SMC's PFM dual color digital flow switch was developed initially to detect microchip component adsorption in vacuum, and early clogging in both filter and nozzle applications.  The series is incredibly compact and lightweight compared to existing flow sensors.  The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon

The ZSE2 series is a compact, pressure switch (for vacuum pressure) and can be integrated with ZX or ZR vacuum systems. The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, VACUUM SWITCH, ZSE30, ZSE30A, N63, 34 lb

The ZSE2 series is a compact, pressure switch (for vacuum pressure) and can be integrated with ZX or ZR vacuum systems. The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, VACUUM SWITCH, ZSE30, ZSE30A, N63, 34 lb

Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Bore Size: 20mm, Stroke: 125mm, Action: T (Single Acting, Spring Extend), Rod End Thread: Male Rod End

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 40 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 06 (3/4 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 100 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket), Made to Order: X77 (Differential Pressure Indicator

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 03 (3/8 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 1 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 03 (3/8 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 5 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 1 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 2 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 06 (3/4 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 20 μm

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 06 (3/4 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 50 μm

Seal), Element Length: A (ℓ250), Port Size: 06 (3/4 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 5 μm, Element Seal Material: T (Fluororesin)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 03 (3/8 Rc), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 2 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 03 (3/8 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: X50 (0.5 μm), Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 03 (3/8 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 1 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 03 (3/8 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 5 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 03 (3/8 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 20 μm

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 2 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 5 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)