Series AP3100

65 C (No freezing) 2) 0.7 1.3 1.0 Inboard leakage Outboard leakage 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 4) 4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m) Face seal , Tube weld Bottom mount 0.36 in3 (6.0 cm3) 1.27 kg 5) Leak rate Across the seat leak Surface finish Connections Installation Internal volume Weight 1/4 turn round knob with open/close indication window 7)

SI unit for PROFIBUS DP

Do not use the product in an environment where corrosive gases or fluids could be splashed. Otherwise damage to the product and malfunction can result. Do not use in an area where surges are generated.

Air Gripper for collaborative robots.

24 Allowable voltage fluctuation -10 to 10% Power consumption (W) 0.4 [Starting 0.4, Holding 0.1] Please refer to page 1367 of Surge voltage suppressor the Best pneumatics catalogue.

2-Color Display High Precision

Note) When an output is reversed, , , , will be rectified.

Digital Flow Switch (Remote type sensor unit)

An injury or failure can result. Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result. Verify the specifications before use. Do not operate in an atmosphere containing flammable, explosive or corrosive gas. Fire or an explosion can result.

VG342 Series

Take measures to ensure air quality, such as by installing an aftercooler, air dryer, or water separator. 1.

Fieldbus system (SI unit compatible CompoNet TM )

Measure the voltages at both sides of the power supply for solenoid valves. 24 VDC +10%/-5% (Refer to Unit specification on page 31) -27No.EX-OMM0008-D Troubleshooting Troubleshoot Applicable model: EX12#-SCM# If a SI unit gets an operation failure, look for the problem using the following flow chart.

Time Delay Valve

Caution (1) Differences in the delayed time may be larger due to adhesion of the seal when the product is operated for the first time following an extended period of nonoperation. When the product is operated after an extended period of non-operation, the tolerance for the accuracy of repeatability for the time delay may be outside of the +/10 % range.

SI unit for CC-Link

An example of when the SI unit station number is set to 01 is shown below.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

KFx-OMY0034

Install an air filter at the upstream side of valve. Select an air filter with a filtration degree of 5m or finer. (9) Do not use in environments where foreign matter may stick to the product or get mixed in the product's interior. (2) Install an after cooler, air dryer or water droplet separator, etc.

Pressure Sensor for General Fluids

If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system Check the product regularly for proper operation Otherwise malfunction can result, causing an accident.

Series AP500

to 1.0 MPa) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Vacuum to 3500 psig (24.1 MPa) 1) Vacuum to 300 psig (2.1MPa) 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m) Option: 10 in.

Rotary Actuator

Operating Environment Warning Never use in an atmosphere of explosive gases. The structure of auto switches is not intended to prevent explosion. Never use in an atmosphere with an explosive gas since this may cause a serious explosion. Do not use in an area where a magnetic field is generated.

Fieldbus System

An unexpected malfunction in the system composition devices is likely to occur due to the malfunction of machinery or equipment. 3. After maintenance, make sure to perform an appropriate functionality inspection. In the case of an abnormality such as a faulty operation, stop operation at once. An unexpected malfunction in the system composition devices is likely to occur. 4.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 8 8 7 5.5 5.5 5 50 45 45 41 1/4 1/8 1/8 14 12 10 16 13 13 10 8 M14 x 1.5 M32 x 2 134 3.2 23 The bracket is shipped together.

ATX-OM-F004E

(Such as for panel mounting screws) (4) Use an appropriate power supply voltage. The allowable voltage fluctuation range is +/-10% of the rated voltage. HAA Series 10 7. Electrical wiring ATX-OM-F004E Air-Cooled Aftercooler 8.

Ozone Resistant

For non-HNBR devices that nevertheless afford superior ozone protection, please refer to the "List of Ozone Resistant Products 2: Series 80-" on page 10. Endurance Test An ozonizer was used in a pneumatic circuit to prepare air to an ozone concentration of 1ppm.

MGP-OM0242Q

D-M9 5Note1) 5 2pcs. 10Note1) 10 1pc. D-M9W 5Note2) 2pcs. 10Note2) 10 1pc. D-A9 5Note1) 5 2pcs. 10Note1) 10 Note1)Confirm that it is possible to secure the minimum bending radius of 10mm of the auto switch lead wirebefore use. Note2)Confirm that it is possible to securely set the auto switch(es) within the range of indicator green light ON range before use. 18 14-4.

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge