Air-hydro Unit

Flow control valve Throttle valve Throttle valve Stop valve CCVS10/11/12/13 CCVS20/21/22/23 CCVS02 Piping bore Piping bore Piping bore Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load No load Load ratio Load ratio Load ratio Load ratio Bore size (mm) Bore size (mm) Bore size (mm) CCVS30/31

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When re assembling, tighten the cover through an extra 2--3+ from the 155,9 OUT 31 ,2 187,0 93,5 :,24.7 original assembled position. 20 63 140,2 IN 28,0 84,1 112.1 168.2 .

Power Clamp Cylinder

size (mm) 50 63 80 XC PA PB PC PD R RA RB RR S V VA VB VC VD VE VF W XA XB 50 45 10 55 45 68 45 48 11 8 30 32 63.5 71.5 12 3.5 78.4 141.8 137.3 92.8 50 45 10 55 52 78 50 54 11 8 30 32 63.5 71.5 12 3.5 78 154.4 150.4 105.3 70 75 15 65 70 108 68 76 15 8 50 50 90 96.5 12 3.5 113.7 197.3 192.8 148.3 199 Series CKZT Dimensions (Clamp Arm: Offset 15) 40 How to Order Right type CKZT40 A015 C S 31

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

closed J 4 4 x M4 x 0.7 thread depth 8 (Mounting thread) K cross view (Closed) +0.025 3H9 0 depth 3 +0.043 18H9 0 depth 1.5 44 M5 x 0.8 (Finger opening port) Auto switch mounting groove (4 locations) Width across flats 8 (4 locations) 18.2 M5 x 0.8 (Finger closing port) 4 x M5 x 0.8 (Piston rod thread and rack thread) 5.5 2 x M5 x 0.8 Vacuum port H 7 8.4 16.8 0.5 7 9 7 12.5 8 6 6 O S 15 31

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Coolant Valve

, 20A, 25A K L Pg9 N P Applicable cable O.D. 6 to 8 F (Air operated) J (External pilot solenoid) Pilot port 12(P1) 2 x (Back side 10(P2)) 4 x M 8 1 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) P1 D S Q E Bracket 15 H A R B C Main port 1(A) [Back side 2(B)] Port size: refer to table below A 63 63 80 90 B 42 42 50 60 K L 52 52 62 72 C 29 29 35 40 M 26 26 31

Steam Valve

(Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22 85 101 93 109 5 6 62 72 31

VZA2000

VVZ2000-31A-31 pc. Base mounted 2 position double 2 position single Sub-plate Assembly Part No.: VZA2000-S-01 Mounting bolt and gasket are not included. Thread type Nil N T F Rc NPT NPTF G 3 position exhaust center 3 position closed center Caution Be sure to read this before handling.

Manifold Specifications

Symbol Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol 1 K plug connector 3-7-31 Series VZS3000 How to Order Manifold Assembly Manifold Specifications Port size Rc 4(A) 2(B) Stations Porting specifications 4(A), 2(B) Port Please indicate manifold base type, corresponding valve, and option parts.

Slit Valve

Bellows protection structure Wiper Detail drawing OPEN 528 Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Height

Safety Instructions

Improved by approx. 20% * SMC comparison (Fluoropolymer tubing, Series TL/TIL) Insert fitting Miniature fittings M, MS series (Hose nipple type) Fluoropolymer fitting LQ1 series MS Applicable fittings Note 2) Applications: Food, semiconductor, medical, automobile and machine tools fields LQ 20C 100C 200C 260C Recommended radius Refraction value 1.6 0.9 0.45 0.23 15 8 0.9 0.5 0.25 0.15 45 31

NCQ8

K 2 sides x 4 places 0.25-counter bore 0.15 depth M1 E A + Stroke 0.13 (Inch) C H E D A Symbol Bore Q P K J I M1 M2 W Z 1/8" to 1"st 1 1/4" to 2"st 1/8" to 1/4"st 3/8" to 2"st 075 (3/4") 106 (1-1/16") #10-32UNF 0.46 0.81 1.38 0.31 1.25 1.56 0.06 0.25 0.86 1.22 #10-32UNF 0.19 1.31 0.38 5/16-24UNF 0.70 1.19 0.52 0.88 1.50 0.50 1.56 2.03 0.16 0.44 1.69 NPT1/8 0.25 1.72 0.56 31 Series NCQ8 Dimensions

Special Specifications:

Specifications Specifications AFF2B to 75B Applicable model AFF2B to 37B Applicable model Refer to How to Order for standard specifications on pages 14-20-10, 16, 23, 31, 37 and 43. Refer to How to Order for standard specifications on pages 14-20-3, 10 and 16.

Guide Table Series MGF ø40, ø63, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order Specifications (For details, refer to page 8-31-1.)

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

E BD 75st, 100st Larger than 100st 37 57 63.5 64 75st, 100st Larger than 100st 50st 25st 50st 25st 50st 75st, 100st 25.50st Larger than 50st 25.50st Larger than 50st 25st Larger than 100st 114 134 160 180 25.50st Larger than 50st 147 168 188 93 63 80 100 63 80 100 41 45.5 46 118 142 162 106.5 115 137 172 198 233 20 25 30 16 160.5 171 208 29.5 18.5 21 25 30 36 109.5 121 130 147 13 5 33.5 31

08-mbb-e

.: GR-S-010 (10 g), GR-S-020 (20 g) 31

SI Unit: AS-i, 8 In/8 Out, 31 Slave, 1 Power Supply, Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mounting, US Option: -

SI Unit: AS-i, 8 In/8 Out, 31 Slave, 2 Power Supply, Input Block Stations: None, Input Block COM: +COM, Stations: 8 Stations, SUP/EXH Block Mounting: D Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: -, US Option: -

SI Unit: AS-i, 8 In/8 Out, 31 Slave, 2 Power Supply, Input Block Stations: None, Input Block COM: +COM, Stations: 8 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mounting, US Option: -

SI Unit: AS-i, 8 In/8 Out, 31 Slave, 2 Power Supply, Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: ø6 One-touch Fitting, Mounting Method: -, US Option: -