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BP Edition B A ball bushing bearing type has been added. (16, 32) Number of pages has been increased from 20 to 28. Edition C Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Dimension l from the guide shaft center to the top surface of the table is indicated below. 11.4 19.3 Slide 25 20 5.60 8.19 Ball bushing 19.8 23.3 Slide 32 30 10.1 14.8 (mm) Ball bushing 37.3 46.2 Slide 50 Bore size l dimension 12 16 20 25 32 40 40 21.3 27.5 Ball bushing 19.5 24 28 31 39.5 47.5 Allowable Load Only by Adjusting Bolts If only the adjustment bolt is used for stopping the load

Example) 24VDC Starting voltage Holding voltage Voltage 6VDC 0.15 to 0.2 Time s 28 High Vacuum Angle Valve Series XLS Specifications XLS-25-P G Model XLS-16 XLS-25 XLS-16-P G Normally closed (N.C.) Valve type Non-corrosive gas for aluminum alloy (A6063) and stainless steel (SUS405 equiv.)

Nominal size Stroke Nominal size: 16 (74.7) (101.7) (60) (40) 80 27 70 74.7 (60) 27 44 72 Motor 5H7 depth 5 LJ1 LJ1 43.5 LG1 LG1 60 60 60 139 69 10.2 79 139 LTF LTF 87 66 80 LC1 LC1 10 7 4 LC7 LC7 28 28 2 x 2 x 9.5 counterbore depth 5.4 5.5 through hole Long hole depth 5 4 x M5 x 0.8 depth 9 T-slot section for mounting 5H7 LC8 LC8 5.6 (Max.

Recommended Tightening Torque [Nm] Connection thread Pressure Control Equipment 1/2 3/8 1/4 1/8 Torque 28 to 30 22 to 24 12 to 14 7 to 9 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

Recommended Tightening Torque [Nm] Connection thread Pressure Control Equipment 1/2 3/8 1/4 1/8 Torque 28 to 30 22 to 24 12 to 14 7 to 9 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

L/min) 0.13/0.18 (at 7 L/min) Pump capacity Note 7) (50/60 Hz) (MPa) Rated flow Note 8) (50/60 Hz) (L/min) Tank capacity (L) Port size 7/7 23/28 Approx. 5 Rc1/2 Stainless steel, Copper (Heat exchanger brazing), Bronze, Alumina ceramic, Carbon, Polypropylene, PE, POM, FKM, EPDM, PVC Wetted parts material Temperature range (C) Pressure range (MPa) Required flow rate Note 12) (50/60 Hz) (L/

Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 Thread 1/8 1/4 3/8 1/2 3/4 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.

lflL/ l0L$epi Female Connector: KVF 14.29 9.2 1 . 5 15.5 17.6 14.5 14.29 't0 27 10.8 1 6 1.6 11.4b 40.7 14.29 10.7 '10.9 16.5 17.46 31.3 13.6 14.29 12.5 '10.6 1 7 |.44 31.2 13-3 22.23 15.2 30.8 r.3 17.46 17.4 2l 34.5 1 5 ,t ,a 36.6 23.81 40.6 18.9 it.4 r5.4 13,8 6.4 14.8 23.81 40.8 1E.8 22.23 21 Refrenc torque specification Table #3 Plug-in Reducer: KVR** Male Elbow: KVL I 1 8 E 1 1 30 28

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

If the wrench is applied on any other part, air leakage or other damage may occur. 862 Clean Regulator SRH Series Brackets For SRH3000 For SRH4000 Model B21-1-T1 1350112-T1 ARJ Material Rolled sheet steel (Electroless nickel plated) AR425 to 935 30 ARX 36 61 51 AMR 31 37 8.5 ARM Dimensions 10 ARP 21 20 28 6.5 8 IR-A 13.5 30 50 28 41 2.3 1.6 IR IRV VEX SRH SRH SRP SRF ITV IC ITVH ITVX PVQ

Number of pages from 28 to 32. US Edition B Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

(For connection fitting weight, refer to page 8-15-28.) For the (Fn) of data A, refer to the allowable driving force table. Determination of connection fitting weight (WB) WB > WBMAX Review of connection fitting WB WBmax (Refer to data A on page 8-15-28.)

(mm SQ) ZS-28-C-1 24~26 0.14~0.2 1.0~1.2 Yellow ZS-28-C-2 1.2~1.6 Orange ZS-28-C-3 22~20 0.3~0.5 1.0~1.2 Green ZS-28-C-4 1.2~1.6 Blue ZS-28-C-5 1.6~2.0 Grey ZS-28-CA-1 0.6~0.9 Orange ZS-28-CA-2 0.9~1.0 Red 0.1~0.5 ZS-28-CA-3 1.0~1.15 Yellow ZS-28-CA-4 1.15~1.35 Blue ZS-28-CA-5 1.35~1.6 Green -98No.EX-OMZ0016-C (5) NFC reader/writer EXW1-NT1 This set includes an NFC reader/writer and a USB

49 35 28 16.8 2.7 depth 12 PF3W711 3/4, 1 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5 depth 14 Symbol Bracket dimensions Model S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -103No.PF-OMV0006-B PF3W721 Basic type Symbol Piping port size A AA B D E F G H J K L N P Model 11/4, 11/2 104 74 31

Max. 10 16.1 46.2 M8 x 1 31.1 36 18.5 42.6 [49.6] Approx. 300 (Lead wire length) Pg7 80.5 [82.7] 70.7 [72.9] 90.5 89.6 72.2 65.7 49.7 23.5 10.9 23.5 10.9 23.5 10.9 23.5 10.9 21 21 21 21 25 25 25 25 2 x 3.2 (For mounting) 2 x 3.2 (For mounting) 2 x 3.2 (For mounting) 2 x 3.2 (For mounting) 28 28 28 28 Refer to page 646 for dimensions with connector cable. 630 3 Port Pilot Solenoid Valve

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

Dimensions L5 D4 Applicable tubing O.D. d H (Width across flats) A L4 D1 L3 D3 L1 M D2 T L2 [mm] Model T H D1 D2 D3 D4 L1 L2 L3 L4 L5 A M Weight [g] AS221F-G01-06W2D G1/8 12 13.2 14.2 14 7.2 23 31 17.6 39.2 1.2 34.7 17 26 AS221F-G01-08W2D 15.2 25.3 32.4 18.5 28 AS221F-G01-10W2D 18.5 32.1 39.2 21 30 AS221F-G02-06W2D G1/4 17 13.2 18.5 17 7.2 25.2 34.4 20.2 42.8 1.2 36.8 17 46 AS221F-G02-08W2D

BUS IN BUS OUT DRAIN 1 1 1 5 4 3 2 5 4 3 2 V+ 2 2 2 0 0 0 Bit No. 6 4 6 4 3 VSolenoid on side A Output No. 0 2 4 6 8 16 28 30 CAN_H 4 Side D 5 CAN_L (SI unit side) To obtain more detailed information about operating this product, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. 4 5 Solenoid on side B 1 3 5 7 9 17 29 31 Output No.