Series: Class 2, Valve Type: Single Unit N.C., Coil Voltage: 24VDC, Electrical Entry: Grommet, Orifice: ø2mm, Port Size: 01 [1/8 (6A)], Thread: NPT, Insulator Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -

Series: Class 4, Valve Type: Single Unit N.C., Coil Voltage: 24VDC, Electrical Entry: Grommet, Orifice: ø10mm, Port Size: 03 [3/8 (10A)], Thread: NPT, Insulator Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -

Series: Class 2, Valve Type: Single Unit N.C., Coil Voltage: 24VDC, Electrical Entry: Grommet, Orifice: ø5mm, Port Size: 02 [1/4 (8A)], Thread: NPT, Insulator Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -

Series: Class 2, Valve Type: Single Unit N.C., Coil Voltage: 24VDC, Electrical Entry: Grommet, Orifice: ø5mm, Port Size: 01 [1/8 (6A)], Thread: NPT, Insulator Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -

5 Port Solenoid Valve Series VQZ1000/2000/3000

L Dimension L = 12.5n + 10.5 35.5 1 23 No. 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 L dimension 260.5 285.5 21 273 No. 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 L dimension 510.5 Blanking plug KQ2P-23 KQ2P

5 Port Solenoid Valve

Oki Electric Cable Co., Ltd. 17 17 Station 9 Station 9 SOL.B SOL.B 18 18 SOL.A 19 Station 10 SOL.B COM. 20 19 SOL.A COM. 21 20 Station 11 SOL.B 22 SOL.A 23 Station 12 SOL.B 24 Special Wiring Specifications (Option) COM. 25 COM. 26 COM COM 25 26 COM COM 23 24 21 22 Mixed single and double wiring are available as options.

VQZ1000/2000/3000

For DIN rail model number, refer to page 2-7-23.

Step Motor Controller

Refer to the dimensions on page 52 for the mounting dimensions. (35) (25) L Dimensions No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 L dimension 110.5 135.5 160.5 185.5 210.5 235.5 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 273 298 323 348 373 398 423 448 473 498 L dimension 285.5 310.5 335.5 360.5 385.5

Miniature Fittings M3, R(PT) 1/8, M5 Series M

22 20 23 22 23 22 27 23 22 27 25 24 27 25 24 27 4 2.5 10 10 27.5 20.8 13 15.5 1.5 19.3 3 10 27.2 20.5 13 19.3 10 6 4 12 3 15.2 12 14 12 23 23.3 30.2 23.5 15.7 16 17 15.7 16 17 15.7 17 15.7 18.8 17 15.7 18.8 19 17.7 18.8 19 17.7 18.8 30.2 23.5 4 5 24.3 23 23.3 24.3 23 24.3 23 27.3 24.3 23 27.3 27.5 26.2 27.3 27.5 26.2 27.3 19 30.2 23.5 8 16.2 12 14 16 30.2 23.5 5 6 25 30.2 23.5 27 12 31.8

Guide Table Series MGF ø40, ø63, ø100 1

For details, refer to page 8-30-32. 8-23-13

VQ7-6/7-8

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

Lubricator

Rc C4SL-36W-A G NPT C4SL-36W(Z)-A 2 23 Semi-standard symbol Semi-standard: 2 Semi-standard: 23 (7) Part No. Piping port thread ty pe Piping port thread ty pe (7) Part No. Rc G NPT C4SL-2(Z)-A Rc G NPT C4SL-23(Z)-A C4SL-2-A C4SL-23-A Appearance and part No. -13- 8 38 Semi-standard symbol Semi-standard: 38 Semi-standard: 8 (7) Part No.

SOLENOID VALVE, PROPORTIONAL VALVE, F47, 0.108 lb

0.

Blanking plug KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 L Dimensions (mm) A Applicable fitting size d Model A L D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 D L DIN rail AXT100-DR-l 7.5 As for l, enter the number from the DIN rail dimensions table.

HRX-OM-X037

Table 5.4-23 Monitoring method for contact input signal Delay time Monitoring method 0sec Continuous monitoring 1 to 300sec Monitoring during operation Operation start Operation stops due to the alarm.

CVRA1-E

Table 15 Parts where grease is to be applied Application of grease Grease Body (inner sliding surface) Piston(Seal groove) Slider(Sliding surface) GR-S-010 Piston seal Tube gasket 23 24 25 O-ring 5 11 1 16 12 7 23 24 12 11 4 25 4 24 25 23 -34- (2) Mount the tube gasket 11 to the left cover 3 to mount to the body 1 . (3) Insert the rack 16 and the piston 4 into the body 1 .

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

SI unit ( device)

Refer to page 23 and 24 of this document for details.

HRX-OM-M005

CH1-23 CH2-23 Communication Error WRN Continued Check for disconnection of the communication connector from this product. Lower the setting for resistivity. Electical resistivity of the circulating fluid falls short of your specified value. (optional) CH1-24 CH2-24 DI Low Level WRN Continued Replacement of the DI filter is required.

LUBRICATOR

Port thread Rc G NPT C3SL-36W(Z)-A C3SL-36W-A Barb fitting Applicable tube T0604 Semi-standard Semi-standard 2 Semi-standard 23 Part no. Part no. Port thread Port thread Rc Rc G G NPT C3SL-2(Z)-A NPT C3SL-23(Z)-A C3SL-2-A C3SL-23-A External appearance drawing and part no. B B 14 Semi-standard Semi-standard 8 Semi-standard 38 Part no. Part no.