Large Flow Air Filter AF800/900 Series

AF800 AF900 11345-5B 11345-5S q r No. Description Material u i w Bronze Stainless steel 1 1 Standard -7 11352-5B 11352-5S y 2 Element u Standard -2 -6 -8 -9 C4SF C4SF-2 C4SF-6 C4LF-8 C4SF-X401 o Note) 3 Bowl assembly 1 t !

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

(mm) B N2504-N002 U4 33.9 (1.8) . 2 5 ( 1 1 1 ) 2.44 (621 1.18 (30) N2505-N003 45.9 (2.5) .23 (106) 2.52 {Ml 1.18 (30) N2s06-N004 U2 50.0 {2.7) .25 (113) 2.68 (68) 1.18 (30) 2507-N006 3/. 105.6 (5.8) .68 (310) 3.48 (88.5) 1.89 (48) it2508.tit01 0 129.6 17 .21 1.13 (514) 3.84 (97.5) 2.36 (60) t{2510.N002 th 17.2 (0.95) (s7) 2.13 (54) 0.87 (22) t{2511-N003 % 17.2 (0.95) (5s) 2.20 (56) 0.87

XG_-OMV0028

XGT300-1-1AS XGT313-50336-** ASSY XGT300-1-1-3AS XGT311-50336A1-1 XGT31*-50336-* A XGT311-50336A1-1A XGT31*-50336-*A A ASSY XGT311-50336A1-1C XGT31*-50336-*C A XGT311-50336A1-1F XGT31*-50336-*F A ASSY XGT300-2-1S O FKM XGT300-9-10S AS568-273 FKM XGT300-9-9S XGT31*-50336-1* AS568-271 O Kalrez R 4079 XGT300-9-11S XGT31*-50336-2* AS568-271 O (FKM) XGT300-9-7S AS568-177 XGT300-4-9S XGT300-2-5S

Slit Valve

Description Material Part number Corresponding model CYV 7 Gate A6063 XGT300-2-1S FKM XGT300-9-9S XGT31-503368 O-ring (Gate) Kalrez 4079 XGT300-9-11S 9 Wiper XGT300-4-9S XGT31-5033610 O-ring (body opening side) FKM XGT300-9-10S 11 O-ring (Bonnet assembly) XGT300-9-7S XGT31-5033612 Holding bolt Stainless steel 316 XGT300-2-5S 531 XGT Series Dimensions Non-cassette type/XGT221 Cassette type

LFE-OMY0008

8361: JIS B 9960-1:-((1 :) JIS B 8433-1993: 2) : : : 1 2. 3. 1. 2. 3. 4. 2 No.LFE*-OMY0008 / 1 1.5 3 3) 1 1 () [] 3 No.LFE*-OMY0008 () () () () 4 No.LFE*-OMY0008 () * (100 20 ) () <> 2MPa 5 No.LFE*-OMY0008 * (1623 ) FG (49N ) () M12 IN IN OUT OUT OUT OUT () 6 No.LFE*-OMY0008 1. 2.() 48 7 No.LFE*-OMY0008 *() () 6 33 () ( ) 10m DC(-)() ( 8 No.LFE*-OMY0008 * ( ) 5S

NAIV

(mm) B N2504-N002 U4 33.9 (1.8) . 2 5 ( 1 1 1 ) 2.44 (621 1.18 (30) N2505-N003 45.9 (2.5) .23 (106) 2.52 {Ml 1.18 (30) N2s06-N004 U2 50.0 {2.7) .25 (113) 2.68 (68) 1.18 (30) 2507-N006 3/. 105.6 (5.8) .68 (310) 3.48 (88.5) 1.89 (48) it2508.tit01 0 129.6 17 .21 1.13 (514) 3.84 (97.5) 2.36 (60) t{2510.N002 th 17.2 (0.95) (s7) 2.13 (54) 0.87 (22) t{2511-N003 % 17.2 (0.95) (5s) 2.20 (56) 0.87

IZx-OMT0049

in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 0.5s 0.5s 150 150 200 200 1s 2s 1s 2s 250 250 5s 5s 300 300 5-4.

