Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 (7) Connector assembly ZK2 LV W K A Valve type: J Valve type: K, R Applicable valve type Lead wire length Nil 300 mm Valve type K, R 6 600 mm W (With supply valve and release valve) 10 1000 mm 20 2000 mm S Valve type J (Supply valve only) 30 3000 mm (8) One-touch fitting assembly (Purchasing order is available in units of 10 pieces.)

Mechanically jointed rodless cylinder With cam follower guide, With single-axis linear guide With double-axis linear guide

It is possible to mount an auto switch in the intermediate position, but the cylinder speed for the switch detection needs to be adjusted to 300 mm/sec. or less in accordance with the response time of the load relay, etc. 5. When mounting an auto switch on the driving cylinder side (on top of the cylinder), avoid interference of the auto switch with the workpiece.

Mechanically jointed rodless cylinder Basic short type (Rubber bumper), Basic standard type (Air cushion) Slide bearing guide type (Air cushion)

It is possible to mount an auto switch in the intermediate position, but the cylinder speed for the switch detection needs to be adjusted to 300 mm/sec. or less in accordance with the response time of the load relay, etc. 5. When operating multiple cylinders with the auto switch in parallel, separate the cylinders, maintaining a minimum separation distance of at least 40 mm. 3.

HEC-OM-R008

The PE line of the power supply cable Indicated content : (1%) 300 Ratio #1 Temperature detected by internal ERR11 WRN temp. sensor PV < 31.6 C #1 SV < 30.0 C MODE Normal Sets the temp. range for judgment of overload (accompanying abnormal output alarm ERR15). #2 Temperature detected by external 0.1 to 9.9 7 Overload Judging is available for grounding.

Digital Gap Checker

. -14No.PS-OMR0002-K 2 About this product Specification Specifications (ISA3) Model ISA3-F ISA3-G ISA3-H Applicable fluid Dry air (Filtered through a 5 m filter) Rated distance range 0.01 to 0.03 mm 0.02 to 0.15 mm 0.05 to 0.30 mm Displayable/Settable range (Distance reference) 1 0 to 60 2 10 to 300 2 30 to 500 2 Minimum display resolution (Distance reference) 1 1 Rated pressure range 100

Fieldbus system PROFINET compatible SI Unit

Description EX245-SPN1A EX245-SPN2A EX245-SPN3A General Dimensions (W x L x H) in mm 85 x 127.5 x 89.5 85 x 147.7 x 89.5 Weight 465 g 540 g Housing materials PBT Maximum number of modules 8 Maximum number of digital inputs 128 Maximum number of digital outputs 64 (independent of solenoid valves) Maximum number of IO-Link ports 32 Electrical Internal current consumption at 24 V DC (Via US1) 300

Series MLGP

. + = 4 . 1 = a V V 2 V m M E k 2 Ek: Kinetic energy (J) M : Mass of object being transported (kg) m : Mass of moving parts of cylinder (kg) V: Maximum speed (m/s) Va: Average speed (m/s) Mass of moving parts of cylinder (kg) Bore size Standard stroke (mm) (mm) model 20 25 30 40 50 75 100 125 150 175 200 250 300 350 MLGPM20 0.40 0.42 0.45 0.47 0.59 0.65 0.71 0.77 0.83 0.89 1.08 1.20 1.31

1.63

Max. speed Coefficient Up to 300 mm/s 1.7 Up to 400 mm/s 1 Up to 500 mm/s 0.6 502 Model Selection MGPW Series L L m m Slide bearing Vertical Mounting Operating pressure 0.5 MPa MGPWM20 to 63 (1) 50 stroke or less, V = 200 mm/s or less (2) Over 50 stroke, V = 200 mm/s or less 100 100 63 63 50 50 40 40 32 32 10 10 25 25 Load mass m (kg) Load mass m (kg) 20 20 1 1 MGJ JMGP MGP 0.1 0.1 10 100

