3 Port Solenoid Valve Series VQ100 Note 6) ( ) values insides denote the air passage for normally open type. 4-12-8 3 Port Solenoid Valve Series VQ100 Construction q e r t u w V100 SY SYJ VK y VZ i VT VP R A P VG o VP S070 VQ VKF VQZ (For N.C. valve) VZ Component Parts VS Description Material Resin Stainless steel Stainless steel, Resin Stainless steel NBR Carbon steel NBR No. q w e r t y u i Solenoid coil Body Fixed iron
Step 3 Item Selection item Symbol e VXB2 1 5 A H B NPT e B Thread type For special options, refer to page 5. Step 4 3 Angle Seat Valve Air Operated Type Series VXB For Steam Can be used with air and water. Flow-rate Characteristics N.C.
Note 6) ( ) values insides denote the air passage for normally open type. 4-12-8 9 3 Port Solenoid Valve Series VQ100 Construction q e r t u w V100 SY SYJ VK y VZ i VT VP R A P VG o VP S070 VQ VKF VQZ (For N.C. valve) VZ Component Parts VS Description Material Resin Stainless steel Stainless steel, Resin Stainless steel NBR Carbon steel NBR No. q w e r t y u i Solenoid coil Body Fixed iron
4 y e q !3 o w u !1 M: Rod end male thread 32 to 63 With auto switch (Built-in magnet) !0 !2 r t !4 y i e q !3 o w u 80, 100 With auto switch (Built-in magnet) !0 q w e r t y u i !2 !4 !3 Component Parts Replacement Parts/Seal Kit No. Description Material Note Cylinder tube Piston Bore size (mm) Kit no.
E B1 A A B2 B2 B1 Conduit terminal: T DIN terminal: D F J D Cable 6 to 12 F M J 34 G1/2 D 25 Width across flats H Width across flats H N 44 K K C C M Port size 3 x P Port size 3 x P E E A A B2 B2 B1 B1 G1/2 With bracket T 4 Q (mm) Grommet Conduit DIN terminal Electrical entry (AC/Class B) Model Orifice diameter Port size P Conduit terminal J K J K J K M J K M N N.C., N.O., COM.
(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.
LH 0.2 C B W W D E d d D E LY MM MM 4-LD Width across flats G Width across flats G LT LT NA NA Y X Y X LX B S + Stroke LS + Stroke ZZ + 2 strokes (mm) Bore size (mm) LD LH LS LT LX LY A a B B C d E F G GA J K M MA MM NA D H 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 9 47 168 8 44 77 23 10 60 60 44 18 45
O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l
9h, 8-0 counter bore deplh 7 Bore size 040, 5O/RSI Ora#-Lll D Widlh across tlats: K With locking mechanism r cancel cap/Rs ':O: tr-t ll lE ' Dimensions of lhe model with a cancel cap are the same as lhose shown in the above drawings. > t l U 9 I , o E l l 'Dimensions for the maximum snoqy aDsofpron LNore 4lThe rou shoG an e\tended rr ston tod (Nore 5r'or \tq acrrno, on" oLLl a rrgsd?
JS20, 32, 40, 63 Center of sphere M M U U D J F B E G P A R H (mm) Max. thread depth P Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) Weight (kg) M A B C D E F G H J Model JS10-4-070 JS16-5-080 8.5 0.5 17 0.01 14.4 M4 x 0.7 9.5 12 4 7 4.7 80 4 1.5 26 12 0.5 23 19 0.02 M5 x 0.8 13.5 16 6 10 5.8 210 5 2 34.5 JS20-8-125 JS32-10-125 15.5 0.5 29.9
temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow, r Power supply: 200 VAC 4 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: CH1 20C/CH2 25C, r Load: Same as the cooling capacity, t Circulating fluid flow rate: Rated flow, y Power supply: 200 VAC, u Piping length: Shortest 5 With the pressure control
3 w t y q i o e u t y q i o e u w !0 !0 !9 Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread r !8 !4 !6 !7 !5 !1 !2 w t y q i o e !0 u @0 Meter-in type Meter-out type Component Parts No.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Indicator 45 22.5 27 1/8 Pilot port 5 17 D E OUT IN E C B 2 x P Port size A A Dimensions [mm] Model Port size P A B C D E VXB215A D 3/8 23 55 99.8 88.3 11.5 VXB215B E 1/2 27 65 106.8 90.8 13.5 VXB215C F 3/4 32 75 111.5 93.2 16 6 VXB Series For Steam Replacement Parts How to order the maintenance kit Maintenance Kit Insulated Adapter (for Individual Parts) VXB021-20-1A (1 set) VXB215 KT *
Material Description Description q w e r t y u i o !0 !
2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.
1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Resin/HNBR Spool valve assembly e r t !0 !1 i q q u y For N.O.
(n1) x 0.402 Ejector/Manifold ZZB-SM5 ZB0030-K1L(O)Vacuum pump system/Manifold ZZB-SM5 ZB31-Q1L(O)E F E F 1 Stations n D side U side 1 Stations n D side U side Vacuum pressure switch Vacuum pressure switch Vacuum pressure switch Vacuum pressure switch PV PD PV PD Port open to atmosphere PV PD PV PD Port open to atmosphere Port open to atmosphere Port open to atmosphere Supply valve Supply
(Port indication: P: supply port; V: vacuum port; E: exhaust port.) Matching the ejector to the vacuum circuit Refer to technical data on page 13-110 to 19 for precautions on the vacuum circuit.
F = degrees Fahrenheit S = SeCOndS NUmin = Normal liters per mlnute World Wide QS\E Support...