CVJ3

DC specifications AC specifications (50/60 Hz) Magnet installed even without auto switch 1 2 3 4 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Auto switch mounting Rail mounting style Band mounting style Symbol A B Example Rail mounting style Band mounting style CDVJ5B15-60-A CDVJ5B10-45-B For the applicable auto switch model, refer to the

HAA

Symbol Description Port size Nil Symbol Size Applicable model D Auto drain F Dust-protecting filter S Mounting bench 3 4 06 Rp socket 10 1B union 14 1 union HAA7 HAA15 HAA22, 37 1 2B Source voltage Symbol Voltage Applicable model 1 2 3 Single phase 100 VAC Single phase 200 VAC Three phase 200 VAC HAA7, 15 HAA7 HAA15, 22, 37 How to Calculate Outlet Air Temperature Outlet air temperature can

Thermo-chiller/

Pipe thread type Nil Rc F G (With Rc-G conversion tting set) N NPT (With Rc-NPT conversion tting set) Power supply Single-phase 200 to 230 VAC (50/60 Hz) 9 A

AS

With One-touch fitting Port size U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 Needle Valve/Flow Rate Characteristics AS2201F-U02, AS2211F-U02 AS2301F-U02, AS2311F-U02 AS2201F-U01, AS2211F-U01 AS2301F-U01, AS2311F-U01 300 600 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 06, 07 200 400 01, 23 300

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Also, when exceeding the air cushion stroke ranges on page 1346, the piston speed should be 100 to 200 mm per second. Note 2) The piston speed is 100 to 1000 mm/s for centralized piping. Note 3) Use at a speed within the absorption capacity range. Refer to page 1346.

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

/200 to 208 VAC 10% Max. operating current (A) 26 Breaker capacity (A) 30 Communications Serial RS-485 (D-sub 9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note

Heatless Air Dryer ID Series

VAC (50 Hz) 200 to 220 VAC (60 Hz) Single phase 220 VAC (50 Hz) 0 F G N NPT 1 5 6 134

Refrigerant R407C (HFC) Series IDF100FS/125FS/150FS Applicable Compressor Size: 100 kW, 125 kW, 150 kW (Max. inlet air temperature: 140°F (60°C) (Max. ambient temperature: 113°F (45°C)

Heat exhausting direction Voltage Symbol Description Nil Heat exhaust from the rear 1 Heat exhaust from the right Note) Symbol Voltage 30 Three-phase 200 VAC (50 Hz) 200/220 VAC (60 Hz) 2 Heat exhaust from the left Note) 3 Heat exhaust from the top Note) Note) The combination of 1, 2 and 3 is not available. (Heat exhausting face can be specied on one side only.)

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

(N) Backlash Manual release 12 16 20 40 Head end only 8 5, 10, 15, 20, 25, 30 125 211 53 82 329 29 12, 16 25, 50, 75, 100 1 mm Non-lock type only 25, 50, 75, 100, 125, 150, 175, 200 20, 25, 32, 40 Strokes other than the above are produced upon receipt of order. Theoretical Output (N) Stud Bolt Part No.

Series PPA PPA100/101/102 Compact Manometer 4

kPa 200 kPa Fluid Air, Non-corrosive gases Power supply 3 V (DC), Type AA dry cell x 2 pcs.

Clean Air Filter SFD Series

SFD100/200 AMG SFD200 only AFF Rc 1/4 NPT 1/4 G 1/4 Female thread SFD100/200 AM Different diameters for IN and OUT ports are Made to Order. For details, refer to page 326. AMD Relationship between Operating Temperature and Max.

V100

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Indicator light and surge voltage suppressor G: 300 mm lead wire L: With 300 mm lead wire M: With 300 mm lead wire

5.0 MPa Pilot Operated 2 Port Solenoid Valve Series VCH40

5.0 MPa Pilot Operated 2 Port Solenoid Valve Series VCH40 How to Order Valve type 1 D G VCH4 1 06 Voltage N.C. 1 2 3 4 5 6 100 VAC 200 VAC Thread type (Conforming to ISO1179-1 on the pneumatic/hydraulic G thread) 110 VAC 220 VAC 1 24 VDC Port size 2(OUT) 1(IN) 12 VDC 06 10 3/4 Consult with SMC for other voltages. CE marking compliant products are only available with 50 VDC or less.

High Pressure Coolant Valve: 3.5 MPa, 7.0 MPa VNH Series

./7.0 MPa Electrical entry/With light/surge voltage suppressor D DIN terminal Seal material DZ DIN terminal with light/surge voltage suppressor A B NBR seals FKM seals Rated voltage Valve size Port size 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 10A 15A 20A 25A 1 2 3 4 3 8 1 2 3 4 4 1 7 6 5 24 VDC 12 VDC 240 VAC 50/60 Hz Semi-standard For other rated voltages

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

N.O. 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Note) N.O. valve operates properly only when appropriate pressure is applied to the pilot.

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

3 Port Solenoid Valve Body Ported Series VQZ100/200/300 Single Unit [Option] Plug Lead Unit VQZ100 / How to Order Valve Series VQZ 1 1 5 5 M C6 1 PR CE compliant CE marked 1 VQZ100 body width 10 mm Nil Q Note) For CE compliant models, DC-type only. Type of actuation N.C.

VXH

V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) Class B G C D, T S S L, Z Note) Be sure to read this before handling the products.

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications 2 21 01 1 G 0 R 1 VXK AC 0 2 21 01 1 G 5 VXK DC Model Bracket Orifice size Refer to the Table (1) None Nil Fo

conduit terminal and light TZ -With conduit terminal, surge voltage suppressor and light D -DIN terminal DS -DIN terminal with surge voltage suppressor DL -DIN terminal with light DZ -DIN terminal with surge voltage suppressor and light DO-For DIN terminal (without connector, gasket is included.) 6 7 8 J 1 2 3 4 5 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz 100 VAC 50/60 Hz 200

WRF100 Frame Clamp Cylinder

Frame Clamp Cylinder WRF100 How to Order C T200 WRF100 Protective cover Nil C Without cover With cover Clamp arm T-type arms Symbol Symbol S-type arms 200 200 Unclamped position T200 S200 240 240 T240 S240 270 T270 Limit switch Clamped position Note) This product does not include the limit switch. (The limit switch should be prepared by the customer.)

Air Suction Filter ZFA Series

Air Suction Filter ZFA Series RoHS Model Prevents vacuum equipment trouble due to solid foreign objects Model Port size Recommended air flow (L/min (ANR)) Note) Weight (kg) Internal capacity (cm3) ZFA100 ZFA200 1 8 1 4 50 200 0.14 0.19 30 49 Solid foreign objects are collected in the element and do not remain in the case. Note) Flow rate when initial pressure drop is 3 kPa or less.