Silencer Series AN

Construction/Parts/Dimensions AN500 to 900 End plate (Carbon steel) Tension bolt (Carbon steel) (mm) Dimensions Sound absorbing material (Resin sintered body) Model Port size R, NPT AN500-06 AN600-10 AN700-12 AN800-14 AN900-20 A B D A Cover (Carbon steel) 3/4 107 46 36 Body (Aluminum alloy) 1 127 50 41 1 1/4 186 74 50 Hexagonal flats D 1 1/2 217 74 55 2 256 86 65 Port size B 4 Series AN Specific

100

40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply pressure: 0.35 MPa/0.37 MPa (With valve) ZL6H (

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

Air cylinder (Series compatible with secondary batteries)

Bore size(mm) Auto swich model 40 50 63 80 100 D-A9-900 D-M9-900/M9V-900 D-M9W-900/M9WV-900 90-BA7-040 90-BA7-040 90-BA7-063 90-BA7-080 90-BA7-080 Table 5 Operating Range Bore size(mm) Auto swich model 40 50 63 80 100 D-A9-900 7.5 8.5 9.5 9.5 10.5 D-M9-900/M9V-900 D-M9W-900/M9WV-900 4.5 5 5.5 5 6 Values which include hysteresis are for guideline purposes only, they are

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Note) For the special voltages, please consult with SMC.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

FU) Size (mm) (mm) FU 10 20 30 50 HD HC HB HA DF DC DB DA 10 20 30 50 HE 5 6 6 7 Size HC 20H8 28H8 32H8 35H8 63 73 76 87 9.5 13.5 13.5 15.5 35h8 40h8 48h8 54h8 31.5 34.7 34.7 51.7 46h8 61h8 67h8 77h8 24 30 30 34 45h8 60h8 65h8 75h8 15.5 19.5 19.5 21.5 DF (mm) A 50 65 70 80 DF 5 6 6 7 DG HC JB JA J H AY FB FA CB AX DE DD D AW CA AV BE BD BC BB BA AU AA Size 10 20 30 50 15.5 16 18.5 22 4 5

HEAVY DUTY STOPPER CYLINDER

D-M9/D-A9 Auto switch Figure-16 Auto switch D-M9 D-M9W D-M9AVL model D-M9V D-M9WV D-M9AL D-A9 D-A9V Bore size A B A B A B A B 50 23.5 9.0 23.5 11.0 23.5 7.0 19.5 10.5 (13.0) 63 25.5 12.5 25.5 14.5 25.5 10.5 21.5 14.0 (16.5) 80 39.5 19.5 39.5 21.5 39.5 17.5 35.5 21.0 (23.5) The values in brackets are for D-A96.

Electromagnetic Digital Flow Switch

Analog output 4 to 20 mA Load impedance 50 to 600 Accumulated pulse output wiring examples NPN 2 output type LFElAlll NPN + Analog output type LFElClll/LFElDlll Max. 28 V, 80 mA Black OUT1 Load White OUT2 (LFE A only) Load 0 V or Blue DC () 50 ms 50 ms PNP 2 output type LFElBlll Brown DC (+) Black OUT1 Max. 80 mA Load White OUT2 0 V or Load 50 ms 50 ms * When accumulated pulse output is

Digital Flow Switch

Accuracy [%F.S.] 50% 50% 50% 40% 40% 40% With 1 1/4" connected With 1 1/2" connected 30% 30% 30% With 3/4" connected Elbow piping (2") Elbow piping (1 1/2") 20% 20% 20% Elbow piping (1") 10% 10% 10% 3% 3% 3% 8 7 6 5 4 3 2 1 0 0% 0% 0% 8 7 6 5 4 3 2 1 0 8 7 6 5 4 3 2 1 0 Straight section [d] Straight section [d] Straight section [d] Straight When piping with diameter smaller than the straight

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

With (1) Without (1) Coil voltage 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others (1) With With (Without light) 1 (1) 2 Note 1) DIN is applicable to VQZ 200 and 300.

Air-hydro Unit

VNA VNA 2 1 2 1 2 1 VNA VNA D-X Technical Data 1177

10

D-G

XLF Series

D D D Valve seal (maintenance part) 4 Body (material: A6063) C C C C E E E E E E E E (K flange ) F F F Fn n n n (KF flange) F F F Fd d d d Heater (option) Auto switch (option) G G G G H H H H B B B B A A A A A A A A Unit: mm Model A B C D E Fn Fd G H XLF-16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196 100 3

Rotary Table/Vane Style Series MSU

9, D-T99 D-9A, D-S99, S9P 90 High precision type MSUA 3 Single vane 7 D-R73, D-T79 D-R80, D-S79, S7P 180 D20 1 D-9, D-T99 D-9A, D-S99, S9P Single vane 90 3 Basic type MSUB 7 Double vane D-R73, D-T79 D-R80, D-S79, S7P 180 20 Double vane is available with 90 rotation setting only. 149 Rotary Table: High Precision Type Vane Style Series MSUA Size: 1, 3, 7, 20 How to Order Connection port location

SQ1000/2000

Printed in Japan. 1st printing October, 2000 D-SMC.L.A. P-80 (D)

Soft Start-up Valve AV2000/3000/4000/5000 1

) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up valve Note) The

A

(50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 Option D: Type D DIN terminal Nil G None With pressure gauge How to Order Pilot Valve Assemblies Y: Type Y DIN terminal SF4 1 G 80 Rated coil voltage 100VAC (50/60Hz) 200VAC (50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 For soft start-up valve Note) The grommet type can

Parallel Style Air Gripper: Wide Type Series MHL2

Air gripper model D-M9(V) D-M9W(V) D-M9A(V)L D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV , Note) Use a watchmaker s screwdriver with a grip diameter of 5 to 6 mm to tighten the set screws (M2.5). The tightening torque should be 0.05 to 0.1 Nm. As a rule, it should be turned about 90 beyond the point at which tightening can be felt.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) Electrical entry direction: Inward Electrical entry direction: Outward D B A C B D-Z7Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BA Bore size (mm) A C 16.5 (15) 23.5 (22) 34 (32.5) 46 (44.5) 46 (44.5) 56 (54.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 18 25 35.5 48 48 58 D 2 5 2 4.5 6.5 6.5 C 10.5 17.5 28 40 40 50 D

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20