Speed Controller: Standard Type Large Flow In-line Type AS Series

AS420 Thread type AS500 AS600 AS800 Nil Rc NPT G N F 1 4 1 2 AS900 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

Air-hydro Unit

backward 160 L Actuator 1168 A Air-hydro Unit CC Series Dimensions Hydro Unit Air port size Rc CC CC Lube-plug 4 x T Mounting hole Rc 1/8 Pilot air connection port (Stop valve side) Rc 1/8 Pilot air connection port (Stip valve side) Manual push button Oil port size Rc Oil draining hole Rc 1/4 Throttle valve locking screw (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL EA EB EL F

CG5-S

R V Front flange type (F)/CG5FNS X165US inch rod option dimensional changes GA GB FT 2-Rc P H1 Width across flats B1 Dim.

SMC Pneumatic Clean Series

3.2 1/4 42 Up to 1000 14 27 30 27 60 70 22 44 9 16 32 27 33 15 51 8 M8 x 1.25 13 102 193 40 156 M14 x 1.5 7 45 3.2 3/8 50 Up to 1000 18 30 35 32 70 80 27 52 9 20 40 27 35 17 58 11 M8 x 1.25 13 108 206 50 162 M18 x 1.5 7 50 3.2 3/8 59 Up to 1000 18 31 35 32 85 93 27 64 20 40 34 35 17 58 11 16 116 M10 x 1.25 224 63 184 M18 x 1.5 11.5 48 Air Cylinder 2122CA2/ CA2 1011Rod side flange style (F)

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Series CDU 10-/1121-/226, 10, 16, 20, 25 Free Mount Cylinder Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

applicable auto switch list. 909 Rotary Table MSQ 1122Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Size 1 2 3 7 10 20 30 50 Fluid Air (Non-lube) Size Suction flow rate L/min (ANR) 1/2/3/7 10/20/30/50 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

Compact Cylinder

Basic (Through-hole/Both ends tapped common): CQUB F Q 2 x M5 x 0.8 Y 4 x M6 x 1 depth 10 4 x 5.4 through 15 KA H H1 Rod end nut Width across flats B1 NY EY D X C1 K NX A + Stroke B + Stroke L EX L1 Rod end male thread Basic (mm) Size Stroke range (mm) A B D EX EY F H K KA L NX NY Q Y 20 25 32 40 5 to 50 49 42.5 10 22 47 11.5 M5 x 0.8 depth 8 5 8 6.5 5.5 36 15 3 5 to 50 49 42.5 10 24 53 11

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r e c t k n w u o i s C e CRB2 CRBU2 CRB1 MSU B port A port C e l o s c i w k CRJ Basic type For 90 and 100 For 180 and 190 CRA1 Single flat Single flat CRQ2 MSQ MRQ D+10 0 B port A port B port A port +8 0 00 20t 1 0 t 9 fla la gle e f gl sin sin of

CXS

depth 3.5 (Piping port) OUT MG CX IN DSteel balls -X 20Data 12 + Stroke 16 CXSJ10P 0.3 14.4 0.3 41.4 Stroke (64.5 + Stroke) 56 + Stroke 8.5 44.5 + Stroke 7.5 8 + Stroke 16 4-M1.6 x 0.35 x 8 L 20 2-M5 x 0.8 thread depth 4 (Piping port) OUT IN Steel balls 8-28-25 25 Series CXSJ Dimensions: 15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) H A E F

3 Port Air Operated Valve VPA3145/3165/3185 Series

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size 03 04 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T Base size A, B Port size 5 3 4 6 1 Symbol 04 Port size VVPA450 VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Possible to use in vacuum or under low pressures Vacuum: Up to 101.2 kPa Low pressure: 0 to 0.2 MPa Free mounting orientation How to Order 04 4 5 1 VP3 A G 1 VP series 3 port solenoid valve CE-compliant Q CE-compliant Note) Nil Number of solenoids Single Note) Electrical entry: D/DL/DS/DZ only 1 Body size Thread type 1 4 6 8 1 2 1 2 Rc Nil G F 1 NPT N NPTF T Body ported 5 Body type Pilot

VZM500

Push pull VZM550-01-37 Panel mounting hole Stroke 2.7 Position indicator Hexagon nut thick 5, across flats 17 JIS Symbol 2-3.2 mounting hole 20 N F.O.F. 2.7 mm T.T. 5-6-46 5 Port Mechanical Valve Series VZM500 External pilot type VZM551 type With foot bracket VZM55-01--F 2-4.5 mounting hole (External pilot port) SA VA SA VA VM VR VH VHS 5-6-47

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

XM, XY

G J K L M Indicator Without indicator Pilot port direction Left flange surface Rear flange side Rear flange side Left flange surface Right flange surface Left flange surface Right flange surface Flange side Flange side Left flange surface Rear flange surface Right flange surface Left flange surface Rear flange surface Right flange surface Nil Right flange surface Left flange surface A F J

Flame Resistant (Equivalent to UL-94 Standard V-0) FR Double Layer Tubing Series TRB

Konstruktorska 11A, PL-02-673 Warszawa, Poland TEL: 022-548-5085 FAX: 022-548-5087 HONG KONG SMC Pneumatics (Hong Kong) Ltd. 29/F, Clifford Centre, 778-784 Cheung, Sha Wan Road, Lai Chi Kok, Kowloon, Hong Kong TEL: 2744-0121 FAX: 2785-1314 TURKEY (Distributor) Entek Pnmatik San.ve Tic. Ltd. Sti Perpa Tic.

Air Tank Series AT 1

Accessory (Option) Tank capacity ID D With auto-drain F Companion flange Port size Capacity ( l ) 100 200 400 500 700 1000 1500 Applicable compressor (kW) 5.5 Symbol AMG 6C 04 Rc 06 14 20 30 1 2 Rc 3 4 Rc 1 1 2 2B flange 3B flange 40 4B flange AT6C AT11C AT22C/37C AT55C/75C AT125C AT150C/220C 11C 11 22C 22 AFF 37C 37 55C 55 AM 75C 75 125C 125 2000 150C 150 3000 220C 220 Misc. 14-16-1 2 Series

Heatless Air Dryer Series ID 1

Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.

Special Specifications:

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body size Thread type (3) 2B 4B 8B 11B 22B 37B 75B Nil Rc F G N NPT Accessory (Option) A With drain cock (1) Note 3) Corresponds to attachment symbols C, D, and J. Select according to the type of threads used on the body.