge packing style 3 8 R port: N NPT Contact SMC for other voltages (9) Order Made Individual pilot EXH V T NPTF FIG FHG SX If specifying more than one symbol, indicate them in the alphabetical order.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

Air Suction Filter ZFA Series

(Example) For 6 stations 06 How to Order (Single unit) ZFA 100 01 Bracket Air suction filter Symbol Nil L None Bracket 1 pc. on the left R LR ZFA100 Body type 1 pc. on the right With both the left and right sides 100 Filtration area (mm2) Symbol L or R shows the left or right of the filter IN when viewed from front. 2110 4210 200 Port size Thread type 02 01 Port size Applicable model Symbol

ZSE20(F)_ISE20

1 Output RoHS 3-Screen Display High-Precision Digital Pressure Switch IP40 ZSE20(F)/ISE20 Series How to Order Rated pressure range ISE20 0.1 to 1 MPa M For positive pressure ISE20 M5 N For vacuum/ compound pressure ZSE20 N M M5 q w e r t y u q Rated pressure range e Unit specification w Output specification ZSE20 0 to 101 kPa ZSE20F 100 to 100 kPa Symbol Description N NPN open collector 1

ZSM1-115/121

style 0.5 m (Standard) 3 m Lead wire length Nil L Switch/Voltage 15 21 Solid state 4.5 to 28 VDC Contact (Reed switch) 100 VAC/DC Connection 0 1 T1 For mounting on ZM ejector R 1/8 NPTF 1/8 870

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, S/S CLEAN ROOM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, J5, KQ(X23) 10MM, .05513 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type10R 1/4KGH10-02

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE ELBOW CLN ROOM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, H5, KQ(X23) 8MM, .05663 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type8R 1/4KGL08-02

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, MALE ELBOW CLEAN ROOM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, J5, KQ(X23) 10MM, .06704 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type10R 1/4KGL10-02

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, STAINLESS, CLEAN ROOM, CONNECTORS, KG/KQ(X23) 1-TOUCH STAINLESS, C5, KQ(X23) 4MM, .01510 lb, Applicable tubing O.D. (mm)Connection threadsModel M5 type R type4M5 x 0.8KGS04-M5