SMC Corporation of America
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S-type block companion flange L-type block female threaded companion flange S-type block female threaded companion flange Differential pressure indication switch d Differential pressure indication switch S-type block Differential pressure indicator E (Rc) S-type block Differential pressure indication switch Y (75) (50) AE Differential pressure indicator E (Rc) K Differential pressure indicator

Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02

Do not drop, bump or apply excessive impacts (300m/s or more for reed switches and 1000m/s or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 2. Do not carry a cylinder by the auto switch lead wires. Never carry a cylinder by its lead wires.

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Male thread LDZB5L 196N 33mm/s LDZB5M 40,100,200 117N 100mm/s LDZB5H 72N 200mm/s Model Max. thrust Max. speed Lead screw Motor Stroke (mm) Mounting bracket Rod end thread Cover Auto switch Slide screw 8 Lead 2 25,40,100,200 LDZC3L 80N 33mm/s Slide screw 8 Lead 6 Slide screw 8 Lead 12 Slide screw 12 Lead 2 Slide screw 12 Lead 6 Slide screw 12 Lead 12 LDZC3M 43N 100mm/s LDZC3H 24N 200mm/s

Flow Switch Pressure Switch 3-Color Display Digital Flow Switch for Water PF3W Series 2-Color Display High-Precision Digital Pressure Switch ISE80 Series 3-Color Display Electromagnetic Type Digital Flow Switch LFE Series PVC Piping Fittings and Tubing S Coupler KK Series S Coupler/Stainless Steel (Stainless Steel 304) KKA Series Stainless Steel 316 One-touch Fittings KQG2 Series Metal One-touch

(page 72) Y U16 0x0064 5 R/W (100) Setting of OUT1 delay time at ON. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment dtH1 (OUT1 delay time at ON) Y U16 0x0 6 R/W (0) dtL1 (OUT1 delay time at OFF) Setting of OUT1 delay time at OFF. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment Y U16 0x0 7 R/W (0) OUT1 Accumulated threshold value setting (L) Consider the accumulated inclination when reading or writing

2 JOG 1mm/s 2 JOG 1mm/s JOG 1% () 0.01mm 37 - Bit/Byte / ID No. 0 1 Bit[70] 1 RWwn 1) 063 1ABS() Bit[F8] 1 2) 2INC() Bit[70] H RWwn+1 1) 2 065500 mm/s Bit[F8] L Bit[70] 3 RWwn+2 1) Bit[F8] 2 4 2147483647 0.01mm Bit[70] 1 RWwn+3 1) Bit[F8] 0 Bit[70] H RWwn+4 1) 2 065500 mm/s2 Bit[F8] L Bit[70] H RWwn+5 1) 2 065500 mm/s2 Bit[F8] L Bit[70] 1 030 10% RWwn+6 1) Bit[F8]

NCQ8B056-S-PS NCQ8B056-S-PS 056 (9/16") NCQ8B075-S-PS NCQ8B075-S-PS 075 (3/4") NCQ8B106-S-PS NCQ8B106-S-PS 106 (1 1/16") Piston seal is included. NCQ8B150-S-PS NCQ8B150-S-PS 150 (1 1/2") NCQ8B200-S-PS NCQ8B200-S-PS 200 (2") NCQ8B250-S-PS NCQ8B250-S-PS 250 (2 1/2") Construction Single Acting Spring Extend 11 12 10 Seal Kit Parts List No.

With light/surge voltage suppressor (Non-polar type) For AC voltage valves there is no S option.

TDe8 TR W W D D E E d d TY M a MA MA M a C K F NA F NA A K A B H S + Stroke H + Stroke 0 -0.5 TX ZZ + 2 strokes TZ (mm) Bore size (mm) E H TR A a B C d F G GA J K M MA MM NA P R S T D TDe8 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 -0.032 -0.059 -0.032 -0.059 -0.032 -0.059 -0.040 -0.073 -0.050 -0.089 -0.050 -0.089 -0.050 -0.089 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074

Actuator rating Maximum work piece load: 5kg Maximum speed: 600mm/s Maximum stroke: 500mm Maximum work piece load: 8kg Maximum speed: 500mm/s Maximum stroke: 600mm Series LJ1H30 LJ1H3031A-K (10mm lead) 500 When an actuator is operated under conditions that exceed the lines on the graph to the left, be sure to use a regenerative absorption unit. 450 400 8kg 350 Example) A Speed (mm/s) 300

NqD)y2sIE-Ix'u' IIHcvaall_I xars High spsed driye wilh a pislon speed of 1500mm/s (basic type) is possible. (When without load) **I-I-xBi3 Specifications Basic type, Slider type Basic type NCY2B6-40 Basic 2 60 in/s {50 lsooommis) Not 1)Whn operaling thlscylindffat high sp6d, b.6ur to provi(b a shock absoftor.

Cable connector (option) 63 (S type: 39) L1=101 (S type: 77) Part name Part number Suited cable outer diameter Resin-made cable clamp unit (A) P368010-26 7 to 9 M8 x 1.25 Resin-made cable clamp unit (B) P368010-27 9 to 11 M8 x 1.25 Actuator main shaft Actuator main shaft Side mounting with the fork lever assembly M Side mounting with the fork lever assembly S Cable connector G1/2 Exploded

See the intersection of lateral axis 500mm/s and 63 line, and extend the intersection to left.

Repeatability 3% F .S. Sensitivity 0.5% F .S. Linearity 3% F .S. or less Lubrication Not required (Use turbine oil Class 1, ISO VG32, if lubricated.)

NqD)y2sIE-Ix'u' IIHcvaall_I xars High spsed driye wilh a pislon speed of 1500mm/s (basic type) is possible. (When without load) **I-I-xBi3 Specifications Basic type, Slider type Basic type NCY2B6-40 Basic 2 60 in/s {50 lsooommis) Not 1)Whn operaling thlscylindffat high sp6d, b.6ur to provi(b a shock absoftor.

Series: 1 (VQZ1000), Configuration: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 3 [110VAC (115VAC) 50/60HZ], Lead Wire: L (L Plug Connector w/Lead Wire, Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: M5 Thread