Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

Platform Cylinder Series CXT

15 20 5 CXT 32 40 1 10 10 5 10 15 5 2 10 15 10 10 15 5 (mm) D-F7W D-J79W D-F7BAL D-F7NTL D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted CXT 32 40 1 5 5 10 15 15 20 2 5 10 15 15 20 20 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A9 D-M9 D-M9W D-M9AL

I/O Configurator (NFC version)

The number of effective points is limited within the set range of the output size. 0 to 32 points (0 to 4 bytes) Increase and decrease by 8 points (1 byte). d) Valve manifold 32 points/ 4 bytes Available output size e) Wireless communication Active/Idle Active Available If it is set to "Idle", the wireless communication is disconnected. f) AD refresh time 0.1/0.2/0.5/1/2/5/10/30/60 s 1 s

LEF-OM007xx

6 1000 20 5 100 30 4 10 50 6 1000 5 5 100 15 4 10 30 6 1000 20 5 100 50 4 10 60 6 1000 10 5 100 40 4 10 50 6 1000 50 5 100 80 4 10 100 LEFS16 500 500 LEFS25 900 500 Please aspirate it from the port on both sides when aspirating 50 /min(ANR).

PSE550/300

Range Rated differential pressure range 1 4 For low differential pressure 0 to 2 kPa 2 kPa 0 A C B D Pressure Differential pressure Pressure Differential pressure A C B D 16-3-37 6 Series PSE300 Internal Circuit PSE300 NPN open collector output (2 outputs), Max. 30 V or 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k PSE303 PNP open collector output

IDX-OM-W011

13.S 13-2 IDF1EIDF3E L N PE M3 6.5mm 2 1.25mm IDF4E15E1 L N PE M3 6.5mm 2 1.25mm 13-3 1-1 IDF Series 13-2 13-2 I D XO M W 011 14 T 14 T I D F4E/6E/8E/11E/15E1 141 I EC 142 AC200V / 2A D C24V / 2A ( 20V / 5m A) 143 O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE: L N: LN PE M 3 6. 5m m 1. 25m m 2 ( ) ( ) I D F Seri es 144

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit [Option]

Example: -BKN Electrical entry Lead wire connector location Max. number of solenoids for special wiring specifications Note 2) CEcompliant Station (Double wiring) Kit type Cable/SI unit specifications D-sub connector (25P) kit, without cable D-sub connector (25P) kit, with 1.5 m cable D-sub connector (25P) kit, with 3.0 m cable D-sub connector (25P) kit, with 5.0 m cable Flat ribbon cable

XL-OMV0002

-1 XLC25-30-1 XLC40-30-1 XLC50-30-1-1 XLC16-30-1H XLC25-30-1H XLC40-30-1H XLC50-30-1H-1 63 80 100 160 XLC63-30-1-1 XLC80-30-1-1 XLC100-30-1-1 XLC160-30-1-1 XLC63-30-1H-1 XLC80-30-1H-1 XLC100-30-1H-1 XLC160-30-1H-1 1) M9// 2 (FKM:No.1349-80) XLC16-30-1-M9//-XN1 3)Assy / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401

XLG Series

-30-1H-1 XLG80-30-1H-1 XLG100-30-1H-1 XLG160-30-1H-1 Note1) The magnet for auto switch is not provided.

LEC-OM034xx

0 to 30 10% 30 Pushing speed 1 0 to 255 mm/s 31 Positioning thrust 1 0 to 30 10% 32 H 33 L In pos 2 0 to 65500 0.01mm ID2 34 to 53 Same as ID1 ID3 54 to 73 Same as ID1 ID4 74 to 93 Same as ID1 ID5 94 to 113 Same as ID1 Note) "0" is "no send" at mode of data writing. "1" and "2" contain "send" at mode of data writing. 42 - 12. 2 Controller IF status flagIN Data Controller IF flag is sent back

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

Rotary Table: High Precision Type

D-R732C R73C Relay 24 VDC 5 to 40 mA PLC Relay 24 V AC/DC or less 50mA D-R801 D-R802 R80 PLC 48V AC/DC 40mA D-R8 IC circuit 100V AC/DC 20mA D-R801C D-R802C R80C Relay 24V AC/DC 50mA PLC D-S7 D-S791 D-S792 S79 28 VDC or less 40mA or less Relay D-S7P1 D-S7P2 S7P 80mA or less PLC D-S9 D-S991 D-S992 S99V S99 28 VDC or less 40mA or less IC circuit D-S9P1 D-S9P2 S9PV S9P 80mA or less D-T7 D-T791

Stainless Steel 316

22.5 18 20.9 23.3 D 6 Applicable tubing 30.1 3/8 23.8 35 17 35.5 1/4 29.5 28 10 8 23 39 M 31 3/8 24.7 29 L 19 3/8 26.5 30 12 32.8 24.8 10 60 22 1/2 24.6 54 Connection thread (with sealant) Reference dimensions after installation of R thread Note 1) D is maximum diameter.

VK3000

diagram VK VK Surge voltage supressor (Built-in terminal) LED VT R D LED R R NL Markings For AC, 12 VDC or less For 24 VDC or more + 1 2 1 2 1 2 NL: Neon light R: Resister LED: Emitting diode R: Resister D: Protective diode LED: Emitting diode R: Resister 1429

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Unit: g Model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Auto Switch Dimensions Auto Switch Internal Circuit D-M9 M2.5 x 4l mounting hole Slotted set screw Indicator light D-M9B, N, P D-M9N DC(+) Brown 2.6 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC(-) Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC(+) Brown 22

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature Valve size specifications 16 25 40 50 General use XLC16-30-1-2 XLC25-30-1-2 XLC40-30-1-2 XLC50-30-1-2 High temperature XLC16-30-1H-2 XLC25-30-1H-2 XLC40-30-1H-2 XLC50-30-1H-2 Temperature Valve size specifications 63 80 General use XLC63-30-1-2 XLC80-30-1-2 High temperature XLC63-30-1H-2 XLC80-30-1H-2 Note 1) Add the seal material symbol

Rotary Actuator

seal Pinion gear BR2-Plus Rack 30 - Troubleshooting Refere nce Problem Possible cause Solution page 17 Supply pressure isnt applied correctly.

Electric Actuators

to 30 5 phase 242 to 30 294 2 phase 228 to 80 5 phase 244 to 80 2 phase 284 230 to 100 LXSH5SB LXSH2SB LXSH5SA LXSH2SA LXSH5BC LXSH2BC LXSH5BD LXSH2BD LXSH5SB-B LXSH2SB-B LXSH5SA-B LXSH2SA-B LXSH5BC-B LXSH2BC-B LXSH5BD-B LXSH2BD-B 5 phase 272 to 200 2 phase 256 to 200 286 5 phase 270 to 100 2 phase 254 to 100 266 5 phase to 30 250 2 phase to 30 294 268 5 phase to 80 252 2 phase

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature Valve size specifications 16 25 40 50 General use XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 High temperature XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 Temperature Valve size specifications 63 80 General use XLG63-30-1-2 XLG80-30-1-2 High temperature XLG63-30-1H-2 XLG80-30-1H-2 Note 1) Add the seal material symbol