Compressed Air Preparation Filter Description Material 1 Body Aluminum die-cast 2 Flange Aluminum die-cast 3 Bowl Stainless steel e r Replacement Parts No.
-X224 WR110-02-X215 Inlet pressure: 0.6 MPa Inlet pressure: 0.8 MPa 0.4 0.3 0.4 0.5 0.6 0.7 0.8 Outlet pressure [MPa] Outlet pressure [MPa] 0.3 0.2 0.1 0.2 0.1 Flow rate [L/min] 0 0 Flow rate [L/min] 0 0 1 2 3 4 5 6 1 2 3 4 5 6 Dimensions Construction 40.5 e w u 40.5 y IN OUT r M30 x 1.5 Panel cut dimension 30.5 q t Component Parts No.
0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Material: Body: Stainless Steel 304; Gasket/O-ring: FKM, Element Length: B [ℓ500 (ℓ250 x 2)], Port Size R: 2, Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 100 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: -
Material: Body: Stainless Steel 304; Gasket/O-ring: NBR, Element Length: ℓ250, Port Size R: 1, Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 100 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: -
Material: Body: Stainless Steel 304; Gasket/O-ring: FKM, Element Length: B [ℓ500 (ℓ250 x 2)], Port Size R: 1, Element Type: Sintered Metal, Stainless Steel Material, Nominal Filtration Accuracy: 100 μm, Element Seal Material: FKM, Pressure Gauge: G2 [G46-10-02X3 (Stainless Steel at Wetted Parts)]
Material: Body: Stainless Steel 304; Gasket/O-ring: NBR, Element Length: ℓ250, Port Size R: 2, Element Type: Sintered Metal, Bronze Material, Nominal Filtration Accuracy: 100 μm, Element Seal Material: NBR, Pressure Gauge: G2 [G46-10-02X3 (Stainless Steel at Wetted Parts)]
Size: 6 [0.82m³/min (ANR), 28.96scfm], Voltage: 10 [100VAC (50Hz),100/110VAC (60Hz), Single Phase], Option 1: A+K, Option 2: R+T
Size: 11 [1.82m³/min (ANR), 64.27scfm], Voltage: 10 [100VAC (50Hz),100/110VAC (60Hz), Single Phase], Option 1: None, Option 2: R+T
Size: 11 [1.82m³/min (ANR), 64.27scfm], Voltage: 10 [100VAC (50Hz),100/110VAC (60Hz), Single Phase], Option 1: A+L, Option 2: R+T
Size: 11 [1.82m³/min (ANR), 64.27scfm], Voltage: 10 [100VAC (50Hz),100/110VAC (60Hz), Single Phase], Option 1: Metal Auto Drain Bowl w/Level Gauge; Medium Air Pressure, Option 2: R+T
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC110V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 100 or Less, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/8, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC110V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 100 or Less, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/8, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 100 or Less, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/8, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 100 or Less, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/8, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 100 or Less, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/8, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 100 or Less, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/8, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: -, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 100 or Less, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/8, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool, Pilot
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: -, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 100 or Less, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/8, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool, Pilot
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC100V, Specification: Standard / Lubrication Free / Low Current, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 100 or Less, Pipe Port Type: [Rc (R)] Rc, Port Size: 1/4, Pressure