Speed control 3-4. Direction control 3-5. Design 3-6. Mounting, Installation and others 3-7. Auto switches 4. Model Selection 9 4-1. Allowable kinetic energy 4-2. Allowable lateral load of the plate 4-3. Allowable eccentric load 4-4. Allowable rotating torque of the plate 5. Pneumatic Circuit 11 6. Maintenance 11 6-1. Daily check 6-2. Regular maintenance 7. Troubleshooting 12 8.
(Values at the initial period) 10 - 4.
Option Part number Remarks Weight With lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.
Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2
9 Magnet Nickel plated @0 Hexagon socket head set screw Stainless steel @1 Resin case Resin @2 725 Series MRHQ Dimensions MRHQ10 A B 34 41 54.5 4 x M4 x 0.7 depth 6 24.5 0 -0.062 37h9 0 -0.1 4 31 +2.2 0 15.2 opened 0 -0.1 5 0 -0.7 11.2 closed M5 x 0.8 4 x M2.5 x 0.45 (attachment mounting screw ) Finger closing port 3 Max. 6.1 5.7 13.7 12 4 x M4 x 0.7 depth 6 (two on opposite side) 34 M5 x
Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the
ZS-26-E-4 R04 4 plug-in reducer Connector for PSE300 1 pc.
Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/4 40 to 42 Rc 11/2 48 to 50 Rc 2 48 to 50 Reference How to tighten M5 threads on the fittings After tightening by hand, use a tightening tool to add about 1/6 turn more. But when using miniature fittings, after tightening by hand, use a tightening tool to add 1/4 turn more.
KBZ1-06 16 Rc 3 8 Applicable tubing Bulkhead Female Connector: KBE Female Connector Union: KBH T Connection thread Applicable tubing O.D. 4 Model Model KBH1-R1S KBH2-R1S KBH2-R2S KBE1-04 KBE1-06 KBE2-06 R 1 8 Air Supply Port: KBE, KBH, KBB, KBS, KBL (P. 15-3-114, 115) 6 KBH2-R3S KBH3-R2S KBH3-R3S KBH3-R4S KBH4-R3S KBH4-R4S R 1 2 R 3 8 R 1 2 R 3 8 R 1 4 R 3 8 R 1 4 KBE2-08 KBE2-10 KBE3-08
175 D Flanged Models Threaded Models 1/4 N/A 5.5 1-1/4 5.91 18.11 1.65 4.80 476 AFW275-N12D-WS 280 1/4 N/A 5.5 1-1/2 5.91 18.11 1.65 4.80 545 AFW325-N14D-WS 320 1/4 N/A 8.8 1-1/2 7.09 18.98 2.05 5.75 680 AFW400-N14D-WS 400 A 1/4 N/A 8.8 2 7.09 18.98 2.05 5.75 1,189 AFW700-N20D-WS 700 1/4 N/A 18.7 2-1/2 7.87 23.43 2.64 8.27 1,445 AFW850-N25D-WS 850 B 1/4 N/A 18.7 3 7.87 23.43 2.64 8.27 2,550
Construction 1 4 1 4 1 3 1 6 6 2 5 5 7 Connection thread: G Connection thread: R,NPT Male connector Male elbow Swivel elbow No.
after R thread installation R1/4 L [mm] Part no.
input and controling GW 24 VDC GW unit 4 2 3 7 8 Accessory No.
Note 3) Option "T" is not available for IDU6D, 8D-4 and -6.
Model Orifice size Port size Material Body Seal 4.5 mm 10 mm 6 mm 8 mm 3 mm 2 mm VX21 1/8, 1/4 NBR 1/4, 3/8 Brass Stainless steel VX22 FKM 1/2 EPDM 1/4, 3/8 VX23 PTFE 1/2 Normally Open (N.O.)
Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
Note 3) The unit % F.S. is based on the full scale of analog 4 V (1-5 V). Note 4) 0 kPa indicates the atmospheric release.
180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 Pitch of mounting on the wall is CA and CL.
9 to @2 20Solenoid valve with adapter assembly SYJ3 3-M VZ5 4 -M VF3 4 -M VZ3 4 -M A B A B A B A B @3 Data Note 1) Seal kit includes !9 to @2. Order the seal kit, based on each bore size.