Accuracy: High-precision Type, Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead (mm): 10, Stroke (mm): 890, Motor Option: None, Cable Type: Robotic Cable, Flexible Cable, Cable Length: 10m, Driver Type: LECSS2-S*/T, S: 200 to 230 Power Supply Voltage; T: 200 to 240 Power Supply Voltage, I/O Connector: 1.5m

PFxx-OMO0007CN

() 10 m DC(-)() () -7No.PF-OMO0007CN * ( ) () CE 050 -8No.PF-OMO0007CN * ON , 10 /23 3 OFF (19 ) * OUT -9No.PF-OMO0007CN (11 ) SI L/min L (11 ) 1/8 1/4 3/8 1/2 -10No.PF-OMO0007CN N (3 m) PF2A7--28--X560 NPN(1 )+ (15 V) PF2A7--29--X560 NPN(1 )+ (420 mA) 22 PF2A7--68--X560 PNP(1 )+ (15 V) PF2A7--69--X560 PNP(1 )+ (420 mA) / ZS-37-A () 3 m 100 g ZS-37-B (L ) 3 m 100 g ZS-29-T

CG1-SMV13_en

Year Month 2015 2016 2017 2025 2026 2027 T U V D E F Bore Size (mm) Torque 10% (N.m) Jan O TO UO VO DO EO FO Instruction Manual CG1*N25&100-*Z-X2992 Air Reservoir 32 2.9 Feb P TP UP VP DP EP FP 40 4.9 Mar Q TQ UQ VQ DQ EQ FQ 50 11.8 Apr R TR UR VR DR ER FR 63, 80 24.5 Do not service or attempt to remove product and May S TS US VS DS ES FS machinery/equipment until safety

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

150 With auto switch CA1 Number of auto switches S n Bore size 20mm 25mm 32mm 40mm CS1 Air cylinder with auto switch 20 25 32 40 2 1 n Without auto switch (Built-in magnet) Auto switch * Refer to the left table for selecting applicable auto switches.

l

Air Cylinder/Low Friction Series CS1lQ Non-lube/125, 140, 160 How to Order Standard L Q 160 300 JR CS1 160 A53 L Q 300 JR CDS1 With auto switch Number of auto switches 2 1 3 n S 3 n With auto switch Mounting Basic Foot Front flange Rear flange Single clevis Double clevis Center clevis B L F G C D T Auto switch Low friction Without auto switch * Select the applicable auto switch from the

Stainless Steel Heat

DENMARK SMC Pneumatik A/S FINLAND SMC Pneumatics Finland OY FRANCE SMC Pneumatique SA GERMANY SMC Pneumatik GmbH HUNGARY SMC Hungary Ipari Automatizlsi Kft. IRELAND SMC Pneumatics (Ireland) Ltd. ITALY SMC Italia S.p.A. LATVIA SMC Pneumatics Latvia SIA NETHERLANDS SMC Pnuematics BV. NORWAY SMC Pneumatics Norway A/S POLAND SMC Industrial Automation Polska Sp.z.o.o.

3 Port Solenoid Valve Series VQ100 1

For the special voltages, please consult with SMC. 4-12-12 13 3 Port Solenoid Valve Series VQ100 Plug-in Unit (VV3Q11) Manifold with Multi-connector The broken line indicates DIN rail mounting style (-D) and side entry connection (S).

Exhaust Cleaner for Clean Rooms AMP Series

Description AMP320 AMP220 AMP420 AMP-EL220 AMP-EL320 AMP-EL420 Element assembly With O-ring 4 Note) The first and second elements are integrated, and cannot be replaced separately. 4 Exhaust Cleaner for Clean Rooms Series AMP Dimensions (mm) 1in = 25.4mm N Optional specifications O T: With element service indicator P R Q S SMC M D IN C Bracket (accessory) G L J I H K B A IN Bracket mounting

PSxx-OMR0001CN

7 10 4 5 6 M 5 SI 10 8 1 7 L 7 L N S 6 7 8 R 6 7 8 T 2 9 B -9No.PS-OMR0001CN-J 2 1F 2GH 3ISO1179-1 4 5kPa 61 7 8M12 9 10 11 12ISO16030 -10No.PS-OMR0001CN-J 2 / (2 2 2 1 ) ((38)3 ) ISA-16 ISA-14 2 ISA-16-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 ZS-31-B ZS-31-C 4 6 DIN ISA-5L ISA-5-1 73.0 1 ISA-5-2 135.5 2 ISA-5-3 173.0 3 ISA-5-4 210.5 4 ISA-5-5 248.0 5 ISA

PSxx-OMT0001CN

10 7 4 5 6 M SI 5 8 10 1 7 L 7 L N S 6 7 8 R 6 7 8 2 T 9 B -9No.PS-OMT0001CN-E 2 1F 2GH 3ISO1179-1 4 5kPa 61 7 8M12 9 10 11 12ISO16030 -10No.PS-OMT0001CN-E 2 / (2 2 2 1 ) ((3x8)3 ) ISA-16 ISA-14 2 ISA-16-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 ZS-31-B ZS-31-C 4 6 DIN ISA-5L ISA-5-1 73.0 1 ISA-5-2 135.5 2 ISA-5-3 173.0 3 ISA-5-4 210.5 4 ISA-5-5 248.0 5 ISA

Standardized T-type and S-type arms allows the selection to meet certain specifications or applications.  Also, has an optional spatter protective cover with easy assembly even after the cylinder is installed. Operating pressure: 0.5 MPa; Optional spatter protective cover; Standardized T/S type arms

Standardized T-type and S-type arms allows the selection to meet certain specifications or applications. Stable clamping force; Operating pressure: 0.5 MPa; Optional spatter protective cover; Standardized T/S type arms

Standardized T-type and S-type arms allows the selection to meet certain specifications or applications.  Also, has an optional spatter protective cover with easy assembly even after the cylinder is installed. Operating pressure: 0.5 MPa; Optional spatter protective cover; Standardized T/S type arms

Standardized T-type and S-type arms allows the selection to meet certain specifications or applications. Also, has an optional spatter protective cover with easy assembly even after the cylinder is installed.Operating pressure: 0.5 MPa; Optional spatter protective cover; Standardized T/S type arms

Cable, Controller Mounting: 8 (DIN Rail Mounting), Communication Plug Connector or I/O Cable Length for JXC: T (T-branch, for DeviceNetâ„¢ or CC-LInk)

, Controller Mounting: 8 (DIN Rail Mounting), Communication Plug Connector or I/O Cable Length for JXC: T (T-branch, for DeviceNetâ„¢ or CC-LInk)

Thermo-chiller

Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) 2 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: CH1 20C/CH2 25C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC 3 q Ambient temperature

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

How to Order w e q r t y u i o !0 !

VVXA21/22

r B " " $6y t " 5 ' % " $60C4,D 4 B u % " " B 17-3-98 3 Series VVXA21/22 Direct Air Operated 2 Port Valve/Manifold For Air, Gas, Vacuum and Oil The VX series will be revised shortly.