High-precision Digital Pressure Switch

[April 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018-2021 SMC Corporation All Rights Reserved No.PS-OMV0009-E

DIQ-69200-OM002

This operation manual refers to all standard types and is partially applicable to special models. 0120-837-838 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2014 SMC Corporation All Rights Reserved

IZx-OMV0005

No power ("PWR" LED is Two or more ionizers are 10 Green "NDL" LED is ON. 11 "ION / HV" LED is OFF obstacles/obstructions LED of PWR(green), An emitter surface is contaminated There are worn out. green flash. 12 13 14 4 6 8 9 failure No/poor neutralizing performance input Product does not operate Output Abnormal 34 Doc. no.IZ-OMV0005 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IZx-OMP0064

Specifications" (p60) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

Remodeled

Part number of auto switch mounting bracket 28 Revision history Initial release : 2012/5/21 Revision 1 : 2014/1/30 Add the air cushion. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation

Electro-pneumatics Hybrid Regulator

If the product has failed, then please return the electro-pneumatic hybrid regulatorc as it is. 10 VY-OMK0001-C Revision history CE ARenewal WQ 1st printing : 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Parallel Seal Type Slit Valve

Loosening of connection Replace Bonnet ASSY Air Leakage of Bonnet ASSY Wear of piston sea Replace Bonnet ASSY 11 - 12 - 13 - 14 - 15 - 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

High Vacuum L Type Valve

Valve Screw Tightening size size torque XLFV-16 M2 0.2 -25 -40 -50 M3 0.8 -63 -80 17 XL-OMV0019 Revision history 1st printing: VZ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation

High Vacuum L Type Valve

Note 2) Heaters are not available for size 16. 19 XL-OMV0003 Revision history 1st printing: VR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved 20 XL-OMV0003

Air Suction Filter

Procedure 3 Element Cover Procedure 2 Procedure 6 Gasket Stop pin Procedure 5 Procedure 2 -11- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

Vacuum Ejector Body Ported Type/Box Type (Built-in Silencer)

ZH-OM00401 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved 20 -

Vacuum Pad with Ejector

This phenomenon occurs earlier if pushing or the high vacuum pressure is used. 27 - Revision history Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2016 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 28 -

HRX-OM-T002

Product Warranty HRS090 Series 10-2 Revision Rev.PJan.2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved

HRX-OM-S010

Sets monitoring time of communication error Setting range is 30 to 600 sec. to 6.3 Setting and checking HRS100/150 Series 6-4 Revision Rev.CJul. 2019 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

VNB Series

Detailed content of the failure Operating cycle Operating fluid Machine used Operating temperature Fluid pressure Pilot pressure 9 VN-OMA0005-D B Renewal PT Revision history C Renewal RP D Renewal RY 1st printing: 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior

KFx-OMV0011

. : No data is available. 13 - Revision history A : Fluid N2 Turbine oil class1 (ISO VG32) add Applicable Tubing : TUZ add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights

ITV2-OM00112_E

This operation manual refers to all standard types and is partially applicable to special models. 0120-837-838 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved

Rotary Table

E: Added external shock absorber type variations. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

High-precision Digital Pressure Switch

[January 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018-2022 SMC Corporation All Rights Reserved No.PS-OMW0002-C

Servo Motor Controller (24 VDC)

history No.LEC-OM01001 Jun/2009 1st printing No.LEC-OM01002 Apr/2010 Revision No.LEC-OM01003 Jun/2011 Revision Addition/Operation trouble Addition/Timing chart No.LEC-OM01004 Apr/2012 Revision Addition to notes about UL recognition No.LEC-OM01005 Jan/2014 Revision Addition/Troubleshooting No.LEC-OM01006 Jan/2015 Revision Addition/EMG signal Instructions 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101