SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3 Series SRP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3 Series SRP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

4/5 Port Air Operated Valve Series SYJA3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Base mounted (4 port) VR (Manifold use only) SYJA3 30 2 VH VHS Base mounted (5 port) SYJA3 40 2 Port size Type of actuation Nil Without sub-plate 4 3 2 position double 2 position single 2 1 M5 port with sub-plate M5 3 position closed center JIS Symbol

Mechanically Jointed Rodless Cylinder Series MY1

Load mass Allowable moment MY1H/m MY1H/M MY1H/M MY1H/M 2 1 3 40 50 50 40 50 40 50 4 40 5 30 30 30 30 20 20 20 20 MY1H40 MY1H32 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H40 MY1H40 MY1H32 MY1H40 MY1H32 MY1H32 MY1H32 MY1H32 5 4 MY1H25 MY1H25 10 MY1H40 MY1H40 Load mass kg Moment Nm Moment Nm Moment Nm 5 4 5 4 MY1H32 MY1H32 MY1H25 MY1H25 MY1H25 3 MY1H25 MY1H25 MY1H20 MY1H20 3 3 2 MY1H25 MY1H25

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Series PF2D Flow Characteristics (Pressure Characteristics) PF2D504 PF2D520 PF2D540 0.040 0.035 0.030 0.035 0.030 Pressure loss [MPa] Pressure loss [MPa] Pressure loss [MPa] 0.025 0.030 0.025 0.020 0.025 0.020 0.020 0.015 0.015 0.015 0.010 0.010 0.010 0.005 0.005 0.005 0 0.5 1.0 1.5 2.0 2.5 3.0 4.0 3.5 0 2 4 6 8 10 12 16 14 18 20 0 5 10 15 20 25 30 40 35 Flow rate (l/min) Flow rate (l/min

CG1x-OM0006N

M4x0.7x22L 20 NBA-088S 25 NBA-106S (mm) 32 BGS1-032S 40 BAF-04S 50 BAF-05S 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416

Series 10-MGF Guide table ø40, ø63, ø100

Auto switches / Proper mounting position for stroke end detection A B Proper mounting position (mm) Bore size A B 40 63 100 32.5 0 16 0 27.5 0 Note) The above mentioned values are indicated as a guide for auto switch mounting position for stroke end detection.

MHT2

Bore size 32 mm 32 40 mm 40 50 mm 50 63 mm 63 Action Double acting D Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

MHT2

40 50 63 Refer to page 12-13-1 for further information on other auto switches.

ITV0000

(For details, refer to "Specific Product Precautions 1" on Page 11.) 26.5 Bushing assembly 2.7 Note) For dimensions of the cable connector, refer to single unit on page 6. 7 Compact Electro-pneumatic Regulator Series ITV0 Dimensions Manifolds 20 40 20 40 4-M3 x 0.5 thread depth 3 Mounting hole 11 11 L2 Port position L1 25 No. 9.5 9.5 z x c 1 3 5 ITV00 EXH SUP OUT ITV009 PWR PWR PWR PWR ATM

FQ1

Model symbol (In-line filters) Element size 250mm 5 10 20 40 74 105 EM100-005 EM100-010 EM100-020 EM100-040 EM100-074 EM100-105 M005 M010 M020 M040 M074 M105 Bore size 65 x 250mm 04 06 10 Rc 1/2 Rc 3/4 Rc 1 5 10 20 40 74 105 EM200-005 x 4 EM200-010 x 4 EM200-020 x 4 EM200-040 x 4 EM200-074 x 4 EM200-105 x 4 M005 M010 M020 M040 M074 M105 Housing O-ring material N V NBR FPM 65 x 125mm Element

