70pvpump

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 03 04 06 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) PA5000 Diaphragm material Thread type 1 2 PTFE NBR Nil T Rc NPTF G NPT F N T, F, N are options.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

3100-5FZ Sta. 2) NVFR3200-5FZ NARBF3000-00-P-1 wFs3000-20A-1 r\)(T636-1A (P Sallery) Sta.3-4) NVFR3100-5Fz NW5FR3-01T-041-037 See Note 1) Mixed Contiguration Maniiold: 1 LINE ITEM '1 DESCRIPIION OTY Four Station Manifold Ass'y as lollows: Sta. 1-4) NVFF4100-3FZB NW5FR4-01T-041-M Mixr sta. 1-2) 3/8 side sta. 3-4) 1/2 side See Note 3) Note 1) Indicate gallery tor all blocking discs (P EA, or

VEX1

Therefore, it is possible to downsize 1 or 2 sizes (for example, a conventional 32A circuit can be changed to a 25A or a 20A). It is economical, as its performance cost (system price/effective area) is one half of the conventional style. (Comparison based on SMC data.)

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 10-SY3000 SY3000-38-20A(-Q) 10-SY5000 SY5000-38-1A(-Q) 10-SY7000 SY7000-38-1A(-Q) SUP port 10-SY3000 SY3000-39-20A(-Q) 10-SY5000 SY5000-39-1A(-Q) 10-SY7000 SY7000-39-1A(-Q) EXH port (Both sides) 1 8 1 4 10-SY9000 SY9000-39-1A(-Q) 1 4 1 8 1 4 10-SY9000 SY9000-38-1A(-Q) 1 4 Note) The SUP port of 10-SY3000/5000/7000 may be either on the lead wire side or on the end plate

SX

SX3000 SY3000-26-9A SX5000 SY5000-26-20A SX7000 SY7000-26-22A Bolt and gasket part no. Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-39-1 A SX5000 SX5000-39-1 A SX7000 SX7000-39-20A Series Assembly part no.

2/3 Port Valve

Options None With surge voltage suppressor With indicator light With indicator light and surge voltage suppressor S L Z Body size 4 5 6 7 8 9 15A 20A 25A 32A 40A 50A Refer to table w for configuration. Electrical entry Grommet Conduit DIN connector Conduit terminal G C D T Valve/Body 2 Energized closed/ single Refer to table w for configuration.

-fl Seies

3100-5FZ Sta. 2) NVFR3200-5FZ NARBF3000-00-P-1 wFs3000-20A-1 r\)(T636-1A (P Sallery) Sta.3-4) NVFR3100-5Fz NW5FR3-01T-041-037 See Note 1) Mixed Contiguration Maniiold: 1 LINE ITEM '1 DESCRIPIION OTY Four Station Manifold Ass'y as lollows: Sta. 1-4) NVFF4100-3FZB NW5FR4-01T-041-M Mixr sta. 1-2) 3/8 side sta. 3-4) 1/2 side See Note 3) Note 1) Indicate gallery tor all blocking discs (P EA, or

3 Port Air Operated Valve Series SYJA300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

VQC

Rubber seal EB P EA Manifold Options Blanking plate assembly VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-102 03 Individual EXH spacer VVQ4000-R-1SUP/EXH block plate VVQ4000-16A 02 03 ^{Residual pressure release valve perfect spacer VVQ4000-25A-1 Note 1) SUP stop valve spacer VVQ4000-37A-1 Interface regulator ARBQ4000-00-1 Throttle valve spacer VVQ4000-20A}

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com +0.070 0 MB-B05 CX +0.070 0 +0.084 0 +0.084 0 +0.084 0 MB-B08 DMB-B12 -X Rotation B 90 Bore size (mm) 20A B A + B + 90 20 25 32, 40 50, 63 50 50 50 50 175 170 170 175 35 30 30 35 A Data Clevis Pin 2-d Dd9 d Note) Cotter pin Bore size (mm) Model l m Dd9

HRX-OM-S004

Y strainer (40 meshes) 20A 1pc. Barrel nipple 20A 1pc. Drain pan for the pump 1pc.

CLQ

auto switch Bore size (mm) A + Stroke L G B + Stroke 8 FZ FX 2-6.6 A B 71 78.5 19.5 22.5 61 68.5 A B CLQ 29.5 32.5 20 25 5 to 50 5 to 50 MLGP Bore size (mm) L1 L FV G FZ S FX L1 Rod end nut RLQ 14.5 15 48 52 39 42 20 25 28.5 32.5 60 64 27 31 40.7 44.2 MLU Head side flange style: CLQG/CDLQG ML1C DFV S -X Head Side Flange Style Stroke range Without auto switch With auto switch Bore size (mm) 20A

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

2%4$2$4$5 @4 #0 Section A-A' 20A Data A' $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. Description Cam follower cap Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin No.

IDX-OM-V024

Air Flow Capacity Air flow calculated with correction factor (see the Chapter 7-2) Power consumption (Note 4) 1100W 1870W 2490W 3630W Electric spec Current consumption (Note 4) 10.0A 4.8A 8.2A 10.9A 15.9A Applicable earth leakage breaker capacity 15A 10A 15A 20A 30A (sensitivity current: 30mA) (Note 5) Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) GWP:2088 (Note 6) 13.70.4oz

VQ5000

sbar)] 12 12 1 4/2 (P A/B) 0.33 0.33 b 0.33 3.4 3.4 Cv 3.4 2 position rubber seal VQ5 01 1 2 16 16 C [dm3/(sbar)] 16 4/2 5/3 (A/B EA/EB) 0.33 0.33 0.33 b 4.4 4.4 4.4 Cv Note) For port size Rc 1/2 Manifold Option Individual EXH spacer VVQ5000-R-1EXH block plate VVQ5000-16A-2 Blanking plate assembly VVQ5000-10A-1 Individual SUP spacer VVQ5000-P-103 04 03 04 Throttle valve spacer VVQ5000-20A

HRX-OM-X084

HRR Series 3.4 Piping 3-19 HRX-OM-X084 Chapter 3 Transport and Setting Up [Tips] For HRR010-AN-10/20-,HRR010-WN-10/20A set of thread adapters that converts the connections from Rc to NPT is enclosed as an accessory. For NPT thread, be sure to use this adapter.

A_HEC-OM-K001

(UL 489 Listed and IEC 60947-2 Approved) Current rating; HED003 -10A or less HED005 -10A or less HED007 -20A or less Be sure to use a ring terminal suitable for the specifications of the power supply cable and a terminal block to connect them and supply power through the earth leakage breaker.

Plug-in Unit

Manifold Option Blanking plate assembly VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-102 03 Individual EXH spacer VVQ4000-R-1SUP/EXH block plate VVQ4000-16A 02 03 VQC SQ VQ0 ^{VQ4 Residual pressure release valve perfect spacer VVQ4000-25A-1 Note 1) SUP stop valve spacer VVQ4000-37A-1 Interface regulator ARBQ4000-00-1 A B P Throttle valve spacer VVQ4000-20A}

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 92 116 20 30 97 121 25 102 126 30 107 131 35 112 136 40 40 117 141 45 122 146 50 132 156 60 142 166 70 147 171 75 60 152 176 80 162 186 90 172 196 100 8-29-14 15 Dual Rod Cylinder: With Air Cushion Series CXS Dimensions: 25 57.5 22 45.5 10 2-cushion needle MX