R

Grommet Type Part No Connector Type Type Load Voltage Load Current Power Source Internal Voltage Drop Indicator Lamp Lead Wire Length D-A73L D-A73CL Reed 24VDC 100VAC 5~40mA 5~20mA Max 2.4V ON:RED L.E.D D-A80L D-A80CL Reed 24VDC/AC or less 100VDC/AC Max 50mA Max 20mA None Diameter 30mm D-F79L ~ 3 Wire Solid State NPN 28VDC or less Max 150mA 5~28VDC 0.8V Max ON:RED L.E.D D-F7PL ~ 3 Wire Solid

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend Model C Mounting bolt Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5S -10S CQ2B40-5S -10S CQ2B50-10S -20S CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5T -10T CQ2B40-5T -10T CQ2B50-

Compact Cylinder High Magnetic Field Design CDQ2BP Series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

CQ2

Model C Mounting bolt Model C Mounting bolt D 35 40 40 45 40 45 40 45 40 45 45 50 55 65 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 CDQ2B12-5S -10S CDQ2B16-5S -10S CDQ2B20-5S -10S CDQ2B25-5S -10S CDQ2B32-5S -10S CDQ2B40-5S -10S CDQ2B50-10S -20S CDQ2B12-5T -10T CDQ2B16-5T -10T CDQ2B20-5T -10T CDQ2B25-5T -10T CDQ2B32-5T -10T CDQ2B40-5T -10T CDQ2B50-10T -20T M3 X 35 l X 40 l M3 X 40 l X 45 l

LFE-OMZ0012

O: Acceptable X: Not acceptable (1) Operate fluids with electric conductivity of 5S/cm or more. The electric conductivity is a ratio which shows how easily the electricity flows. Note that this product can not be used for fluids with low conductivity.

CQS

Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S Example) Bolt M3 x 25l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt Model C Mounting bolt CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5S -10S CQ2B40-5S -10S CQ2B50-10S -20S CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5T -10T CQ2B40-5T -10T CQ2B50-

CDQ2BP series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

High Vacuum Slit Valve

XGT31-50336C XGT311-50336A1-1A For XGT31-50336-A C Bonnet ASSY XGT311-50336A1-1C For XGT31-50336-C C XGT311-50336A1-1F For XGT31-50336-F C Gate ASSY XGT300-2-1S Body O-ring (FKM) XGT300-9-10S AS568-273 FKM XGT300-9-9S For XGT31-50336-1 AS568-271 Gate O-ring Kalrez4079 XGT300-9-11S For XGT31-50336-2 AS568-271 Actuator O-ring (FKM) XGT300-9-7S AS568-177 Wiper XGT300-4-9S Fixed bolt XGT300-2-5S

Compact Cylinder Series CQS

D 30 35 30 35 35 40 40 45 C CDQSB12-5S -10S CDQSB16-5S -10S CDQSB20-5S -10S CDQSB25-5S -10S M3 x 30L x 35L M3 x 30L x 35L M5 x 35L x 40L M5 x 40L 45L 6.5 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt Mounting bolt 8.5 Single Acting, Spring Extend Cylinder model Mounting bolt size C D 30 35 30 35 35 40 40 45 CDQSB12-5T -10T CDQSB16-5T -10T CDQSB20-5T -10T

LV50-OMQ0004

. *1 Applicable fluidconductivity *1 5S/cm or more (micro Siemens/cm) Detecting method Electro static cupacity Ground*5 Negative ground Fluid temperature *2 0 to 85 oC (No condensation or freezing) Repeatability Analogue output: +/-1.5F.S.

Parallel Seal Type Slit Valve

50336A1-1A XGTP31 -50336A XGTP311-50336A1-1C XGTP31 -50336C XGTP311-50336A1-1F XGTP31 -50336F Gate ASSY XGTP300-2-1S XGTP31 -50336Bellows ASSY XGTP300-20AS O-ring(Body opening side) FKM XGT300-9-10S AS568-273 FKM XGT300-9-9S XGTP31 -50336-1 O-ring(Gate) AS568-271 Kalrez R4079 XGT300-9-11S XGTP31 -50336-2 O-ring(Bonnet assembly) FKM XGT300-9-7S XGTP31 -50336AS568-177 Gate Bolt XGT300-2-5S

E-MY2B_E_A

If necessary, re-application of power supply should be done when 5s or more passes after PWR indicator lamp goes off. 16 3.Stroke learning General 3 positions 5 positions General 3-1 By push of over 3s at least, the product comes into learning mode and starts stroke learning. 3-2 Confirm 2 indicator lamps MOTOR and END are blinking.