7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

VZ1000

(Values at the initial period) Option Solenoid Specifications Grommet (G)/(H), L plug connector (L), M plug connector (M), DIN terminal (D) 100, 200, 24, 48, 110, 220 Electrical entry AC 50/60 Hz DC Made to Order Specifications (For details, refer to page 3-3-85.)

V

6.2 VACUUM VACUUM EJECTOR SERIES NZM VACUUM EJECTOR SERIES NZM All in one vacuum system Two stage nozzle design S u c t i o n f l o w r a t e 4 0 % h i g h e r than traditional designs Silencer and suction filter Optional air supply and vacuum release valve Optional diaphragm or solid state vacuum switch Manifold mountable version T E C H N I C A L SPECIFICATIONS S Y M B O L S Fluid Air Max

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(Refer to pages 15-6-3 to 15-6-5 for details.) 15-13-1 Series ASV Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa OUT-Exhaust Flow IN-OUT Flow OUT-Exhaust Flow Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm 2) Effective area (mm 2) Effective area (mm 2) Inlet pressure (MPa) Number of needle

MXW

158 226 Anti-corrosive specifications for guide unit 12 6 L 34 51 68 85 102 119 170 EPDM seal R 80 121 161 201 241 281 402 16 8 L 60 91 121 151 181 211 302 R 126 188 251 314 377 440 628 20 10 L 94 141 188 236 283 330 471 R 196 295 393 491 589 687 982 25 12 L 151 227 302 378 454 529 756 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Standard Stroke (mm)/Mass (g) ( g ) Model

CVJ3

L 16 60 S 5 L CVJ3 Without auto switch L S 5 L J79W 16 60 CDVJ3 With auto switch Number of auto switches Action S T Single acting, Spring return Single acting, Spring extend Built-in magnet 2 pcs. 1 pc. n pcs.

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Specications Model HRSH100-Al-20-l HRSH150-Al-20-l HRSH200-Al-20-l HRSH250-Al-20-l HRSH300-Al-20-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.27 2.1 2.1 2.8 2.8 Control method PID control Ambient temperature/Altitude Note 1), 9) C Temperature: 20 to 45, Altitude: less than 3000

LFE

Symbol Rated ow range 1 0.5 to 20 L/min 2 2.5 to 100 L/min 3 5 to 200 L/min Symbol Description X8 Piping connection parts: Stainless steel 304 Output specications Option Symbol OUT1 OUT2 A NPN NPN B PNP PNP C NPN Analog 1 to 5 V D NPN Analog 4 to 20 mA Symbol Lead wire and M12 connector (Length 3 m) Bracket Display unit Nil V L/min 1 L/min 2 V V L/min 3 V L/min 412 V gal/min 512 gal

MVGQ

Enclosure Dustproof ( M8 connector: IP65) Grommet (G)/(H), L plug connector (L), Electrical entry M plug connector (M), M8 connector (W) DC 24, 12, 6, 5, 3 Coil rated voltage (V) 100, 110, 200, 220 AC50/60 Hz Standard Stroke 10% of the rated voltage Allowable voltage Model Standard stroke (mm) 0.35 (With indicator light: 0.4) Standard type DC Power consumption (2) M L 0.1 (With indicator

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

KR

(mm) Model T (M) Mounting hole M Weight (g) Mounting plate thickness 11 mm or less Connection thread L H M14 x 1 M16 x 1 15 17 17 18.5 21 KRE10-00 24 M20 x 1 21 33 52 70 22 34.5 38 42.5 44 KRE08-00 KRE06-00 17 6 8 10 12 5.6 18.0 29.5 46.1 KRE12-00 27 M22 x 1 23 90 10.4 26.1 41.5 58.3 2-applicable tubing 19 D MS Plug: KRP Applicable fitting size d Model T A Weight (g) L D KRP-08 KRP-06 6 1

PFM7

Integrated display 7 Rated flow range (Flow rate range) Option 2 (Refer to page 907.) 0.2 to 10 (5) l/min 0.5 to 25 (12.5) l/min 1 to 50 (25) l/min 2 to 100 (50) l/min 10 25 50 11 Option 1 (Refer to page 907.) ( ): Fluid: CO2 Calibration certificate Flow adjustment valve None With calibration certificate Nil A Nil S None Yes The certificate is written in English and Japanese.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.