(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

AZ1000

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to

S Couplers Series KK130

With barb fitting With nut fitting With one-touch fitting Socket/Plug Symbol P S Type Plug Socket Semi-standard Socket (With sleeve lock mechanism) L Port size variations Barb fitting type Nut fitting type One-touch fitting type Male/Female thread type Symbol 06 08 10 12 07 09 11 13 Thread size R, Rc1/8 R, Rc1/4 R, Rc3/8 R, Rc1/2 NPT1/8 NPT1/4 NPT3/8 NPT1/2 Hose nominal 6 (1/4") 8 (1/4")

Body Ported Single Unit S0700 Series Plug Lead Type

Plug Lead Type Body Ported Single Unit S0700 Series RoHS How to Order Valves S07 1 C4 6 5 G S Type of actuation P, E port/A, B port size Symbol Specications 1 2-position single 2 2-position double 3 3-position closed center Symbol Port size C2 2 One-touch tting C4 4 One-touch tting N1 1/8" One-touch tting N3 5/32" One-touch tting A 4-position dual 3-port (N.C. + N.C.)

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2