Refrigerated Thermo-chiller

(with valve/plug) Sub-tank drain port Rc 3/8 (with valve/plug) Emergency off [EMO] switch (Red, 40 mm) Facility water inlet Drain pan port Roller (not fixed) Roller (not fixed) Rc 3/8 (with plug) Rc 1/2 (with plug) Adjuster foot With a guard ring (yellow) 1157 53 1080 Anchor bolt location 30 8 x 9 987 Adjuster foot 350 325 375 Anti-quake bracket 1217 Anti-quake bracket mounting position (

17

8 12 to 25 Over 100 stroke 50 or more !

AC Servo Motor Driver (CC-Link Type)

(Refer to section 10.4.) 8 8 8 CPU error CPU watchdog error has occurred. JOG operation positioning operation programmed operation DO forced (Note 4) 0 0. b output single-step feed (Note 4) Test operation mode # #. d (Note 1) Motor-less operation # #.

Compact Type Dual-Rod Cylinder Series CXSJ

8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Thread size M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.

Mechanical Valves Series NVM, NVFM, NVZNI

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: I I I SM.9.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

MK

8 !

CXT

Magnetic substance (Iron plate, etc.) 8-27-12

ASD

Metric Inch Model Port size 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 X 0.8 R(PT)1/8 R(PT)1/4 R(PT)1/4 R(PT)3/8 R(PT)1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT1/8 NPT1/4 NPT1/4 NPT3/8 NPT1/2 Specifications Proof pressure 1.5MPa Max. operating pressure 1MPa JIS symbol

MB1

When replacing brackets, use the hexagon wrenches shown below. ) m m ( e z i s e r o B t l o B s t a l f s s o r c a h t d i W e u q r o t g n i n e t h g i T 0 4 , 2 3 7 4 2 1 C 8 4 2 3 B M 4 1 . 5 3 6 , 0 5 9 4 2 1 C 8 4 0 5 B M 5 1 1 0 0 1 , 0 8 t o o F 1 5 2 1 C A 8 4 0 8 B M 6 5 2 r e h t O 1 5 2 1 C B 8 4 0 8 B M 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA CHINA

2/3 Port Valve for Various

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 The VX series will be revised shortly.

XL

Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials

Air Pilot Operated

Side cylinder ports ,.A', & ,,8" are locatect on the "B" Pilot side of the manitotd and.Stalion, tdentificalion is oblained by numbering trom lelt to right as viewed trom the ,8,. Solenord side. .9 fi V f--'.--ry] f+r-q | r + r i | | t-?-!+-<-{ l r l tF)-)-+++--(lr{ I , _ ' I{ANIFOLD BLOCK PART NO. NO. PRESSURE CYLII{OEF " A & 8 " EXHAUST "EA & E8" SIDE aoTTor !

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

+ + 20 + + + + + 20 stations S F G P R P R A, B port size R port 1/8 R port 1/8 N NPT A B B A M5 M5 x 0.8 A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 T NPTF A, B port M5 x 0.8, C4 C4 One-touch fitting for 4 N3 One-touch fitting for 5/32" Type 41 (5 Port/Base mounted) Applicable solenoid valve SYJ340SYJ343How to Order SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid coil is on

Pin Clamp Cylinders

Lock ring 49.5 50 250.1 Head side Mounting surface 27 D 32.5 19.8 0 0.05 d Mounting surface position 52 Q Q K 120 C Port side 8 to 10 A Mounting surface 67 12 85.5 14.5 26 10.5 (79) Port side Diamond cut shape (Guide pin dia.: 9.5 or more) B Mounting surface 100 20 15 15 MK 1470.1 Port side MK2T C Mounting surface CK1 300.05 Mounting surface (285) CLK2 D Port side CLKG Rc1/8 Unlocking port

CL

8 !

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SUNX Corp.: S-LINK System (16 output points) 8 SUNX Corp.: S-LINK System (8 output points) 1 to 4 stations 8 stations D side DeviceNet, CompoBus/D (OMRON Corp.) 16 16 stations 1 to 8 stations OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) 8 8 stations 1 to 4 stations Mitsubishi Electric Corp.: CC-LINK System 16 stations 16 1 to 8 stations

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to the applicable tubing table to the left LQ LVN Variations Basic size With reducer LVD10 LVD20 Model LVD30 LVD40 LVD50 TI/ TIL Orifice diameter 2 4 8 10 16 Tubing O.D. Metric PA 4 4, 6 6, 8, 10 10, 12 12, 19 Inch Valve type Symbol Type 3, 1/8 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 PAX Basic type N.C. PB PB PA PA N.O. PB B A B A B A N.C. N.O.

,,: ,.

/t08 c/6 3/8 718-14 7ls t.79 .408 5/8 1t2 718-14 7t8 1.98 .501 Tube To Male Pipe: 90' ELBOW 1i8 1ts 3/16 1t8 3/16 'v4 Consult factory for iniormation 114 1t8 114 114 114 3/8 1t4 1t2 vl6 1/8 112-20 .90 .220 5/16 114 1t2-20 qt .vc .220 5/16 318 1t2-20 .98 1 .01 .219 5/16 'v2 Consult iactory lor iniormation 3i/S 1/8 5/8-18 1.01 .220 3/8 1t4 5/8-18 1.01 1.O5 .283 3/8 3lS y8-18 1.O4 1.07 .28'l