Vacuum Unit Ejector / Vacuum Pump System

KQ2P 06 Model and Dimensions Symbol Applicable size d A L D Weight (g) Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4 18 35 8.5 1 Orange 09 5/16 20.5 39 10 2 Orange -40No. ZK2-OM00201 8. Maintenance 8.1.

Fieldbus system PROFINET compatible SI Unit

Refer to Section 7.4 EX245-DX1 shared 2 bytes 3..10 / module 1..8 Refer to Section 7.4 and Table 4-3 EX245-DY1 1 byte 3..10 / module 1..8 Refer to Section 8.4 EX245-DY1 shared 1 byte 3..10 / module 1..8 Refer to Section 8.4 and Table 4-3 6 to 130 bytes 3..10 / module 1..8 Refer to Section 9.4 EX245-LA1 6 to 134 bytes* 6 to 130 bytes 3..10 / module 1..8 Refer to Section 9.4 EX245-LB1 6 to

Title not found

2.2A (53J 8 . 1 1 1206) 2.O5 l52l '11.2\2 6 0 (66J 8 4 3 (?

MU

8 contained in one kit, and can be ordered using the kits number for each cylinder bore size. 2.4-11 Series MU Basic Spring return Spring extend MUB25SMU25, #9 MUB32SMU32, #9 MUB40SMU40, #9 MUB50SMU50, #9 MUB63SMU63, #9 Spring return MUB25SMU25, #8 MUB32SMU32, #8 MUB40SMU40, #8 MUB50SMU50, #8 MUB63SMU63, #8 (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42

Table of Contents - Tubing

Model 6 Size: nominal size X length Number of pieces 8 12 4 6 8 10 12 TM-04 TM-06 TM-08 TM-10 TM-12 2 X 6 2.6 X 8 4 3 X 8 Tube Release Tool Series TG To remove tube in a confined space or from manifolded one-touch fittings.

Compact Cylinder with Lock Series CLQ

10 27 31 39.2 43.2 18 20 8 10 16 20 4.5 5 18.5 22.5 9 10 20 25 Rod end nut L1 8 Series CLQ Dimensions/32 Double end tapped: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Standard type (through hole): CLQB32 Extension locking LOCK M8 x 1.25 Effective thread depth 13 Approx. 31.5 Rc 1/8 unlocking port (unlocks when pressurized) 7.5 42.5 22.5 Rc 1/8 Front cylinder port Rc 1/8 Rear cylinder port 2-5.4

Precision Cylinder Series MTS

Precision Cylinder Series MTS 8, 12, 16, 20, 25, 32, 40 Size 8 newly introduced to Series MTS!

High Power Cylinder Series RHC

6 10 1/4, 3/8 =0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1500 2000 2500 3000 12 16 20 24 1/4,3/8 3/8 3/8 3/8 0 1,000 2,000 3,000 Maximum speed Vmax [mm/s] 40 8 10 1/4, 3/8 500 6 40 =0.7 30 40 1000 1500 2000 2500 3000 3/812 3/812 3/812 3/812 3/812 12 18 24 30 36 0.5 0.1 0.3 20 10 Note) Since the cushion capacity may be exceeded in high speed, high load operation, confirm the maximum

JA/JAH/JB/JS

2.5 3 1.5 2 2 30 35 38 42 8 9 9 13 13 13 15 15 18 24 24 24 42 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 4.5 5 5 6 6 6 7.5 7.5 9.5 11.5 11.5 13 16 7 8 8 11 11 11 14 14 19 24 24 27 36 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 71000 0.05 0.07 0.07 0.16 0.16 0.16 0.3 0.3 0.6 1.05 1.08 1.5 4.5 7 8 8 11 11 11 13.5 13.5 16 20

Fluoropolymer Tubing Variations

(mm) TIL19 3/4" 3/4" x 5/8" 19.05 TIL25 1" 1" x 7/8" 25.4 TL0403 4 x 3 4 TL0604 6 x 4 6 TL0806 8 x 6 8 TL1008 10 x 8 10 TL1210 12 x 10 12 TL1916 19 x 16 19 TIL01 1/8" TILB01 1/8" 1/8" x 1/16" 3.18 TIL05 3/16" 3/16" x 1/8" 4.75 TIL07 1/4" 1/4" x 5/32" 6.35 TIL11 3/8" 3/8" x 1/4" 9.53 TIL13 1/2" 1/2" x 3/8" 12.7 1/8" x 0.086" Basic diameter 3.18 +0.2 0.1 +0.2 0.1 1.6 0.15 1 0.1 Tolerance

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

1/8 1/8 1/8 1/4 1/4 3/8 1/2 0 0 0 23 23 20 20 20 114 (122) 119 (127) 121 (129) 130 (139) 150 (162) 150 (162) 182 (196) 182 (196) Up to 200 201 to 1500 6 8 10 14 18 18 22 26 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 5 6 6 8 11 11 13 16 77 (85) 77 (85) 79 (87) 78 (87) 90 (102) 90 (102) 108 (122) 108 (122) 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 20 20 20 13 14 14 20 20 M5 x 0.8 depth 7.5

Rotary Actuator/Vane Style Series CRB2

Free mount type Series CRBU2 CDRBU2W20,30 P611060-8 P611010-8 P611010-9 P411020-8 P411020-9 P411040-8 P411040-9 CDRBU2W40 Vane type Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 CDRB2BWU40 CDRBU2WU10 CDRBU2WU15 CDRBU2WU20 CDRBU2WU30 CDRBU2WU40 Unit part no.

