VXH

Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. 4 ' C ' C 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) ) D G C D, T S S L, Z 3 ) E E 3 0 ( 2 17-3-69 2 The VX series will be revised shortly. Series VXH Construction/Dimensions Material C3771 Note No.

Drain Separator for Vacuum Series AMJ 1

Description AMJ3000 AMJ4000 AMJ5000 AMJ-EL3000 AMJ-EL4000 AMJ-EL5000 Element assembly w AMJ-CA3000AMJ-CA4000AMJ-CA5000Bowl assembly Note) e 111512 111636 111636 NBR O-ring r 111710 NBR O-ring t Note) Refer to the above for How to Order Bowl Assembly. 13-13-4 5 Drain Separator for Vacuum Series AMJ Dimensions AMJ3000/4000 L F A Bracket (Option) G K M D J C E H H OUT IN ZX ZR 2port size

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

Output specifications ZSE ISE 21 NPN open collector 2 outputs without analog output ZSP 22 NPN open collector 2 outputs with analog output (1 to 5 V) PS Positive pressure ISE3 ISA PSE Vacuum ZSE3 IS ISG Suffix Nil None ZSM D For replacement with ZX series Note 3) Compliant with piping specifications OX and OXY only.

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

Intrinsically Safe Valve 5 Port Solenoid Valve Series 53-SY5000/7000/9000 Body Ported Electrical Entry L and LL Hazardous Location Class I Division 1 Groups A, B, C, D Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Single Unit Warning Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009)

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Series CA2 10-/11- 21-/22- Air cylinder ø40, ø50, ø63

Air cylinder 40, 50, 63 10-/1121-/22Series CA2 How to Order Clean series 10 11 Relief type Vacuum suction type Mounting style Basic style Axial foot style Rod side flange style Head side flange style B L F G Bore size (mm) Port thread type Rc NPT G Nil TN TF 10 C D A 2 B 40 150 Y59B 21 C D A 2 B 40 150 Y59B Nil Built-in magnet Number of auto switches No 2 pcs. 1 pc. "n" pcs.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers 2 pcs. 1 pc.

EX510

Accessory Dimensions 25.7 64 16 54 0.2 5 70 0.2 5 PWR (V) 40 BUS PWR 80 OUTPUT INPUT Cover view 2 x M4 Mounting hole OUTPUT INPUT COM D 60 COM C COM B COM A 1702

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

VDW

Body material/Port size/Orifice diameter Voltage/Electrical entry Size/Valve type Size Valve type Orifice diameter Body material Voltage Electrical entry Port size Symbol Symbol Symbol A B C D E F 1.0 A Grommet 24 VDC M5 1.6 Resin (PPS) With bracket B 100 VAC Single unit N.C. 1.0 Size 1 (VDW1) 1 3.2 One-touch fitting C 110 VAC 1.6 D 200 VAC 1.0 4 One-touch fitting 1.6 E 230 VAC Z Other voltages

Series VS

Series VS R8 S HOW TO ORDER ISO5599/2 VALVE MANIFOLD VV8 2 5 03 TU1 03 D T W1 W1=NEMA 4 ISO Size 1 Size 1 Port Thread Code 2 Size 2 3 Size 3 NIL Rc (PT) T NPTF F G(PF) Location of port 1(P), 5(EA), 3(EB) Number of Stations D D side 2 2 stations U U side B Both side 9 9 stations Size of port 1(P), 5(EA), 3(EB) Symbol Size Applicable ISO size 02 1/4 Size 1 U side option 03 3/8 Size 1

applications only.High rigidity slider, ball screw drive, AC servo motor, 100/200W, Horizontal or vertical mount, Maximum work load: 187 lb (85kg), Low profile, low center of gravity, ACTUATOR, ELECTRIC, ACTUATOR, ELECTRIC ACTUATOR, PC, 63MM LE ELECTRIC ACTUATOR, .00000 lb, StrokeModel (mm)200300400500600700800900100012001500LEJS63??D??D?D?DD

Fluid: air/inert gas, Operating pressure range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less

PFM7

Integrated display 7 Rated flow range (Flow rate range) Option 2 (Refer to page 907.) 0.2 to 10 (5) l/min 0.5 to 25 (12.5) l/min 1 to 50 (25) l/min 2 to 100 (50) l/min 10 25 50 11 Option 1 (Refer to page 907.) ( ): Fluid: CO2 Calibration certificate Flow adjustment valve None With calibration certificate Nil A Nil S None Yes The certificate is written in English and Japanese.

Drain Separator for Vacuum Series AMJ

Discharge Q B ZM Drain guide (-J) ZH ZU Maintenance space 40 R ZL P Rc 1/8 Drain 1/4 female thread without valve function ZY Hexagon width across flats 24 ZQ AMJ5000 L A F ZF Bracket (Option) G K M ZP D J C E ZCU OUT IN AMJ Misc. 2port size Q B Maintenance space 20 Rc 1/8 Drain (mm) A B Note) C D With drain guide R Note) Bracket mounting dimensions Model Port size Q E F G H J K L M 169 (

applications only.High rigidity slider, ball screw drive, AC servo motor, 100/200W, Horizontal or vertical mount, Maximum work load: 187 lb (85kg), Low profile, low center of gravity, ELECTRIC ACTUATOR, ACTUATOR, ELECTRIC ACTUATOR, MC, 40MM LE ELECTRIC ACTUATOR, 36.10069 lb, StrokeModel (mm)200300400500600700800900100012001500LEJS63??D??D?D?DD

applications only.High rigidity slider, ball screw drive, AC servo motor, 100/200W, Horizontal or vertical mount, Maximum work load: 187 lb (85kg), Low profile, low center of gravity, ACTUATOR, ELECTRIC, ACTUATOR, ELECTRIC ACTUATOR, PC, 63MM LE ELECTRIC ACTUATOR, .00000 lb, StrokeModel (mm)200300400500600700800900100012001500LEJS63??D??D?D?DD

applications only.High rigidity slider, ball screw drive, AC servo motor, 100/200W, Horizontal or vertical mount, Maximum work load: 187 lb (85kg), Low profile, low center of gravity, 40MM LE ELECTRIC ACTUATOR, ACTUATOR, ELECTRIC ACTUATOR, MC, 40MM LE ELECTRIC ACTUATOR, 39.6832 lb, StrokeModel (mm)200300400500600700800900100012001500LEJS63??D??D?D?DD

Fluid: air/inert gas, Operating pressure range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less