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Incorrect description corrected on page 12, outside diameter dimension drawing layout changed on page 13. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

. -10- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved -11-

Name Material Remark 1 Body A PBT 2 Body B Brass Electroless nickel plating 3 Handle POM 4 Needle POM 5 End cover Brass Electroless nickel plating 6 Spring Steel wire 7 U-seal HNBR 8 O-ring NBR 9 Needle O-ring NBR 10 Y seal NBR 11 Seal for fitting NBR 12 Cassette 16 Seal NBR For G thread only. 11 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249

[January 2021] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2021 SMC Corporation All Rights Reserved No.EX-OMO0007-E

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 13 VFR5000OMA0001B S Revision history A Renewal MZ B Safety Instructions PQ 1st printing: AZ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

NBR 1 JIS B 2401, P3 O ring NBR 2 IL211 290301 Diaphragm Assy NBR 1 Part number Part name Material Quantity 29038 Diaphragm NBR 1 290311#1 Valve BRASS 1 JIS B 2401, P21 O ring NBR 2 JIS B 2401, P8 O ring NBR 2 JIS B 2401, P5 O ring NBR 1 JIS B 2401, P3 O ring NBR 2 -9- -10-10- -11#1 -11-11- Revision A Format change and content review B Drawings update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Note5) The following combinations are available: A+G or B+G F Note6) "J" has a terminal box, but it is non-explosion-proof specifications. 30 12.Attached Drawing D 31 32 33 34 35 36 37 Revision history Revision D 10/ 7/2020 Revision E 25/12/2020 Revision F 25/ 4/2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com

.: GR-S-010 (10g) * Material of dust cover: CR: Chloroprene rubber FKM: Fluoro rubber Si: Silicon rubber * End boss type: W: One-touch double fitting K: One-touch fitting M: M5 port E: Side ported type * Other than E type, end boss assembly is mounted with specified body. 18 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL

If any of the troubleshooting is not applicable, please contact your SMC sales representative. 8 Dimensions -12- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation

. -3- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

. -22- Revision history No.LEJ*-OMZ0012 Jun / 2021 First edition 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http: / /www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved -23-

P6 Add without ventilation to the end of Operating / Storage Environment section1. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved 24

CE : EMC 2004/108/EC Low Voltage Directive 2006/95/EC UL : UL61010-1 SEMI : S2-0706, F47-0200 9.4.2 When the product is exported, strictly follow the laws required by the Ministry of Economy, Trade and Industry (Foreign Exchange and Foreign Trade Control Law). 9-5 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http

Revision history Rev.BApr.2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

B : October, 2022 Caution on Installation Clerical error correction 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

[July 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2022 SMC Corporation All Rights Reserved No.PF-OMJ0016-J

IZ*-OMT0002 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved 22 -

4 14 HEXAGON SOCKET CAP BOLT Alloy steel 2 15 WEAR RING Resin 2 16 PISTON SEAL NBR 1 17 ROD SEAL NBR 2 18 GASKET NBR 1 19 ELEMENT Bronze 1 20 RELEASE BOLT Alloy steel 1 21 SEAL WASHER NBR+Stainless steel 1 22 HEXAGON SOCKET CAP BOLT Bronze 4 23 UNIT COVER Aluminum alloy 1 Do not disassemble the lock unit or perform maintenance. 24 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

NBR 7 Push rod Aluminum alloy 22 DYP-seal NBR 8 Push rod cover PBT 23 O-ring NBR 9 End Body PBT 24 O-ring NBR 10 Body A PBT 25 O-ring NBR 11 Body B Brass Electroless nickel plating 26 O-ring NBR 12 Elbow body PBT 27 O-ring NBR 13 Valve NBR 28 O-ring NBR 14 Spring Stainless steel 29 Seal NBR G thread type 15 Spring Stainless steel -12- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Warning(8) on p15 28 - Revision history No.LEKF-OMZ0008 May / 2021 1st printing No.LEKF-OMZ0008-A Mar / 2021 Revision No.LEKF-OMZ0008-B Feb / 2023 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http: / /www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer