Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Install the ejector body gasket for manifold t into the gasket groove of each vacuum pump system assembly r. 2. Install the ejector body gasket for manifold t into the gasket groove of the end block R w. 3. Align the ejector assemblies r, end block (L) w, and end block (R) e using positioning pins (at the two a positions) and fasten with clamp rods q (2 pcs.)

VG300-OMI0003

(R) (R) Series Series Series Series DC 1 21 ISO VG32 MSDS 32 ISO VG32 1 Rc Rc Rc Rc Nm Rc1/8 79 Rc1/2 2830 Rc3/8 2830 Rc1 3638 -5No.VG300**-OMI0003-A VG3 VG3 VG3 VG342 42 42 42(R) (R) (R) (R) Series Series Series Series 5 30 1 VG32 2 VG32 -6No.VG300**-OMI0003-A VG342 VG342 VG342 VG342(R) (R) (R) (R) Series Series Series Series/ / / / M4X0.7 1.4Nm P A R NC 1 2 2 DIN ( ) No. 1 2

Compact Manifold Regulator

Note 3) This option is available with the digital pressure switch. 732 Compact Manifold Regulator ARM11A/B Series Regulator Block ARM11B 1 A R 06 Z A q w e r u t y N Individual Supply Type ARJ 1.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

3 AS-F TMH ASD AS AS-FE KE r i o e y !6 !5 r o e y !6 !5 q AS-FG AS-FP AS-FM AS-FM AS-D AS-T ASP !9 !1 q !2 t !0 !1 u !2 t !0 i ASN AQ Component Parts Component Parts Material Description Note Description No. Note Material No.

HRX-OM-T004

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-R028

Broken wire o r coming off 60 sec. 60 sec. AL19 Communication error is generated.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

t q w e r t i i o o !

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

FSQ seies

Mounting ends tal ioh hole Both J r,rr.rt o, n ,r o*nnt tnoit -.r, ,.rt*lt r Type ol auto switch (Rail mounled) @ Bore size . Reed switch isee P.11 lor detaits.) Cylinder stroke (mm) 1 0 , 1 5 , 2 0 1 0 , 1 5 , 2 0 Solid state switch (see P.ll tordetails.)

Manifold Specifications

location, P/R port with One-touch fitting for 6 VZ1000-3A-1D r VZ1000-3A-1U t SUP/EXH block assembly VZ1000-2A-1M y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Air Cylinder RSQ Series Stopper Cylinder

Mounting ends tal ioh hole Both J r,rr.rt o, n ,r o*nnt tnoit -.r, ,.rt*lt r Type ol auto switch (Rail mounled) @ Bore size . Reed switch isee P.11 lor detaits.) Cylinder stroke (mm) 1 0 , 1 5 , 2 0 1 0 , 1 5 , 2 0 Solid state switch (see P.ll tordetails.)

HRX-OM-M091

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-Q033

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-S010

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

energy saving effect

Applicable model Minimum operating flow rate [L/min] To circulating fluid outlet r t HRSH100-20 w HRSH150-HRSH200-HRSH250-W25 r q HRS-BP005 y HRSH250-AHRSH300-A40 To circulating fluid return port r t u r e Parts List No.

AR20-B to AR60-B

IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Non-contact Gripper

Description Material Note 1 Body (R, L) Aluminum alloy (Black hard anodized) XT661-2A, 3A w 2 Body M Aluminum alloy (Black hard anodized) 741 XT661 Series Construction [Bernoulli Type] Size: 40 Size: 60 Size: 80, 100 A-A A-A A A q w w i u y t e e A B i A B r A A q A-A B-B t y u q u y t e w r r Size: 120, 150 B-B A-A A B B q r e w t y u i r C-C C C r A Guide assembly Component Parts A-A o

SI unit ( device)

ID N EX430-SIL1 0x0014 (20) 0 R Product Text N SI unit 0x0015 (21) 0 R Serial Number N "x" 4 0x0016 (22) 0 R Hardware Revision N HW-Vx.y 5 0x0017 (23) 0 R Software Revision N FW-Vx.y 5 0x0018 (24) 0 R/W Application Specific Tag Y "* *" 6 Refer to page 17 "Device Status parameter" for details 0x0024 (36) 0 R Device Status N Refer to page 17 "Detailed Device Status parameter" for details 0x0025

Compact Rotary Actuator

e t p o s i t i o n I n t e r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i s a s s e m b l e D i s a s s e m b l i n g p r o c e d u r e A s s e m b l e p r o c e d u r e T r o u bl e s hoo t i n g Safety

MGP

1/8 R 1/4 R 3/8 77 Series MGP Specific Product Precautions Operating Pressure Use the recommended pneumatic circuits.