5 Port Solenoid Valve

, D-sub connector, 25 pins, 16 outputs EX600-DYPE PNP output, D-sub connector, 25 pins, 16 outputs EX600-DYNF NPN output, Spring type terminal box, 32 pins, 16 outputs EX600-DYPF PNP output, Spring type terminal box, 32 pins, 16 outputs w Digital Output Unit EX600-DMNE NPN input/output, D-sub connector, 25 pins, 8 inputs/outputs EX600-DMPE PNP input/output, D-sub connector, 25 pins, 8 inputs

CC

28 1 40 27 115 100 3/4 62 180.5 124.9 135 MVGQ CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 3/4 80 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 3/4 80 135 180.5 124.9 135 CC CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 3/4 80 80 135 135 180.5 124.9 135 CCVL0-S 3/4 RB Pitch of mounting on the wall

CC

28 1 40 27 115 100 62 3/4 180.5 124.9 135 MVGQ CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CC CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 RB Pitch of mounting on the wall

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Refer to pages 2-5-40 to 2-5-43 for with control unit. 01 1 station Cylinder port D U D side entry U side entry C8 C10 C12 02 03 B CM With One-touch fitting for 8 With One-touch fitting for 10 With One-touch fitting for 12 Rc 1/4 Rc 3/8 Bottom ported Rc 1/4 Mixed 18 18 stations U D U D Note 2) Note 3) Note 4) Note) As an option, the maximum number of stations can be increased by special wiring

Air cylinder

(See page 16, Table 6.) < Applicable Auto switches > Solid state auto switch D-G59, D-G5P, D-K59, D-G5BA D-G59WD-G5PWD-K59W D-G59FD-G5NT < Applicable Auto switches > Solid state auto switch D-H7BAL, D-H7NF Reed auto switch D-C73C, D-C80C Reed auto switch D-B54D-B64D-B59W Fig. 3 Mounting and movement of the auto switch Fig. 4 Mounting and movement of the auto switch (1) Wind a band on the

LG1H

A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

1

M2 20-CM2 Standard type 20-CM2A Standard with air cushion type 20-CM2W Double rod type 20-CM2K Non-rotating rod type 20-CM2R Direct mount type 20-CBM2 End lock type Air cylinder Series M(D)B 20-M(D)B Standard type 20-M(D)BW Double rod type End lock type 20-M(D)BB 6-18-2 3 Copper-free Air Cylinders Air Cylinders Bore size (mm) Series Application 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100

SYJ300-OMU0003

Series LM S + Z S Z + 4WA 4WA R U +3WA 3WA R U 4(WA ) 4(WA ) 3(WA ) 3(WA ) () DC24V,12V +1/4 DC24V W WA + ,W13WA 43 DC24V,12V 62ms i1:i2 WA 11 No.SYJ300-OMU0003 SYJ Series S 904 3.57 JIS C 3306 0.5mm L M DIN ) (Z) 22 3 0.4Nm (DZ) (1.652.5N m) () NL: () () (3 ) 1V (0.20.25Nm) DIN Y Y DIN DIN 8mm DIN D SY100-61-3-05 DDIN 9.4mm D DIN DC24V 24V SY100-61-3

IZS30_eng

How to order I Z S 3 0 7 8 0 S B I Z S 3 0 D 1 I Z S 3 0 C S I Z S 3 0 B E I Z S 3 0 N T Ionizer Bracket Product name I Z S 3 0 Bar type Ionizer B Mounted Not mounted For "mounted", two brackets for body end are attached. Number of attached bracket for body middle part is by the bar length.

Cylinder with lock

(P.20) < Applicable Auto switches > Solid state switch D-M9N(V)M9P(V)M9B(V) D-M9NW(V)M9PW(V)M9BW(V) D-M9NA(V)M9PA(V)M9BA(V) Reed switch D-A90(V)A93(V)A96(V) How to mount and move the auto switch Fig. 8 Note 1) For the tightening of the mounting screws (M2.5), use a precision screwdriver with a handle diameter of approximately 5 to 6 mm.

Fieldbus system Digital unit

If turned too far, it will become hard to remove the connector. (1) (2) (3) D-sub socket connection method is explained below. (1)Align the D-sub socket connector of the unit and the plug connector of the cable. (2)Insert the plug connector of the cable into the D-sub socket connector of the unit vertically.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Reuse AS-FE Nominal thread size Chamfered dimension D Min.

Magnetically Coupled

10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 32 1-1/4" 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.

Pulse Valve

D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5 92.5 36 19.3 48.8 JSXFAF-10 1 94 63.5 110.5 44 22.2 60.2 JSXFAF-14

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

CC-LINK System PROFIBUS-DP (COM) DI unit (For input) M12 8 number of inputs U D U D U D U D U D U D U D U D U D U D U D U D U D U D U D U D EX323 -S001 EX123 -SMB1 EX124 -SMB1 EX123 -STA1 EX123 -SSH1 EX123 -SUW1 EX124 -SAB1 EX123 -SUH1 EX123 -SSL1 EX123 -SSL2 EX123 -SFU1 EX124 -SDN1 EX124 -SCS1 EX124 -SCS2 EX124 -SJN1 EX124 -SMJ1 EX240-SDN2 EX240-SPR1 EX240-IE1 Dedicated output model For

HRX-OM-M005

5 to 40 Circulating fluid flow setting range*4 L/min 10 to 40 10 to 40 Circulating fluid discharge pressure display range MPa 0 to 1.5 0 to 1.5 -30 to 40C: Galden HT135*5 FluorinertTM FC-3283*5 20 to 90C: Galden HT200*5 FluorinertTM FC-40*5 Circulating fluid (No intrusion of foreign body) Refrigerant R404A (HFC) R404A (HFC) Quantity of refrigerant kg 2.9 0.72 (At 20L/min) 0.72 (At 20L/min

Stainless Steel Heat

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/

HRL

Cooling Capacity HRL100-Am-40 (CH1)*1 HRL200-Am-40 (CH1)*1 30 14 12 Ambient temperature 32C 25 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 20 8 15 6 10 4 Ambient temperature 45C Ambient temperature 45C 5 2 0 0 5 20 10 15 25 30 35 5 20 10 15 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRL300-Am-40 (CH1)*1 HRL100/200/300-Am-40 (CH2

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto