IR1000/2000/3000

55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate

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(mm ) . 100 125 150 I 50 75 100 125 150 75 ~ 50 I 75 50 100 125 150 107 40 70 B3 83 97 11 5 128 128 194 52 62 204 212 225 225 1 83 107 50 70 83 ! 97 115 128 I 128 52 62 204 19' 212 2.?

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(71) 100 110 95 22 48 4 17 29 14 38 62 (63) 124 (139) 36 1/8 140 (155) 70 (71) 100 140 125 22 48 4 23.5 29 14 38 62 (63) 124 (139) 42.5 1/8 11-4-6 72 Series CRB1 Rotary Actuator Vane Style Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

RB/RBL/RBQ

6.86 15.30 15.98 20.50 20.01 Basic type 15 15 23 23 65 65 150 350 With cap Weight (g) 16 16 25 25 70 70 165 400 It denotes the values at the maximum energy absorption per one cycle.

C85

Check the detecting position again and tighten the mounting screw to fix the auto switch definitely (the tightening torque of M3 screw should be about 50 to 70 N/cm). 5. Modification of the detecting position should be made following step #3. C76 C85 C95 Auto Switch Mounting Band Part No.

CNG

M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20 M10 x 1.25 M6 x 1 depth 12 6 14 M14 x 1.5 44 Rc 1/8 28 2.5 81 169 (178) 12 10 (12) 107 15 (16) 33 8 4 12 Without rod boot With rod boot Bore size (mm) 20 25 32 40 l ZZ e f h ZZ H 35 178 (186) 30 16 55 198 (206) 0.25 x Stroke 40 193 (201) 30 17 62 215 (223) 40 196 (204) 35 17 62 218 (226) 50 221 (230) 35 17 70

HRS100/150

70 Waterproof specification IPX4 Accessories Alarm code list stickers 2 pcs.

Slider Type Ball Screw Drive/11-LEFS Series

Selection Example Workpiece mounting condition: Operating conditions 70 Workpiece mass: 45 [kg] Lead 10: LEFS40B 60 Speed: 300 [mm/s] W 50 Acceleration/Deceleration: 3000 [mm/s2] Work load: W [kg] 100 40 Stroke: 200 [mm] Lead 20: LEFS40A 30 Mounting position: Horizontal upward 20 10 Step 1 Check the work loadspeed.

Compact Manifold Regulator

Knob Position Symbol Position Knob position Knob position Knob position Front Top Bottom 56 A B C Top Front Bottom 84 42 84 70 70 6 26 (Max.28) P U S SMC SMC H L 6 O C K SMC SMC 28.5 51.5 6 51.5 80 13 OUT IN 3 28 13 13 OUT IN OUT IN 3 3 2. OUT Piping Position 3.

HRX-OM-X071

/ 70 Dimensions 18 mm W483xD550xH710 Accessory19 Power supply connector,Maintenance handle for particle filter10, Operation manual,Particle filter element10 Weight 20 kg 74 67 1: No condensation should be present.

CNG

1.25 24 1/8 2 65 141 (149) 11 3 12 35 30 16 55 198 (206) 11 178 (186) M6 x 0.75 26.5 5.5 8 M10 x 1.25 29 1/8 2.5 73 151 (159) 11 3 12 40 30 17 62 215 (223) M5 x 0.8 depth 7.5 11 193 (201) Stroke x M8 x 1.0 26.5 5.5 10 M10 x 1.25 35.5 1/8 2.5 73 154 (162) 11 3 12 40 35 17 62 218 (226) M5 x 0.8 depth 8 10 (11) 196 (204) 28 M10 x 1.25 6 14 M14 x 1.5 44 1/8 2.5 81 169 (178) 12 4 12 50 35 17 70

SX

Nil Rc Blanking plate assembly G F N NPT NPTF T C 51 80.8 97 B 26 53.8 70 A Effective area 14 mm2 Series SX3000 (8) Model AN203-KM8 AN200-KM10 AN300-KM10 16 26 mm2 22 SX5000 (10) 30 mm2 25 Series Assembly part no. SX3000-75-1A SX5000-76-1A SX3000 SX5000 Plug These are inserted in cylinder ports or SUP/EXH ports which are not being used.

VFS

2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

Cylinder with Lock Series CNG

1.25 24 1/8 2 65 141 (149) 11 3 12 35 30 16 55 198 (206) 11 178 (186) 26.5 M6 x 0.75 5.5 8 M10 x 1.25 29 1/8 2.5 73 151 (159) 11 3 12 40 30 17 62 215 (223) M5 x 0.8 depth 7.5 11 193 (201) Stroke x 26.5 M8 x 1.0 5.5 10 M10 x 1.25 35.5 1/8 2.5 73 154 (162) 11 3 12 40 35 17 62 218 (226) M5 x 0.8 depth 8 10 (11) 196 (204) 28 M10 x 1.25 6 14 M14 x 1.5 44 1/8 2.5 81 169 (178) 12 4 12 50 35 17 70

Modular Type Lubricator Series AL

70 P 28 57 73 73 H 22 23 26 25 35 35 E 47 47 D 25 40 53 70 70 90 95 A B 77 115 142 176 176 250 268 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

LEC-OM02904

(1) 0+55() 0+40() -20+65() -15+70() 90%RH() 80%RH() 90%RH() () 1000m LECS-S5 LECS-S7 LECS-S8 () 5.9m/s2 XY49m/s2 .

ZQ-OM01401

80 60 0.4MPa 50 0.35MPa 0.3MPa 60 0.3MPa 40 40 30 20 20 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [] ZQA (PD)() ZQ000A (PD) 80 80 0.45MPa 70 70 [L/min(ANR)] [L/min(ANR)] 0.5MPa 0.35MPa 60 60 50 50 0.25MPa 0.35MPa 0.3MPa 40 40 0.15MPa 30 30 20 20 0.05MPa 10 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [] ZQA (PD) 80 70 [L/min(ANR)] 0.45MPa 60 50 0.35MPa 40 0.25MPa 30 0.15MPa 20 0.05MPa 10 0 0 1 2 3 4 5 [] 38

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

Thermo-chiller

70 Waterproof specication IPX4 Accessories Alarm code list stickers 2 pcs.