Stations: 07, System, Port Combinations: Ejector System, Common PV: ø5/16", Inch Size, Exhaust: 1 [Ejector System, Silencer Common Exhaust (End Plate on Both Sides)], Wiring: D-sub Connector, 25 Pins, Option: w/DIN Rail Mounting Bracket, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Stations: 07, System, Port Combinations: Vacuum Pump System, Common PV: ø8, Common PS: ø6, Metric Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: D-sub Connector, 25 Pins, Option: w/DIN Rail Mounting Bracket, Manifold Assembly, Delivery Condition: -

Stations: 07, System, Port Combinations: Ejector System, Common PV: ø8, Metric Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: Individual Wiring Specification, Option: w/DIN Rail Mounting Bracket, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Stations: 07, System, Port Combinations: Vacuum Pump System, Common PV: ø8, Common PS: ø6, Metric Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: Individual Wiring Specification, Option: None, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

AS-FG

Port size N M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: U10/32 (10-32UNF), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 07 (ø1/4)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: U10/32 (10-32UNF), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 07 (ø1/4)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: U10/32 (10-32UNF), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 07 (ø1/4)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: U10/32 (10-32UNF), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 07 (ø1/4)

Type: 40 (Standard Type), Bar Length: 1060mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 07 (ø1/4"), Bracket: w/o Bracket, Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X14 (Electrode Cartridge Drop Prevention Cover, for Standard

Type: 41 (Feedback Sensor Type), Bar Length: 1240mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: P (PNP), Power Supply Cable: N (w/o Cable), One-Touch Fitting: 07 (ø1/4"), Bracket: w/o Bracket, Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required with Electrode

Type: 40 (Standard Type), Bar Length: 1240mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 07 (ø1/4"), Bracket: w/o Bracket, Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required with Electrode

Type: 41 (Feedback Sensor Type), Bar Length: 760mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: P (PNP), Power Supply Cable: N (w/o Cable), One-Touch Fitting: 07 (ø1/4"), Bracket: w/o Bracket, Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required with Electrode

Type: 40 (Standard Type), Bar Length: 940mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 07 (ø1/4"), Bracket: w/o Bracket, Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X14 (Electrode Cartridge Drop Prevention Cover, for Standard

Type: 40 (Standard Type), Bar Length: 1480mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: N (w/o Cable), One-Touch Fitting: 07 (ø1/4"), Bracket: w/o Bracket, Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required with

Type: 42 (Dual AC Type), Bar Length: 940mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 07 (ø1/4"), Bracket: w/o Bracket, Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required with Electrode Cartridge

Type: 41 (Feedback Sensor Type), Bar Length: 1240mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 07 (ø1/4"), Bracket: w/o Bracket, Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required with Electrode

Manifold Type: 42 (Base Mounted), Valve Stations: 7 Stations, A, B Port: 01 (Rc1/8)

Manifold Type: 41 (Base Mounted), Valve Stations: 7 Stations, A, B Port: N7 (1/4" One-touch Fitting)

Manifold Type: 41 (Base Mounted), Valve Stations: 7 Stations, A, B Port: M5 (M5X0.8)