Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

CVRA1-E

Rotation angle rad Inertia moment kgm For equiangular acceleration, the angular velocity, , after t seconds are obtained using the following equations. ) 1 ( ) 2 ( C : Integration constant Because the displacement angle in t=0 becomes =0, it becomes C=0.

Standby Regulator

(Values at the initial period) 10 - 4.

VFR3000 Series

Intermediate stops heat generated by the valve. 10.

Vacuum regulator

C08 8 mm C10 10 N07 1/4 N09 5/16 inch N11 3/8 Accessories1 Accessory is included in the same container Nil No accessory B With Bracket L With Bottom Bracket 6 - Single sided connections C Body size Accessories2 10 The maximum flowing quantity 140l/min(ANR) Accessory is included in the same container 20 The maximum flowing quantity 240l/min(ANR) Nil No accessory(Note1) GN With

Thermo-chiller Series HRZ Fluorinated Fluid Type

Note 10) Mass in the dry state without circulating fluids. 80

Compact Guide Cylinder End Lock Type SeriesMGP

B + Stroke A + Stroke FA FB S HR E b a With front lock XAH7 c d e MO XB T-slot dimensions (mm) DM HN XAH7 XC XL Bore size (m) a b c d e End lock mechanism (locking type manual release ) 6.5 10.5 5.5 3.5 9.5 32 Section XX detailed diagram 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA

Membrane Air Dryer

Standard dew point -20oC, -15oC : about 10 min.

Series M Miniature Fittings M3, R(PT) 1/8, M5

A B C D E 19.5 20.5 8.5 9.5 1.8 3 6.5 8.5 7 8 2.1 5.5 7.1 7.7 M-01H-4 M-01H-6 90 Miniature Fittings M3, R(PT) 1/8, M5 Series M Series M5 Barb fitting for nylon tube: M-5AN-4, -6 Weight (g) 1.6 1.7 Effective orifice(mm2 Part No. A B C ) 2.1 4.0 12 14 5 8 1.8 2.5 M-5AN-4 M-5AN-6 Barb fitting for soft tube: M-5AU-3, -4, -6 Part No.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

-M9NL Du Seal material and its changed part XSA Sealmaterial Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM)

VFR3000-OMJ0001

10 10 10) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3 40) 40) 40) 40) VFR3 VFR3 VFR3 VFR3 00,VFR3 00,VFR3 00,VFR3 00,VFR3 10 10 10 10 VFR3 VFR3 VFR3 VFR3 40 40 40 40 (N.C.)N.O.3 3 B A N.C.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?