SMC Corporation of America
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Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

Note 7) The sensor unit is conformed to CE mark. 1.0 Operating pressure [MPa] PF2504/520 0.5 PF2540 20 40 60 80 100 0 90 Fluid temperature [C] 16-11-38 3 Series PF2D Digital Flow Switch For Deionized Water and Chemicals How to Order Remote type Display unit PF2D3 A 0 M 0 Unit specifications Nil M With unit switching function Fixed SI unit Note 1) Note 1) Fixed unit: Real-time flow rate: l

ZS-27-C) Rotate 90 to mount. 16-3-30 9 Series PSE Specific Product Precautions 3 Be sure to read before handling. Regulating Pressure Range and Rated Pressure Range Caution Set the pressure within the rated pressure range. The regulating pressure range is the range of pressure that can be set on the controller.

ZS-27-C) Rotate 90 to mount. 16-3-44 13 Series PSE Specific Product Precautions 3 Be sure to read before handling. Set Differential Pressure Range & Rated Differential Pressure Range Caution Set the pressure within the rated differential pressure range. The set differential pressure range is the range of differential pressure that can be set on the controller.

Since auto shift signal is inputted at applying 50 kPa, switching is done at pressures of 90 [kPa] and 70 [kPa]. How to Select the Channel When the CH.SELECT terminal is open state, CH.A is selected, while when connecting with GND, CH.B is selected. It takes 10 [ms] to switch the channel.

Metric size 4, 6 6, 8, 10 10, 12 Inch size 1/8, 1/16, 1/4 1/4, 3/8 3/8, 1/2 Orifice diameter 4.4 8 10 Flow characteristics Av x 10-6m2 12 33.6 52.8 VC Cv 0.5 1.4 2.2 Withstand pressure (MPa) 1 VDW Operating pressure (MPa) 0 to 0.5 Fluid temperature (C) 5 to 90 VQ Ambient temperature (C) 0 to 60 VX2 Weight (kg) 0.055 0.115 0.185 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

P Port size B C A D E F H K L M N Grommet:G Conduit:C Conduit terminal:T Model Q R Q R Q R S U 13.5 28 64 1/8 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 VCB21 18 36 67.5 1/4 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 22 40 81.5 1/4, 3/8 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90

13.5 28 31 56.5 12.5 28 14 12.8 M4 4.5 64 1/8 VCL21 22 23 46 44 44 58 41.5 46.5 99 44 66 86 18 36 31 58.5 12.5 28 18 12.8 M4 6 67.5 1/4 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 99 22 40 36.5 11 15 32 20 19 M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90

Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 1/2 22 45 90

D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket VX3 VXA Main port VN Main port Rc A LVC B C D E F H J K L M N P Q R S T Model VNC2-10A VNC2-15A VNC3-20A VNC4-25A 3 8 1 2 3 4 1 63 63 80 90 42 42 50 60 28 28 35 40 14 14 17.5 20 72.5 72.5 84 100 80.5 80.5 92 108 87 87 92 93 180.5 180.5 192 208

www.stevenengineering.com Bracket (Option) 2-M4 x 0.7 depth 7 Main port Rc Model VND10D-6A VND10D-8A VND10D-10A 1 8 1 4 3 8 Port size 10A, 15A, 20A, 25A G (Valve open) Pilot port Indicator (Option) (Back side P2) Bracket (Option) Main port Main port Rc A B C D E F G M N P Q R S T U Model 3 8 1 2 3 4 1 VND20D-10A VND20D-15A VND30D-20A VND40D-25A 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 80 90

as back side 8 locations Main port Bracket U: Long hole for mounting 4 positions Flow indicator for 2 port valve Dimensions (mm) Model Main port 2 Port 2-Rc 2-Rc Pilot port A B C D E F G H I 3 Port 3-Rc 3-Rc 3 8 3 8 Rc 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90

1 Stainless steel 17-3-90 5 Series VVX31/32/33 Direct Operated 3 Port Solenoid Valve/Manifold For Air, Gas, Vacuum and Oil The models VX31/32/33 have been revised. For details, please refer to catalog no. ES70-26A. Similar updating for other VX series are scheduled to follow shortly.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J M 14.5 17 L 29 32 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104

Conduit terminal: T P Port size Rc VXP2140 Normally open Normally closed Model Grommet Electrical entry Conduit Conduit terminal Bracket H F E D C B f M L K J A e 57 62 67 b 39 45.5 49.5 Q 39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (76) 79 (89) d 47 52 57 a 34 51 58 N 69 (76) 77 (84) 87 (97) N 61 69 79 c 65 78 86 Q R 57 74 81 VXP2142 , 30 30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

adjusted without programming Models Standard supply pressure Nozzle diameter (mm) Diffuser construction Air consumption l/min (ANR) Max. suction flow rate l/min (ANR) Model S M H ZMA05H 0.5 12 18 ZMA07H 0.7 24 23 0.5MPa ZMA10H 1.0 46 36 2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32 ZMA13M 1.3 70 36 ZMA13S 1.3 75 38 1 stage diffuser 0.45MPa ZMA15S 1.5 90

1.7 7.3 0.23 [0.41] Exhaust center 1.7 3 position 530 (233) 0.34 2.8 [0.95] 7.2 13 [4.0] 0.40 Pressure center 2.8 [0.84] 0.26 [0.41] 1.9 12 [3.3] 6.7 Single 484 2 position 0.29 2.2 0.48 2.5 8.0 10 Double 488 0.32 1.8 0.32 1.8 7.6 7.3 Rc 1/2 Closed center 509 0.32 [0.54] 2.0 0.42 3.6 [1.5] 7.3 13 [4.7] 3 position Exhaust center 0.33 3.3 [0.94] 0.33 [0.51] 1.9 12 [3.3] 7.4 Pressure center 90