JA/JAH/JB/JS

2.5 3 1.5 2 2 30 35 38 42 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 4.5 5 5 6 6 6 7.5 7.5 9.5 11.5 11.5 13 16 8 9 9 13 13 13 15 15 18 24 24 24 42 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 71000 7 8 8 11 11 11 14 14 19 24 24 27 36 0.05 0.07 0.07 0.16 0.16 0.16 0.3 0.3 0.6 1.05 1.08 1.5 4.5 7 8 8 11 11 11 13.5 13.5 16 20

Parallel Style Air Gripper Series MHZ

18 22 8 12 18 22 8 12 18 22 60 135 270 470 70 145 290 515 70 140 290 515 17 45 66 104 Double acting Single acting type, Normally open Normally closed Normally open Single acting Single acting type, Normally closed 13 38 57 85 MHZ MHF Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

36 ZPT16F-B5 ZPT20F-B01 2 16 18 Rc 1/8 6.2 14 ZF 15.5 12.5 ZPT25F-B5 32 M5 x 0.8 5 9 ZPT25F-B8 25 28 M8 x 1.25 8 12 ZP 36 ZPT25F-B01 40 50 8 01 Rc 1/8 6.2 14 ZPT F-B (Without buffer/Female thread) ZPT32F-B5 32.5 M5 x 0.8 5 9 ZCU ZPT32F-B8 16 13 32 35 M8 x 1.25 8 12 36.5 ZPT32F-B01 Rc 1/8 6.2 14 AMJ Hexagon width across flats P N Misc.

3 Port Solenoid Valve/

22.9) (With check valve) A 31.5 45 40 117.4 23.5 4 (M12 connector) (14) 202.4 (31.5) (Distance between ports) View A For M12 connector 3/8" [1(P), 3(R) port] e w 32 r Pin number q 30.7 Vent port (6.2) 103.4 54.9 VP542(R)-5 D YZ1-03 -S1 -X536 3/8" [2(A) port] Port size: 1/8" (Without check valve) Applicable tube O.D.: 6, 1/4" (With check valve) (External pilot port) Safety limit switch 2 x

VCC

Indication of A B C D E F T VCKK1209-02F VCKK1008-02F VCKK1075-02F VCKK0806-02F VCKK0604-02F 12/9 13 49.5 10 19 18.5 9 to 12 Nm 10/8 11 48.5 9 17 18.5 6 to 9 Nm 1075 11 48.5 9 17 18.5 6 to 9 Nm 8/6 9 46 8 14 16 4 to 9 Nm 6/4 7 45.5 8 12 15 3 to 8 Nm 652 Valve for Water and Chemical Base Fluids VCC Series Dimensions VCKL 90 swivel elbow Approx. E A 10 Width across flats G Approx.

Vacuum Ejector Series ZM

(Rc, NPTF, G) Individual air pressure supply port (P) A 119 77 63 52 8 2 x Rc1/8 (1/8-27NPTF, G1/8) Vacuum port (V) 10 22 L2 91 114 L3 Silencer dedicated for manifold (ZZM-SA) Vacuum port electrical entry (In the case of side entry/With plug at the bottom) Rc 1/8 Hexagon socket head cap plug (mm) L1 1 L 2 3 4 5 6 7 8 9 10 Stations 28 1.5 40 1.5 72 1.5 44 1.5 56 1.5 88 1.5 60 1.5 72 1.5 104

Series LQ3 High Purity Fluororesin Fitting

x 0.086 1/4 x 5/32 1/4 x 5/32 3/8 x 1/4 3/8 x 1/4 3/8 x 1/4 1/2 x 3/8 1/2 x 3/8 1/2 x 3/8 3/4 x 5/8 3/4 x 5/8 3/4 x 5/8 1 x 7/8 1 x 7/8 1 x 7/8 Thread Size A A B A B C A B C A B C A B C 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" Tubing Connection E 1A LQ3 Size Combination Class Fitting Style Symbol E T P U Combination 1 2 3 4 5 6 Tube Size (Inch) 1/8" x 0.086

AIR FILTER

Applicable tube O.D. 10 NPT3/8" 10 NPT3/8" Note 2 Option Semi-standard Semi-standard 8 Port thread Part no. Rc G NPT AD37N-8(Z)-A AD37-8-A B External appearance drawing and part no. Applicable tube O.D. 10 NPT3/8" 15 Note 2 Note 2 Option Semi-standard Semi-standard Semi-standard 2 Port thread Part no. Port thread Part no.