IDX-OM-M051

16 20.1 25 Standard conditions (ANR) Note 1) Air flow capacity m3/min 60Hz 18.8 23.7 30 50Hz 16.7 20.9 26 Air compressor suction condition Note 2) 60Hz 19.6 24.7 31.2 Inlet air pressure MPa 0.7 Rated Note 3) Inlet air temperature oC 40 Ambient temperature oC 32 Outlet dew point oC 10 Amount of facility water (50/60Hz) Note 5) m 3/h 1.29 / 1.56 1.74 / 1.98 2.16 / 2.53 Facility water inlet

Booster Regulator/Air Tank

Gauge ports changed from 1/16" to 1/8" (VBA1A, 2A) Elbow silencer Except VBA2A, 4A Gauge port VBA10A Air-operated type Max. operating pressure 1.6 MPa Fourfold pressure increase type VBA22A VBA11A VBA43A VBA42A 1008 P.1010 Twice 2 to 4 times Pressure increase ratio Knob-operated type (Direct operation) Air-operated type (Remote operation) Knob-operated type (Direct operation) Operation Set

Vacuum Pad

Dimensions: With Male Thread Adapter ZP3P-T20PTSF-A5 [Weight: 3.9 g] ZP3P-T20PTSF-AG1 [Weight: 5.9 g] 13 12 M5 x 0.8 G1/8 16 Width across flats 14 17 21.5 26.5 5 17 18.5 22 3.5 1.6 20 3 Width across flats 2.5 20 2.5 1.6 ZP3P-T25PTSF-A5 [Weight: 4.3 g] ZP3P-T25PTSF-AG1 [Weight: 6.3 g] 12 14 G1/8 16 Width across flats 14 17.5 22 27 5 17.5 19 22.5 3.5 M5 x 0.8 Width across flats 2.5 25 2.5 25

AIR CYLINDER

Mounting, Operation P.10 1) Operating air P.10 2) Precaution on design P.11 3) Mounting P.13 4) Operating environment P.13 5) Piping P.14 6) Cushion P.15 7) Speed control P.16 8) Direction control P.16 4. Maintenance P.17 1) Inspection P.17 2) Overhaul P.18 3) Disassembly P.18 4) Assembly P.19 5) Expendable supplies P.20 6) Replacement procedure of seal P.21 7) Inspection P.22 5.

VEX1

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

-- NCM seies

s o.50 o.8e4 o93 0.75 0.18 %-18 0.50 0.95 2.94 106 (1 0.312 %-24 0.50 o.624 0.25 1.12 o.12 0.88 0.88 0.24 %-8 0.62 1.17 3.25 0.la7 Wzo 0.75 0.7i19 o 1.t2 0.25 1.06 'L06 o.25 %-16 ora 1.62 400 150 t1%l o.87 1h-20 o_75 o.749 0.38 1.56 0.25 1.25 1.25 o.25 3l-16 0.88 '1.50 3.69 Double End : NC.

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 4.5 16 57 61.5 15.5 10 17 30 5 40 1/8 AS2000E-02 4.5 20 59 63.5 17 12 23 30 5 40 1/4 AS3000E-02, 03 5.5 26 69 76 20.6 13.25 25 45.5 5.25 56 1/4, 3/8 AS4000E 2-1/4 to 1/2 72 (Max. 80) Effective thread depth 6 15-9-42

Ozone Resistant

The residual ozone ratio in the lines of lube type reciprocating compressor 100 90 80 70 Residual ozone (%) 60 50 Air with atmospheric dew point: 17C Air with atmospheric dew point: 10C 40 30 20 Ozone depletion is much slower in a non-lube scroll type compressor than in a lube type reciprocating compressor.

For Water, Oil, Steam, Air

G3/4 to G1 16, 17.5 For Oil (50 mm2/S or less) Direct Operated 2 Port Solenoid Valve For Air Pilot Operated 2/3 Port Solenoid Valve for High Pressure Valve type Port size Body Seal Valve type Port size Body Seal Material Orifice size mm Material Orifice size mm Series VCS20/30/40 Series VCA20/30/40 Series VDW10/20/30 Brass Stainless steel PTFE FKM N.C. 1/8 to 3/4 2 to 10 Brass Stainless steel