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Please keep this manual handy for future reference. 2 RD+ Receive Data + 1 3 3 TDTransmit Data Bit No. 6 4 6 4 2 0 0 0 RDReceive Data 4 0 2 4 6 8 16 28 30 Output No. Solenoid on side A 2 Side D BUS IN: M12 4-pin socket D-coded (SPEEDCON) (SI unit side) 1 Output No. Solenoid on side B 1 3 5 7 9 17 29 31 No. Designation Description 1 3 5 7 1 1 5 7 Bit No.

() 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)( ) 90 () (0100) ()90ON(OFF) () 10 L/min 10 L ON OFF ON ()OFF () 0 -12No.PF-OMP0001CN-F , ,2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,101112 1 L/min SI SI ON-OFF ON 0 ripple -13No.PF-OMP0001CN-F 4 0.50.7 Nm ,, M4(4) (67) M4 -14No.PF-OMP0001CN-F (3.0,4 ) (67 ) 0.50.7 Nm ,, (3.0) -15No.PF-OMP0001CN-F

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

(Rc1/8)Rc1/8 5 2 5 2 4-2. ASSY O 0.70.9mm 4-3. 4-4. 4-5. 4-6. 4KPa (1) (2) 9 - (3) (4) (5) 4-7.O ASSYO 5 O O O 4-8. ,, 10 - 5.

D-MS-A Mounting screw (M2.5 x 4 L, Steel (Black zinc chromate)) 1 pc. D-MS-AP Mounting screws (M2.5 x 4 L, Steel (Black zinc chromate)) 10 pcs. D-MS-B Mounting screw (M2.5 x 4 L, SUS) 1 pc. D-MS-BP Mounting screws (M2.5 x 4 L, SUS) 10 pcs. ISA-2-1 DIN rail (Width 35 mm x Length 105 mm) 1 pc. ISA-2-2 DIN rail (Width 35 mm x Length 140 mm) 1 pc.

MH*-OMM0057 MHL2-10D* MHL2-16D* MHL2-20D* MHL2-25D* MHL2-32D* MHL2-40D* 1. 23 2. 4 3. 3-1 5 3-2 5 3-3 5 3-4 67 3-5 8 3-6 9 3-7 1012 3-8 13 4. 4-1 13 4-2 14 4-3 15 4-4 16 1 - *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment

Disassembly Procedure 1) Loosen hexagon socket head cap screw 1 so that bonnet 2, spring 3 and diaphragm Ass'y 4 are disassembled. 7.2.2. Assembly Procedure 1) Assemble crimped side of diaphragm Ass'y 4 (white resin part) to face body side.

Designation Description 1 SLD Shield 2 DB Communication wire DB 3 DG Communication wire DG 4 DA Communication wire DA 5 Unused : Recommended mating M12 4-pin plug, part no. PCA-1567717. (Refer to page 28) BUS IN: M12 4-pin plug, A-coded (SPEEDCON) No.

Mounting 2-4. Operating environment 2-5. Pneumatic circuit 2-6. Adjustment and Operation 3. How to use P. 15 3-1. Usage 3-2. Lock release mechanism 4. Maintenance P. 18 4-1. Checks 4-1-1. Inspection points 4-1-2. Inspection interval 5. Troubleshooting P. 19 6.

No.VFR2000-OMH0002-A 5 Port Solenoid Valve PRODUCT NAME VFR2000 Series MODEL/ Series Contents Safety Instructions -2, 3 Precautions on Design -4, 5 Selection -4, 5 Mounting -5 Piping -6 Wiring -6 Lubrication -6 Air Supply -6, 7 Operating Environment -7 Maintenance -7 Specific Product Precautions -8 to 13 Trouble shooting -14 Remedy -15 -1VFR2000-OMH0002-A Safety Instructions These safety

0 CLJ2 CLM2 CLG1 CL1 w $8 @4 i u !7 t !2 $9 !3 !1 %5 @6 @5 $5 #6 MLGC %2 CNG @8 !9 MNB e CNA2 $2 q %3 %4 $1 CNS #1 #0 @9 #4 $0 !5 !4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

Note 4) AS231FE-01 (4, 6) is POM. 15-9-38 4 Speed Controller with Residual Pressure Release Valve with One-touch Fitting, Elbow Type/Universal Type Dimensions Elbow type Model Weight (g) T H1 H2 D1 D2 L1 L2 L3 L4 A M1 Max. Min. Max. Min.

Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 1/4, 3/8, 1/2 3/4, 1 1 1/4, 1 1/2 2 145.5 155 216 241 39.5 43 75 90 73 78.5 94.5 109.5 3 7 5 10 1/4 1/4 1/4 1/4 67 78 110 140 46.5 85 48 52 80 90 B24P B25P 80 98 126 160 14-4-17

PB Tightening torque for piping Torque (N.m) Body class 1.5 to 2.0 2 3.0 to 3.5 3 7.5 to 9 4 17-5-133 3 Series LVN Flow Characteristics (Fluid: Water) LVN20 LVN30 LVN40 14 4 4.5 7 8 12 3.5 Differential pressure Differential pressure Differential pressure 6 10 P0.05MPa P0.05MPa P0.05MPa 3 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) 5 8 P0.03MPa P0.03MPa 2.5 4 P0.03MPa 2 6 3 1.5 4

Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/4 40 to 42 Rc 11/2 48 to 50 Rc 2 48 to 50 Reference How to tighten M5 threads on the fittings After tightening by hand, use a tightening tool to add about 1/6 turn more. But when using miniature fittings, after tightening by hand, use a tightening tool to add 1/4 turn more.

Z S L, Z S Note ) PAX 1 1 4 1 2 PB AC Ordering example (Example) Series VXR21, Rc 3/4, 24 VDC, Conduit terminal (Part no.)