Fluid fill, drain port, and filter access on the front; Color LCD screen with control pad for settings and diagnostics; RS-232C / RS-485 Communication functions; Cooling/Heating capacities (W): 1100/200, 1200/500, 1800/500, 2400/700, 3000/700, 5900/1200; Temperature stability: ±0.1°C; Power supply requirement: 200~230 VAC, 50/60Hz; Circulating Fluid: water or 15% ethylene glycol; Standards

Cooling capacities: 2kW, 4kW, 8kW, 10kW; Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility); Temperature range setting: -10 to 90°C (2kW), -20 to 90°C (4, 8, 10kW); Note: Temperature range depends on fluorinated fluid choice; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8

Cooling capacities: 2kW, 4kW, 8kW, 10kW; Circulating Fluid: 60% ethylene glycol aqueous solution; Temperature range setting: -10 to 90°C (2kW), -20 to 90°C (4, 8, 10kW); Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 2kW, 4kW, 8kW, 10kW; Circulating Fluid: tap water or DI water; Temperature range setting: 10 to 60°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 8kW; Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility); Temperature range setting: -20 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 8kW; Circulating Fluid: 60% ethylene glycol aqueous solution; Temperature range setting: -20 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Compatible motors (W): 100/200/400; Power supply voltage (VAC, 50/60Hz); 200~230; STO (Safe Torque Off) safety function available; Display and settings buttons for direct input and status monitoring; Compliant with SEMI F47 Standard; SigmaWin+ Configuration software required (download available separately)

Positioning table available on LECSA (7 points) and LECSC (255 points); Compatible motors: 100/200/400W servo motors for 200~230 VAC; Display and settings buttons for direct input and status monitoring; Configuration software required (sold separately)

EtherNet/IP™: AOI available for Studio 5000 Logix Designer; EtherCAT®: IEC61158 Type 12 CAN application protocol over EtherCAT® (CoE) and IEC61800-7CiA402 drive profile; PROFINET: includes PROFINET IO Real Time (RT); Compatible motors (W): 100/200/400/750; Power supply voltage (VAC, 50/60Hz): 200~240; Display and settings buttons for direct input and status monitoring; LEC-MRC2 Configuration

Positioning table points: 255; Compatible motors (W): 100/200/400; Power supply voltage (VAC, 50/60Hz): 200~230; Display and setting buttons for direct input and status monitoring; LEC-MRC2 Configuration software required (sold separately); C-UL-US listed (LECSC2-T only)

The valve is rated at 70 million cycles for the rubber seal and 200 million cycles for the metal seal. Side, top and bottom port/pipe directions are available to allow flexible installation.

Bore sizes: 20, 25, 32, 40, 50, 63 mm; Stroke lengths (20, 25 bore): 20, 30, 40, 100, 150, 200 mm; Stroke lengths (32, 40, 50, 63 bore): 25, 50, 100, 150, 200 mm; FKM, fluoropolymer seal option; NSF-H1 food grade grease option; Auto switch capable

Double acting, single rod; Bore size (mm): 125, 140, 160, 180, 200, 250, 320; Available port threads: Rc, NPT, G; Optional rod boots; Auto switch capable

Bore sizes: 20, 25, 32, 40, 50, 63 mm; Stroke lengths (20, 25 bore): 20, 30, 40, 100, 150, 200 mm; Stroke lengths (32, 40, 50, 63 bore): 25, 50, 100, 150, 200 mm; FKM, fluoropolymer seal option; NSF-H1 food grade grease option; Auto switch capable

psig (0 to 1.4 MPa)], Gauge Port, Outlet: 2 [0 to 200 psig (0 to 1.4 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Seat Material: PCTFE, Standard, Flow Specification: Standard, Cv: 0.9

psig (0 to 1.4 MPa)], Gauge Port, Outlet: 2 [0 to 200 psig (0 to 1.4 MPa)], Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material: PCTFE, Standard, Flow Specification: Standard, Cv: 0.09

: 2 [0 to 200 psig (0 to 1.5 MPa)], Gauge Port, Outlet: No Gauge Port, Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Seat Material: PCTFE, Standard, Flow Specification: Standard, Cv: 0.09

: 2 [0 to 200 psig (0 to 1.5 MPa)], Gauge Port, Outlet: No Gauge Port, Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Seat Material: PCTFE, Standard, Flow Specification: Standard, Cv: 0.09, Bonnet: P (Panel Installation)

), Gauge Port, Inlet: 2 [0 to 200 psig (0 to 1.5 MPa)], Gauge Port, Outlet: No Gauge Port, Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Seat Material: PCTFE, Standard, Flow Specification: Standard, Cv: 0.09

), Gauge Port, Inlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Outlet: 2 [0 to 200 psig (0 to 1.5 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Seat Material: PCTFE, Standard, Flow Specification: Standard, Cv: 0.09