5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)330Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type0.74
5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)330Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type0.74
5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)330Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type0.74
Flow(l/min): 15, Body Material: Aluminum, Nozzle Diameter: 0.5mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: Grommet type, with 0.3‑m lead wire (applicable to DC only), Light/surge voltage suppressor: No, Manual: Non-locking push type, Vacuum switch type: Single output, without analog, 200° setting (ZSE1), Body Type: Single
50~, Suction Flow(l/min): 30, Body Material: Aluminum, Nozzle Diameter: 0.7mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: Grommet type, with 0.3‑m lead wire (applicable to DC only), Light/surge voltage suppressor: No, Manual: Non-locking push type, Vacuum switch type: Single output, without analog, 200° setting (ZSE1), Body
Main Body Shape: Square Shape, Additional Function: Silencers / Filter / Valves for Vacuum Generation, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 30, Vacuum Port Connecting Port Shape: [Others] NPTF1/8, Air Supply Port Connecting Shape: NPTF1/8, Application: Individual Item, Operating Pressure Range(MPa): null~0.7, Operating Temperature Range(°C): 5:50~, Suction Flow(l/min
C): 5:50~, Suction Flow(l/min): 30, Body Material: Aluminum, Nozzle Diameter: 0.7mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: Grommet type, with 0.3‑m lead wire (applicable to DC only), Light/surge voltage suppressor: No, Manual: Non-locking push type, Vacuum switch type: Single output, without analog, 200° setting (ZSE1)
Flow(l/min): 23, Body Material: Aluminum, Nozzle Diameter: 0.7mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: Grommet type, with 0.3‑m lead wire (applicable to DC only), Light/surge voltage suppressor: No, Manual: Non-locking push type, Vacuum switch type: Single output, without analog, 3 rotation settings (ZSE1), Body Type
Flow(l/min): 23, Body Material: Aluminum, Nozzle Diameter: 0.7mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: Grommet type, with 0.3‑m lead wire (applicable to DC only), Light/surge voltage suppressor: No, Manual: Non-locking push type, Vacuum switch type: Single output, without analog, 200° setting (ZSE1), Body Type: Single
Flow(l/min): 23, Body Material: Aluminum, Nozzle Diameter: 0.7mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: Grommet type, with 0.3‑m lead wire (applicable to DC only), Light/surge voltage suppressor: No, Manual: Non-locking push type, Vacuum switch type: Single output, without analog, 200° setting (ZSE1), Body Type: Single
Flow(l/min): 50, Body Material: Aluminum, Nozzle Diameter: 1.0mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: Grommet type, with 0.3‑m lead wire (applicable to DC only), Light/surge voltage suppressor: No, Manual: Non-locking push type, Vacuum switch type: Single output, without analog, 3 rotation settings (ZSE1), Body Type
Flow(l/min): 50, Body Material: Aluminum, Nozzle Diameter: 1.0mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: Grommet type, with 0.3‑m lead wire (applicable to DC only), Light/surge voltage suppressor: No, Manual: Non-locking push type, Vacuum switch type: Single output, without analog, 200° setting (ZSE1), Body Type: Single
C): 5:50~, Suction Flow(l/min): 50, Body Material: Aluminum, Nozzle Diameter: 1.0mm, Combination of supply valve and release valve: With supply valve (N.O.) and release valve, Electrical entry: Grommet type, with 0.3‑m lead wire (applicable to DC only), Light/surge voltage suppressor: No, Manual: Non-locking push type, Vacuum switch type: 1 output, without analog, 200° setting, PNP output
Main Body Shape: Square Shape, Additional Function: Silencers / Filter / Valves for Vacuum Generation, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 60, Vacuum Port Connecting Port Shape: [Others] NPTF1/8, Air Supply Port Connecting Shape: NPTF1/8, Application: Individual Item, Operating Pressure Range(MPa): null~0.7, Operating Temperature Range(°C): 5:50~, Suction Flow(l/min
C): 5:50~, Suction Flow(l/min): 50, Body Material: Aluminum, Nozzle Diameter: 1.0mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: Grommet type, with 0.3‑m lead wire (applicable to DC only), Light/surge voltage suppressor: No, Manual: Non-locking push type, Vacuum switch type: Single output, without analog, 3 rotation settings
Main Body Shape: Square Shape, Additional Function: Silencers / Filter / Valves for Vacuum Generation, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 60, Vacuum Port Connecting Port Shape: Rc1/8, Air Supply Port Connecting Shape: Rc1/8, Application: Individual Item, Operating Pressure Range(MPa): null~0.7, Operating Temperature Range(°C): 5:50~, Suction Flow(l/min): 38, Body
Flow(l/min): 38, Body Material: Aluminum, Nozzle Diameter: 1.0mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: Grommet type, with 0.3‑m lead wire (applicable to DC only), Light/surge voltage suppressor: No, Manual: Non-locking push type, Vacuum switch type: Single output, without analog, 3 rotation settings (ZSE1), Body Type
Flow(l/min): 38, Body Material: Aluminum, Nozzle Diameter: 1.0mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: Grommet type, with 0.3‑m lead wire (applicable to DC only), Light/surge voltage suppressor: No, Manual: Non-locking push type, Vacuum switch type: Single output, without analog, 200° setting (ZSE1), Body Type: Single
Flow(l/min): 50, Body Material: Aluminum, Nozzle Diameter: 1.0mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: Grommet type, with 0.3‑m lead wire (applicable to DC only), Light/surge voltage suppressor: No, Manual: Non-locking push type, Vacuum switch type: Single output, without analog, 3 rotation settings (ZSE1), Body Type
Flow(l/min): 50, Body Material: Aluminum, Nozzle Diameter: 1.0mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: Grommet type, with 0.3‑m lead wire (applicable to DC only), Light/surge voltage suppressor: No, Manual: Non-locking push type, Vacuum switch type: Single output, without analog, 3 rotation settings (ZSE1), Body Type