10

x M6 x 1 (Piston rod and rack screw) H 65 M5 x 0.8 (Finger closing port) 28.2 11 1 20 10 10 28 6 Width across flats 10 (4 locations) 24 46 K (70) 30 24 24 Closed E 12.5 12.5 30 Open F 17 17 54 G 4 x M6 x 1 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-20DZ 54 58 71 38 82 122 160 32 120 MHL2-20D1Z 96 100 113 80 142 222 260 68 195 MHL2-20D2Z 116 120 133 100 162 262 300

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Symbol Model Double acting: External grip Opening angle (Both sides) Weight (2) (g) Opening Closing Effective gripping force (Nm) Model Bore size (mm) MHW2-20D 300 5 0.30 20 MHW2-20D1 320 MHW2-25D 510 6 0.73 25 MHW2-25D1 540 MHW2-32D 910 5 180 1.61 32 MHW2-32D1 950 Made to Order (Refer to pages 725 to 748 for the details.)

3

-X 389 MK Series Specifications 12 16 20 25 32 40 50 63 Bore size (mm) Double acting 90 10 Clockwise, Counterclockwise Action Rotary angle Note 1) Rotary direction Note 2) Rotary stroke (mm) Clamp stroke (mm) Theoretical clamp force (N) Note 3) 7.5 9.5 15 19 10, 20, 30 10, 20, 30, 50 40 75 100 185 300 525 825 1400 Fluid Proof pressure Air 1.5 MPa Note 4) 0.1 to 0.6 MPa Operating pressure

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

JIS Symbol How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body JIS Symbol Body size Panel mount type Symbol M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

Dual Speed Controller with One-touch Fitting Series ASD 1

Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5 3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300

Speed Controller with One-touch Fittings Series AS In-line Type 1

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 With One-touch fitting Needle Valve/Flow Characteristics ASP330F ASP430F 400 200 3 6 Flow rate (l/min (ANR)) Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 300

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Flow rate (/min (ANR)) Flow rate (/min (ANR)) Model Port size Weight (g) AS420-02 2,500 1/4 38 3,600 55 0.34 AS420-03 5,000 3/8 77 4,800 74 0.33 63, 80, 100, 125 AS420-04 6,600 1/2 100 6,700 102 0.32 AS500-06 10,100 3/4 154 8,100 123 140, 160, 180, 200 0.36 AS600-10 15,100 1 230 16,900 258 160, 180, 200, 250 0.7 AS800-12 1 4 35,400 1 540 38,500 586 1.4 AS900-14 1 2 52,000 1 792 47,500 724 300

ASD

10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow (l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300

HAA

(mm) Voltage(V) 10% 15 2200 300 Single100 55/65 37 5700 350 X 2 3-phase200 132/170 X 2 1.44/1.4 11/2B union 55 22 3300 400 3-phase200 90/130 0.4/0.45 B union 36 Single200 38/46 3-phase200 50/60 Cooling fan (50/60Hz) Power consumption (W) Current (A) 0.46/0.52 0.23/0.26 Rp(PS) Socket 18 0.8/0.9 0.4/0.35 1B union 24 11 2 Port size Weight (kg) 3 4 Compact size and light weight Note 1) Based

Stainless Steel Heat

CAT.EX30-1 A Stainless Steel Heat Exchanger Type Air Dryer Series IDUS Series IDUS Inlet air temperature C Model IDUS3E IDUS4E IDUS6E 500 310 55 740 Air flow capacity l/mim(ANR) 295 (300) 475 (430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D Series IDFS Series IDFS Inlet air temperature C Model IDFS6E IDFS8E IDFS11E 740

Series KP/KPQ/KPG

SRH3000 SRH4000 Series SR Series SR Series Body Diaphragm Port size Rc Liquid-contact part materials M5 1/4 1/8 3/8 1/2 Fluoro rubber SR1000 Fluoro rubber host with PTFE on liquid-contact surfaces SUS316 SR3000 SR4000 Clean Gas Filter Series SF Cartridge type 0.01mm particles 100% eliminated Principal materials Port size Thread type Element Housing Seal M5 1/4 Series SFA Series Type 100 200 300