CDQ2BP series

b t t . l b kwh Volume ins 16387 in3 16.387 ft3 0.0283 ft3 28.329 gal(U.S.)3.785 Volume mm3 6.10 x 10-5 cm3 (cc) 0.0610 m3 35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

+ B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder

Fieldbus System

End Plate EX600-ED2-l EX600-ED3-l Power connector Model specification M12 (5-pin) plug 7/8 inch (5-pin) plug 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Control/Input) Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition Weight 0.4 lbs (170 g) 0.4 lbs (175 g) EX600-ED3-l

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

L RUN SERIAL UNIT L ERR.

PF2A7H.eng

Accumulated output mode Excessive accumulated flow Lower digits Exceeds the range of the 2nd. turn of flow indication. ft3x106 ft3x103 m3x103 m3 m3 ft3 L/min L CFM ft3x106 ft3x103 m3x103 m3 m3 ft3 L/min L CFM ANR OUT ANR OUT Time Do not touch the terminals and connectors while the power is on.

HRX-OM-O021

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

MHF2

Hmm 0.3MPa 0.7MPa 0.3MPa 60 0.7MPa 0.4MPa 60 0.4MPa 40 40 20 20 100 80 60 40 20 0 100 0 80 60 40 20 Gripping point L mm Gripping point L mm 12-3-6 7 Model Selection Series MHF2 Confirmation of External Force on Fingers: Series MHF2 Step 3 MHZ L L MHF MHL Mr Mp Fv My MHR MHK MHS L MHC MHT MHY L: Distance to the point at which the load is applied (mm) MHW Maximum allowable moment Allowable

MHF2

: Series MHF2 Step 3 MHZ L L MHF MHL Mr Mp Fv My MHR MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS L MHC MHT MHY L: Distance to the point at which the load is applied (mm) MHW Maximum allowable moment Allowable vertical load Fv (N) Model Pitch moment Mp

Flow Control Equipment

min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500 06,

Modular Type Air Filter Series AF

P1 = 0.1MPa 0.04 0.04 0.02 0.02 00 00 500 1000 1500 5000 10 15000 Flow rate L/min (ANR) Flow rate L/min (ANR) AF30 Rc 3/8 AF60 Rc 1 0.10 0.10 P1 = 0.7MPa P1 = 0.5MPa P1 = 0.1MPa 0.08 0.08 P1 = 0.7MPa P1 = 0.3MPa Pressure drop MPa Pressure drop MPa P1 = 0.5MPa P1 = 0.3MPa 0.06 0.06 P1 = 0.1MPa 0.04 0.04 0.02 0.02 00 2000 1000 3000 4000 00 5000 10 15000 Flow rate L/min (ANR) Flow rate L/min

Multistage Ejector (N)ZL Series

Output specifications 25 (L) 26 (L) 67 (L) 26 (L) 27 (L) 67 (L) 1 output NPN open collector 30V, 80mA or less ZSE4 ZSE4B Analog output (1 to 5V) 1 output PNP open collector 80mA or less Analog output (1 to 5V) ZSE4E 2 outputs NPN open collector 30V, 80mA or less 2 outputs PNP open collector 80mA or less Refer to CAT.E824-A "Pressure Switch" for details on switches. 6 Multistage Ejector

Prevents Micro-Bubbles

L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS TMH ASD AS Number of needle rotations Number of needle rotations Number of needle rotations AS-FE KE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FG Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS-FP AS-FM AS-D AS-T AS-D AS-T ASP Number

E-P HYREG

Exhaust Time from 10 L Tank VY190 0 1 Port 2 (A) pressure (MPa) Port 1 (P) pressure 0.9 MPa ARJ AR425 to 935 Pressure (MPa) ARX AMR ARM ARP IR-A Exhaust time (s) IR (L/min(ANR)) Exhaust Time from 1000 L Tank Exhaust Flow rate Reduced pressure supply IRV Exhaust Time VEX 1.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 m Nil 3 m L 5 m Z Solid state switches marked "" are produced upon receipt of order.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

side: Same) 5 QQ C Q R 8 (I) (L) (Z) U N (G) NN (mm) A B C D E F G H I J L Y M N NN P Q QQ R U V X Model 2-3.4 through 2-6.5 counterbore depth 3.3 2-M4 x 0.7 4-M3 x 0.5 2-M3 x 0.5 thread depth 5 M3 x 0.5 x 10l CXS10 7.5 8 46 17 44 15 2-M4 x 0.7 35 20 4 20 6 33.6 8.5 7 M5 x 0.8 x 5l 30 thread depth 7 thread depth 4.5 2-4.3 through 2-8 counterbore depth 4.4 2-M5 x 0.8 4-M4 x 0.7 2-M4 x 0.7

90

Current model 1 L Released into atmosphere No fixed throttle 4 to 11 L Fixed throttle * Poor quality of air may cause operation failure. Select a model that is suitable for the desired air cleanliness by referring to Air Preparation Equipment Model Selection Guide (pages 2 and 3) for air quality. OUT IN (SUP.) OUT IN (SUP.)

HRX-OM-R005

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

Clean Gas Filter

Port size IDFA Port size Rc, NPT, TSJ, UOJ 1/4 02 Symbol IDFB Model size IDH Symbol Rated flow rare L/min(ANR) 10 20 30 Up to 26 Up to 70 Up to 140 Elements are replaceable. ID IDG Connection IDK Symbol Connection (IN, OUT) 0 1 2 3 Rc NPT TSJ UOJ AMG AFF SFA302 AM AMD SFA103 Model SFA200 AMH Model Rated flow rate L/min (ANR) Note 1) Element part no.

0.01

Clean Air Filter SFD Series RoHS Hollow Fiber Element HAA HAW Nominal filtration rating: 0.01 m (filtration efficiency 99.99%) AT IDF IDU Initial pressure drop: 0.03 MPa (at inlet pressure 0.7 MPa, maximum flow) Maximum operating pressure: 1.0 MPa (at 20C) IDF FS IDFA IDFB SFD100 SFD200 SFD101/102 Made to Order Up to 100 L/min(ANR) Up to 500 L/min(ANR) Up to 100 L/min(ANR) IDH ID IDG IDK