A_HEC-OM-I009

Range A l l o w a b l e L o w e r Setting range : 0.1 to 10.0 C Min. increment : 0.1 C Indicated content : Temp. from target to lower limit T e m p . R a n g e M O D E < 1 . 5 C (Ex. : 1.5 C) Function : Sets lower limit of temp. where the warning arises. The difference between target temp. and lower limit temp. should be input.

CV/MVGQ

' view RE A B Breathing hole REC A-A' view CX CY MQQ M RHC Manual button MK(2) RS Q G RS H A RZQ MI W S Non-lube type Long stroke type CEP1 CE1 Component Parts CE2 Note Material Material No.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

M Clean series Vacuum type B Surface D to surface B W 11-MXPJ6Stroke A Port C Clean series Vacuum type This type has a relief port provided in the side of the body, and the spread of particulates into a clean room is prevented by vacuum suction of the linear guide section and the piston section.

CLK1

If driving a load such as a relay that generates a surge voltage, use a switch with a built-in contact protection circuit or use a contact protection box.

Cylinder with lock

Pneumatic circuit W a r n i n g Use the pneumatic circuit which applies balance pressure to the both sides of the piston when locking.

CJ2

Applicable bore (mm) Round type MM A D L R N W Flat type Applicable bore (mm) TDH10 TC TH TT TU TK TV TN TW TX TY TZ Part no.

Cylinder with lock

Pneumatic circuit W a r n i n g Use the pneumatic circuit which applies balance pressure to the both sides of the piston when locking.

45

connector) SX3000 2 to 10 stations: W = 54n + 227 11 to 20 stations: W = 54n + 264 Terminal block SX5000 Note) There is a limit to the number of stations available depending on the number of solenoids required.

Cylinder with lock

Pneumatic circuit W a r n i n g Use the pneumatic circuit which applies balance pressure to the both sides of the piston when locking.

45

connector) SX3000 2 to 10 stations: W = 54n + 227 11 to 20 stations: W = 54n + 264 Terminal block SX5000 Note) There is a limit to the number of stations available depending on the number of solenoids required.

HRX-OM-R039

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

CEx-OML0058

B e g i n n i n g 1 0 0 200 200 I s t h e c y l i n d e r s k i n e t i c e n e r g y Wi t h i n t h e a l l o w a b l e r a n g e ? 1 0 0 80 100 100 80 63 L o a d w e i g h t k g f L o a d w e i g h t k g f I s t h e s p e e d w i t h i n t h e g i v e n r a n g e i n t h e 63 d i a g r a m ? A n d , w i t h i n 50 s p e c i f i c a t i o n s ?

Mist Separator Regulator

Rc C3SF-6J-A G C3SFF-6J-A Rc G C3SF-6-A NPT C3SFN-6J(Z)-A NPT C3SF-6(Z)-A Option symbol Semi-standard symbol W 6W Semi-standard: W Piping port thread ty pe (9) Part No. Rc G NPT C3SF-W(Z)-D C3SF-W-D Appearance and part No. Semi-standard: 6W Piping port thread ty pe (9) Part No.

Ｍ icro Mist Separator Regulator

Rc C3SF-6J-A G C3SFF-6J-A Rc G C3SF-6-A NPT C3SFN-6J(Z)-A NPT C3SF-6(Z)-A Option symbol Semi-standard symbol W 6W Semi-standard: W Piping port thread ty pe (9) Part No. Rc G NPT C3SF-W(Z)-D C3SF-W-D Appearance and part No. Semi-standard: 6W Piping port thread ty pe (9) Part No.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Seal guide B Slide plate Spacer Hexagon socket head cap screw MYMK-16-A MYMK-16-A MYMK-25-A MYMK-25-A MYMK-25-A Side seal unit Nickel plated Seal List No. !

Mist Separator

Rc C4SF-6J-A G Rc C4SF-6-A G NPT C4SFN-6J(Z)-A NPT C4SF-6(Z)-A Option symbol Semi-standard symbol W 6W Semi-standard: "W" Standard Port thread type Part No. Rc C4SF-W-D G NPT C4SF-W(Z)-D Appearance and part No. Semi-standard: "6W" Standard Port thread type Part No.

Micro Mist Separator

Rc C4SF-6J-A G Rc C4SF-6-A G NPT C4SFN-6J(Z)-A NPT C4SF-6(Z)-A Option symbol Semi-standard symbol W 6W Semi-standard: "W" Standard Port thread type Part No. Rc C4SF-W-D G NPT C4SF-W(Z)-D Appearance and part No. Semi-standard: "6W" Standard Port thread type Part No.

Line filter

Rc C4SF-6J-A G Rc C4SF-6-A G NPT C4SFN-6J(Z)-A NPT C4SF-6(Z)-A Option symbol Semi-standard symbol W 6W Semi-standard: "W" Standard Port thread type Part No. Rc C4SF-W-D G NPT C4SF-W(Z)-D Appearance and part No. Semi-standard: "6W" Standard Port thread type Part No.

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

p. 17 Internal Circuits and Wiring Examples a p. 18 Dimensions a From p. 20 10 2 Outputs + Analog Output (Voltage/Current) 3-Screen Display High-Precision Digital Pressure Switch RoHS ZSE20A(F)/ISE20A Series IP40 How to Order Rated pressure range ISE20A 0.1 to 1 MPa M For positive pressure ISE20A M5 X For vacuum/ compound pressure ZSE20A X M M5 q w e r t y u q Rated pressure range w Output