LEKF-OMZ0035 Max acceleration/deceleration [mm/s2] Positioning repeatability [mm] 0.01 Lost motion[mm] Note3) 0.05 Lead [mm] 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2] Note4) 50/20 Actuation type Ball screw (LEKFS)Ball screw + Belt (LEKFSR/L) Guide type Linear guide Operating temperature [] 5 to 40 Operating humidity [%RH] 90 or less(No condensation) Motor output [W]/size [mm] 100W/40
screw-in depth L(mm) Model Applicable bolt MHM-16D M6x1 5.2 11.5 MHM-25D M8x1.25 12.5 12.4 MHM-32D M10x1.5 24.5 13.5 MHM-50D M12x1.75 42 16 3) Axial mounting (Body tapped) Tightening torque (Nm) Max. screw-in depth L(mm) Model Applicable bolt MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 4.
. -6No.SFOD-OMO0004-B Model Indication and How to Order Options/Part number Description Part number Remarks Power and output lead wire ZS-28-A Length 2 m Bracket ZS-28-B With M3x5 L (2 pcs.) Connector for sensor lead wire ZS-28-C 1 pc. Panel mount adapter ZS-27-C With M3x5 L (2 pcs.) Panel mount adapter + Front protective cover ZS-27-D With M3x5 L (2 pcs.)
And, w hen t he sensi t i vi t y i s changed t o dul l , t here i s a possi bi l i t y t hat st aggeri ng of gradual pressure occur, because t he pressure correct i on becom e l ow er. N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P9) Press Skey f or 2 seconds or m ore, t hen go t o det ai l set t i ng m ode. To "F02" by usi ng t he and keys.
min or less 12 L/min or less 22 L/min or less Power supply voltage 24 VDC 10%, Ripple(p-p) 10% or less (with power supply polarity protection) Current consumption 25 mA or less Switch output 1 output (NPN or PNP) Max. load current 10 mA Max. applied voltage 26.4 V Residual voltage 1 V or less (at 10 mA) Short circuit protection Provided Repeatability 0.005 mm or less 0.010 mm or less 0.020
Note Auto switch model Switch mounting screw M2.5 x 10 L D-E7A.80A BMY1-025 25 32 40 Switch mounting nut D-M5 D-M5W D-M5T Switch mounting screw M2.5 x 12 L BMY2-025 Switch mounting nut 1116 ML1C Series Specific Product Precautions Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 3 to 12 for Actuator and Auto Switch Precautions.
Nil S n Bearing type Slide bearing Ball bushing bearing M L Mounting style Auto switch Basic style Front mounting flange style Nil Without auto switch (Built-in magnet) B F For the applicable auto switch model, refer to the table below.
area (mm2) 2.1 4.0 Model L B D E F MS-5H-4 MS-5H-6 15.5 16.5 7 8 1.8 2.5 7 8 6.5 8.5 Width across flats B Hose Elbow: MS-5HLH-4/6 Weight (g) 4.2 6.2 Effective area (mm2) 1.4 2.5 B Model L A C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 Universal Elbow: MS-5UL Universal Tee: MS-5UT Width across flats 7 Width across flats
CJP Rear trunnion Integrated clevis Boss-cut basic Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion T E BZ B L F G C D U CJ2 F Low friction direction Boss-cut front flange FZ CM2 Side at pressure When pressurized on head side Boss-cut front trunnion B Side at pressure When pressurized on rod side UZ C85 CG1 L 40 150 CM2Q F Standard MB C95 CDM2Q L F 40 C73
min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area
min (ANR)) 1710 1580 920 460 390 790 100 230 26 24 14 7 6 12 1.5 3.5 Effective area (mm2) Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle
min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) ASF Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 is the same as M5.
L D-A73 (Example) MHY Lead wire length MHW 5 m None Nil L 0.5 m 3 m Z N MRHQ Applicable for the connector type (D-C) only.
min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500 06,
min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Fluid: Air Initial setting
Compact front plate and guide body Made to Order Refer to p.5.4-1 for Made to Order specifications of series MGC. 3.20-1 Compact Guide Cylinder Series MGC 20, 25, 32, 40, 50 How to Order MGC B S C73 32 100 L R Guide cylinder (Compact style) Number of auto switches Bearing M L Slide bearing Ball bushing bearing Auto switch 2 1 n S n Without auto switch (Built-in magnet) *Refer to following
Particles of 0.3m or larger are 3.5 particles/l or less Since it is possible to release exhaust air from pneumatic equipment directly into a clean room, piping to exhaust ducts is unnecessary.
min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Fluid: Air Initial setting
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com P = 46 VT Applicable cable O.D. 6 to 12 VP VG n: Stations L Dimension VP Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 10 489 474 9 443 428 8 397 382 7 351 336 6 305 290 5 259 244 4 213 198 3 167 152 2 121 106 L L1 L2 S070 With mounting adaptor: