SMC Corporation of America
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miniature components Escorting printed matter 13-2-2 2 Vacuum Module: Ejector System/Vacuum Pump System Series ZX Modular Components Introduction Vacuum Pump System System Ejector System 13-2-4 to 13-2-39 13-2-40 to 13-2-65 Component equipment Characteristics Ejector unit Series ZX1 Nozzle diameter (mm) 0.5 0.7 1.0 Max. suction flow (/min(ANR)) 5 10 22 ZX Air consumption (/min(ANR)) 13 23 46

Input of set values Setting of Setting of tP2L/tn2L Setting of Setting of tP_2/tn_2 P2L/n2L Setting of P_2/n_2 P2H/n2H P2/n2 tP2H/tn2H H_2 tH_2 WH2 (Page 47) tWH2 (Page 44) (Page 44) (Page 46) (Page 46 4. Delay time Setting of dtH2(ON) Setting of dtH2(ON) dtL2(OFF) dtL2(OFF) (Page 45) (Page 45) 5. Selection of display colour rED/Grn/1SoG/1Sor/2SoG/2Sor (Page 48) 6.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12 0 0.1 Prepared hole dia. 5.1 through (Mounting hole) MHS MHC MHT 46 46 60 97 MHY 0.02 23 MHW MRHQ 34H9 depth 4 +0.062 0 0 0.5 +2.5 0 40 (49) 29 26 40 12 67 (76) Misc.

44 45 50 48.5 49.5 52.5 55 55 55 57.5 57.5 57.5 99.5 38 47.5 46 47 52 50.5 51.5 68.5 71 71 71 73.5 73.5 73.5 78.5 88.5 87 90 93 91.5 94.5 102 102 102 104.5 104.5 104.5 2 3 12 Direct Operated 2 Port Solenoid Valve Series VXN Air Air Medium vacuum Medium vacuum Oil Water Dimensions/Body Material: C37, Stainless Steel mm VXN Conduit Faston type Specifications Specifications For Air/ D z 280

Description Note IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75/75L/75S IDG100/100H/100L/100S IDG-EL60 IDG-EL60L IDG-EL75 IDG-EL75L IDG-EL100 IDG-EL100L y Membrane module kit IDG-EL30 IDG-EL50 u i IDG-DP01 Dew point indicator kit Option: P IDG-DP01-X001 14-19-29 26 Series IDG Dimensions IDG1 (293) Purge air outlet for dehumidification (67) (46) (26) IN Port size: 1/4 OUT Port size

Description (The gure shows the HRS-150-A-20.) q Hose (I.D.: 0.6 in [15 mm], Length: 27.5 in [700 mm]) Relief valve set pressure: 46 psi [0.32 MPa] (The relief valve starts to open when the circulating fluid discharge pressure reaches 46 psi [0.32 MPa] .)

[F14] Zero cut-off setting completed 46 No.PF-OMU0002-D Settable flow range when [L] is selected by the units selection function Displayable flow range Zero cut-off Zero cut-off set value range PF3A703H PF3A706H PF3A712H 0.0 0%F.S. 0 to 3150 L/min 0 to 6300 L/min 0 to 12600 L/min 30 to 3150 L/min 60 to 6300 L/min 120 to 12600 L/min 1.0 0 to 1%F.S.

Fig. 46 Improved Controllability PID constant of this positioner is automatically set during calibration. However, operation speed is delayed or controllability becomes unstable due to the used actuator size. These symptoms can be improved by changing PID constant.

Release piston seal NBR Hard chrome plated 41 6 Piston Aluminum alloy Rod seal C NBR Chromated 42 7 Taper ring Carbon steel Piston guide gasket NBR Heat treated 43 8 Ball retainer Special resin Intermediate cover gasket NBR 44 9 Piston guide Carbon steel Unlocking cam gasket NBR Zinc chromated 45 10 Brake shoe holder Special steel Head cover White hard anodized Aluminum alloy Heat treated 46

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

7 28 7 Silencer (Option) 113 113 IN port Rc 1/4 OUT port Rc 1/4 IN port Rc 1/4 OUT port Rc 1/4 23 27 23 27 22 22 40 60 4 x 5.5 60 4 x 5.5 EXH port Rc 1/4 8.5 70 70 50 (When silencer installed: 125) (When high-noise reduction silencer installed: 126) (97) EXH port Rc 1/4 VBA20A-03 300 39 Pressure gauge (Option) 28 IN side gauge port Rc 1/8 OUT side gauge port Rc 1/8 IN port Rc 3/8 176 43 46

(Parameters not relevant to Slot 0 are also shown) 46 EX## OMS1015-A (E.g.) When an analog output unit or analog input unit is connected to Slot 0, and channel 0 needs to be changed to analog range 4-20mA. 3) Select Channel0 (Sub Index 01) from the Slot _AnalogRange (Index 300B) folder.

