M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.
x 2-6H7 depth 8 4-5.5 through 4-9.5 counterbore depth 5.5 2-M10 x 1.0 Adjusting bolt 2-RB1006-X552 Shock absorber (mm) F L P 45 65 90 90 90 90 90 Q 175 225 275 325 375 425 475 S 52 77 102 127 152 177 202 SS 107 132 157 182 207 232 257 Z 159 209 259 309 359 409 459 ZZ 203 253 303 353 403 453 503 Model CXWM25-50 CXWM25-75 CXWM25-100 CXWM25-125 CXWM25-150 CXWM25-175 CXWM25-200 31 33.5 33.5 46
Fig. 46 Improved Controllability PID constant of this positioner is automatically set during calibration. However, operation speed is delayed or controllability becomes unstable due to the used actuator size. These symptoms can be improved by changing PID constant.
Noise Level (Reference values) Model ZK207 ZK210 ZK212 ZK215 ZK2G (High-noise reduction silencer exhaust) 46 55 63 69 Noise level [dB(A)] ZK2A (Silencer exhaust) 59 66 75 76 -47No.
Note 4) Refer to the Piping Precautions (Piping material for low dew point air) on page 46. Note 5) ANR indicates the flow rate converted to the value at 20oC, under the atmospheric pressure and the state of relative humidity 65%. Note 6) Includes 1 L/min [ANR] of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator.
2 Component Parts Component Parts Note No. 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 No.
L dimension Weight (g) 460.5 448 435.5 423 410.5 398 385.5 373 360.5 585.5 573 560.5 548 535.5 523 510.5 498 485.5 473 610.5 598 82.9 80.6 78.4 76.1 73.9 71.6 69.4 67.1 64.9 105.4 103.1 100.9 98.6 96.4 94.1 91.9 89.6 87.4 85.1 109.9 107.6 62 61 60 59 49 58 48 57 47 56 46 55 45 54 44 53 43 52 42 51 50 No.
Unless otherwise indicated, dimensions are the same as Grommet (G). 46 Series VF3000/5000 Dimensions: Series VF5000 (mm) Type 40/VV5F5-40-;;2-02;: When the individual EXH spacer (VF5000-75-2A) is mounted.
CU CW CX CZ RR T 32 40 50 63 M6 x 1 148 5.8 11.2 6.6 52.5 30 112.4 65 57 72.5 71 5.5 69.5 8 59 48 56 65 34 131 139 161 10 151 14 20 18 36 10 57.5 M6 x 1 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40 177 185 209 10 199 14 22 18 36 10 64.5 195.2 59 71.5 65.5 8 14.7 9 39 173.4 79 95 6.6 9 67 76 89 50 193 202 235 14 221 20 28 22 44 14 76.5 215.7 71 83.5 M8 x 1.25 94 91 78 9 16.2 11 46
(mm) Rod end male threads Water resistant type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63
4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 33.5 11.5 15.7 12 2-Rc 1/8 (Pilot exhaust port) VQ5 (6.5) 21.5 2-Rc 1/8 (External pilot port) 27 2n-Rc 1/4, 3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4: 1/4" Female thread Rc 3/8: 3/8" Female thread C8 : 8 One-touch fitting C10 : 10 One-touch fitting C12 : 12 One-touch fitting 31 VQZ 38.7 VQD Manual override Indicator light L2 L1 79.5 6.5 P=25 65.5 72 R4.5 46
AC Specification AC Specification Apparent power (VA) Energized 19 16 43 35 62 52 Apparent power (VA) Energized 22 18 46 38 64 54 Temperature rise (C) Note) Temperature rise (C) Note) Model Model Inrush Frequency (Hz) 50 45 65 60 65 60 Inrush Frequency (Hz) 55 50 65 60 65 60 10 8 20 17 32 27 11 8 20 18 32 27 50 60 50 60 50 60 50 60 50 60 50 60 VXK21 VXK21 VXK22 VXK22 VXK23 VXK23 Note) Value
81 80 6 0.1 19 18 15 24 0.2 31 29 26 39 0.3 46 35 43 33 38 30 55 47 53 44 58 51 52 48 69 64 Standard supply pressureNote 1) 0.5 72 65 66 62 59 56 83 81 Note 1) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 12.
When requiring AC specification of grommet style and/or special voltage, consult SMC. 1.12-46 VQZ1000/2000/3000 Base Mounted Manifold Specifications (1) Piping specifications Manifold base weight (g) Port size Applicable valve Applicable stations Piping Series Base model 1(P), 3/5(R) 4(A), 2(B) C3(3.2) C4(4) C6(6) M5(M5 thread) 2 stations: 105 Addition per/ station: 27 VV5QZ15 VQZ1 50 VQZ1
Power switch Tank lid with gasket Alarm connector Circulating fluid outlet External temperature sensor connector Circulating fluid level gauge Filter Circulating fluid inlet Drain (circulating fluid drain port) 136 Peltier-Type Chiller Thermo-con (Air-cooled) Series HEC-A Unit: inch (mm) Dimensions HEC002 17.2 (436) 16.3 (414) 11.8 (300) 1.8 (46) R15.7 (400) P24417154 10.6 (270) 9.5 (240)
Specifications 46 Dimensions 47 -1No.EX-OMK0006-C Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.
(Refer to page 46 "Internal circuit and wiring") It checks that the above-mentioned preparation work has been performed correctly, and "A" part shown in the left figure is pushed by hand and makes temporary connection. "A" part's center is straightly pushed in by tools, such as pliers. e-con is cannot be reused once crimped for connection.
Refer to key-lock function (page 46).
Dimensions/Weight Overall length Reverse mounting Width Symmetric mounting CXS standard CXSJ Height Note) Bore size (mm) Dimensions (mm) Weight (kg) Series Height Width Overall length 0.057 CXSJ6 42 + Stroke 32 13.4 6 CXS6 0.095 58.5 + Stroke 37 16 0.114 CXSJ10 56 + Stroke 42 15 10 CXS10 0.170 72 + Stroke 46 17 Reverse mounting mechanism 0.219 CXSJ15 70 + Stroke 54 19 Reverse mounting 15