Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers 2 pcs. 1 pc.

EX510

Accessory Dimensions 25.7 64 16 54 0.2 5 70 0.2 5 PWR (V) 40 BUS PWR 80 OUTPUT INPUT Cover view 2 x M4 Mounting hole OUTPUT INPUT COM D 60 COM C COM B COM A 1702

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

VDW

Body material/Port size/Orifice diameter Voltage/Electrical entry Size/Valve type Size Valve type Orifice diameter Body material Voltage Electrical entry Port size Symbol Symbol Symbol A B C D E F 1.0 A Grommet 24 VDC M5 1.6 Resin (PPS) With bracket B 100 VAC Single unit N.C. 1.0 Size 1 (VDW1) 1 3.2 One-touch fitting C 110 VAC 1.6 D 200 VAC 1.0 4 One-touch fitting 1.6 E 230 VAC Z Other voltages

Series VS

Series VS R8 S HOW TO ORDER ISO5599/2 VALVE MANIFOLD VV8 2 5 03 TU1 03 D T W1 W1=NEMA 4 ISO Size 1 Size 1 Port Thread Code 2 Size 2 3 Size 3 NIL Rc (PT) T NPTF F G(PF) Location of port 1(P), 5(EA), 3(EB) Number of Stations D D side 2 2 stations U U side B Both side 9 9 stations Size of port 1(P), 5(EA), 3(EB) Symbol Size Applicable ISO size 02 1/4 Size 1 U side option 03 3/8 Size 1

applications only.High rigidity slider, ball screw drive, AC servo motor, 100/200W, Horizontal or vertical mount, Maximum work load: 187 lb (85kg), Low profile, low center of gravity, ACTUATOR, ELECTRIC, ACTUATOR, ELECTRIC ACTUATOR, PC, 63MM LE ELECTRIC ACTUATOR, .00000 lb, StrokeModel (mm)200300400500600700800900100012001500LEJS63??D??D?D?DD

Fluid: air/inert gas, Operating pressure range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less

PFM7

Integrated display 7 Rated flow range (Flow rate range) Option 2 (Refer to page 907.) 0.2 to 10 (5) l/min 0.5 to 25 (12.5) l/min 1 to 50 (25) l/min 2 to 100 (50) l/min 10 25 50 11 Option 1 (Refer to page 907.) ( ): Fluid: CO2 Calibration certificate Flow adjustment valve None With calibration certificate Nil A Nil S None Yes The certificate is written in English and Japanese.

Drain Separator for Vacuum Series AMJ

Discharge Q B ZM Drain guide (-J) ZH ZU Maintenance space 40 R ZL P Rc 1/8 Drain 1/4 female thread without valve function ZY Hexagon width across flats 24 ZQ AMJ5000 L A F ZF Bracket (Option) G K M ZP D J C E ZCU OUT IN AMJ Misc. 2port size Q B Maintenance space 20 Rc 1/8 Drain (mm) A B Note) C D With drain guide R Note) Bracket mounting dimensions Model Port size Q E F G H J K L M 169 (

applications only.High rigidity slider, ball screw drive, AC servo motor, 100/200W, Horizontal or vertical mount, Maximum work load: 187 lb (85kg), Low profile, low center of gravity, ELECTRIC ACTUATOR, ACTUATOR, ELECTRIC ACTUATOR, MC, 40MM LE ELECTRIC ACTUATOR, 36.10069 lb, StrokeModel (mm)200300400500600700800900100012001500LEJS63??D??D?D?DD

applications only.High rigidity slider, ball screw drive, AC servo motor, 100/200W, Horizontal or vertical mount, Maximum work load: 187 lb (85kg), Low profile, low center of gravity, ACTUATOR, ELECTRIC, ACTUATOR, ELECTRIC ACTUATOR, PC, 63MM LE ELECTRIC ACTUATOR, .00000 lb, StrokeModel (mm)200300400500600700800900100012001500LEJS63??D??D?D?DD

applications only.High rigidity slider, ball screw drive, AC servo motor, 100/200W, Horizontal or vertical mount, Maximum work load: 187 lb (85kg), Low profile, low center of gravity, 40MM LE ELECTRIC ACTUATOR, ACTUATOR, ELECTRIC ACTUATOR, MC, 40MM LE ELECTRIC ACTUATOR, 39.6832 lb, StrokeModel (mm)200300400500600700800900100012001500LEJS63??D??D?D?DD

Fluid: air/inert gas, Operating pressure range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less

Fluid: air/inert gas, Operating pressure range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less

EXxx-OMP0004CN

-14No.EX-OMP0004CN-I D 3 -15No.EX-OMP0004CN-I LED LED LED L ERR L RUN PWR ON OFF PWR(V) ON OFF -16No.EX-OMP0004CN-I DIP (0.2 Nm) -17No.EX-OMP0004CN-I 5 L ERRLED 00 65 L ERRLED HOLD/CLEAR HOLD/CLEAR No.1 HOLD ON CLEAR OFF No.2 ON 110 OFF -18No.EX-OMP0004CN-I EX260-SMJI/O (1 32 /32 ) SI [01] QJ61BT11N EX260-SMJ1/2 I/O (1 ) (RY) (RX) (RX) (RY) E0H RX0FRX00

Dedicated Controller Series LC1 Uniaxial Type

LC1-1-S1 (PC-98 (MS-DOS) edition LC1-1-W1 (Windows 95 edition) and LC1-1-R (dedicated communication cable) Power supply 1 2 Note 2) 100/110VAC 50/60Hz 200/220VAC 50/60Hz or LC1-1-T1(Teaching box) are required. For ordering information, refer to the option part numbers on page 62.

Magnet: D (Built-in), Mounting: D (Double Clevis), Type: Standard, Bore Size: 32mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 30mm, Body Option: Standard (Rod End Female Thread, Without thread on 4mm bore), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: D (Simple Joint A Type + Joint)

Magnet: D (Built-in), Mounting: D (Double Clevis), Type: Standard, Bore Size: 32mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 50mm, Body Option: C (Rubber Bumper), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: D (Simple Joint A Type + Joint), Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical, Lead Wire

Magnet: D (Built-in), Mounting: D (Double Clevis), Type: Standard, Bore Size: 40mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 15mm, Body Option: Standard (Rod End Female Thread, Without thread on 4mm bore), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: D (Simple Joint A Type + Joint), Auto Switch: M9PV--Solid State , Gen