Refer to key-lock function (page 46 ). Press the or button in function selection mode to display [F13]. Press the button. Select security code [Pin] and the set value are displayed in turn. Press the or button to select. Press the button. Return to function selection mode.

Error Messages & Countermeasures 46 11-1. Controller 11-2. Brake Units Life Span 12. Appendix 50 12-1. Data Sheet Specifications are subject to change without prior notice CE2/CEU2 MONOSASHI-KUN WITH BRAKE/CONTROLLER Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

How to Order 10 Summary of Product parts 10 Mounting and Installation 11 Installation 11 Wiring 12 LED Display 17 Setting of EtherNet/IPTM using RSLogix5000TM 20 I/O memory map 22 Web server function 30 Specification 39 Specifications 39 Dimensions 41 SI unit Model Indication and How to Order 42 Summary of Product parts 42 Mounting and Installation 43 Installation 43 Separate power supply 46

0.025 0 depth 3 6 20 8 20 8 3 2-M6 x 1 thread depth 6 Mounting thread Groove for auto switch mounting 25 84 19 Low Profile Air Gripper Series MHF2 Dimensions MHF2-20D2 Scale: 50% 42 42 42 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 4-M6 x 1 thread depth 15 Mounting thread 6 159 6 62 174 2-M6 x 1 thread depth 6 Mounting thread 33 144 E 13 25 25 30 41 E 4-5.2 through (mounting hole) 0 -0.1 32 46

plate R 3 0 3 0 3 0 center DIN rail 92 34 17 Setting dial P P P T T T U U U E E E L L L L L L S S S 20.5 81 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 18 12 Pressure gauge Plug SUP port Rc, NPT, G 1/8 DIN rail mounting bracket 24 L3 11.2 5.25 L4 L5 Electrical entry dimensions Left Right Right angle Straight union n Stations 1 Stations L1 L2 L3 L4 L5 1 46

thread D H Hexagon width across flats B1 Rod end nut H1 C X L1 Rod End Male Thread (mm) Bore size (mm) B1 C D H H1 K L1 X 17 17 19 19 6 6 7 7 16.5 16.5 19.5 19.5 16 16 20 20 M10 x 1.25 M10 x 1.25 M12 x 1.25 M12 x 1.25 14 14 17 17 26 26 30 30 19 19 22 22 32 40 50 63 Basic Style (mm) Bore size (mm) A B C D E F H I J K L M N OA OB Q RA RB T Z 51 52 53 57 44 45 45 49 12 12 16 16 16 16 20 20 46

Silao-Trejo K.M. 2.5 S/N, Predio San Jose del Duranzo C.P. 36100, Silao, Gto., Mexico TEL: 472-72-2-55-00 FAX: 472-72-2-59-44/2-59-46 FRANCE SMC Pneumatique S.A. 1 Boulevard de Strasbourg, Parc Gustave Eiffel, Bussy Saint Georges, F-77600 Marne La Vallee Cedex 3 France TEL: 01-64-76-10-00 FAX: 01-64-76-10-10 CHILE SMC Pneumatics (Chile) S.A. Av. La Montaa 1,115 km. 16,5 P.

(mm) Maximum suction flow rate (l/min (ANR)) 18 24 36 40 20 26 36 Air consumption (l/min (ANR)) Model 0.5 12 23 46 95 16 32 70 ZM07H 0.5 MPa 0.7 1.0 1.3 0.7 1.0 1.3 ZM10H ZM13H ZM07M ZM10M ZM13M 0.35 MPa Adaptable for a manifold application All tubing, wiring, indicators, and adjustment functions have been eliminated from the side surface, thus enabling assembly and maintenance while linked