The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
The SV series employs a multi-connector instead of the conventional lead wires for internal manifold wiring. By connecting each block with a connector, changes to manifold stations are greatly simplified. Cassette base type manifolds offer the ultimate in flexibility. Manifold sections can be added using a simple release mechanism.
Fieldbus system Digital unit Screw mounting place SV : 2 places S0700 : 2 places VQC1000: 2 places VQC2000: 3 places VQC4000: 4 places SY : 2 places (5)Connect the SI unit and the valve manifold. Insert the valve plate to the valve plate set groove on the side of SI unit. Then, tighten it with the valve plate set screws (M4x6) to fix the plate. Tightening torque for set screws 0.7 to 0.8 Nm.
. (*3) When conformity to UL is required, the electric actuator and controller should be used with a UL1310 Class 2 power supply. 11 - 3.2 Parts description The detailed descriptions of each part are as follows: Side (controller version) (1) (2) (3) (8) (9) (4) SV.00 (5) ASL8500099 (6) Label of controller version (Example) controller version SV1.00 (7) (10) Side (10) No.
Fan (Air OUT) DC cable RUN LED (Green) Fan Alarm output connector 0.77 (19.5) 3.8 (96) Signal cable Model no. label 3.4 (86) 0.87 (22) 1.45 (37) 2.67 (68) Display/Operation panel Signal connector 4.6 (116)0.79 (20) Air OUT 5.4 (138) 3.9 (99) 2.4 (62) 1.4 (36) THERMO-CON 3.7 (95) SIGNAL WARNING Air IN Air IN 6.7 (170) 7.1 (180) ALARM PV WARNING SV OUT1 OUT2 DC AL1 DI RDY COM AL2 OUTPUT FUNC
~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".