ø 32, ø 40, ø 50, ø 63 Compact Cylinder With Solenoid Valve Series CVQ

Applicable load Pre-wired connector 1 (M) Electrical entry Type 0.5 (Nil) 3 (L) 5 (Z) DC AC Perpendicular In-line M9N M9P M9B M9NW M9PW M9BW M9NV M9PV M9BV M9NWV M9PWV M9BWV Reed switch Solid state switch 3-wire (NPN) 5V, 12V IC circuit 3-wire (PNP) 2-wire 12V Relay, PLC 24 V Yes Grommet 3-wire (NPN) Diagnostic indication 2-color indication 5V, 12V IC circuit 3-wire (PNP) 12 V 2-wire A96 A93

ø32, ø40, ø50, ø63 Series CVQM Compact Cylinder with Solenoid Valve/ Guide Rod Type

function Wiring (Output) Electrical entry 1 (M) 0.5 (Nil) 3 (L) 5 (Z) DC AC Perpendicular In-line M9N M9P M9B M9NW M9PW M9BW M9NV M9PV M9BV M9NWV M9PWV M9BWV 3-wire (NPN) 5 V, 12 V IC circuit Solid state auto switch Reed auto switch 3-wire (PNP) 12 V 2-wire Relay, PLC Yes Grommet 24 V 3-wire (NPN) Diagnostic indication 2-color indication 5 V, 12V IC circuit 3-wire (PNP) 12 V 2-wire A96 A93

MY1B

circuit M9PV M9P Solid state switch Reed switch 3-wire (PNP) [Y7PV] [Y7P] M9BV M9B 2-wire 12V [Y69B] [Y59B] M9NW Relay, PLC 24V Grommet Yes M9NWV 3-wire (NPN) [Y7NWV] [Y7NW] 5V, 12V IC circuit Diagnostic indication (2-color indication) M9PWV M9PW 3-wire (PNP) [Y7PWV] [Y7PW] M9BWV M9BW 2-wire 12V [Y7BWV] [Y7BW] 3-wire (NPN equivalent) A96V A96 Z76 5V IC circuit Yes A93V A90V A93

Air Slide Table ø 4, ø 6, ø 8 Series MXJ

V 3-wire (PNP) M9PV M9P Reed switch Solid state switch 12 V 2-wire M9BV M9B 3-wire (NPN) F8N IC circuit 5 V 12 V Relay, PLC Yes Grommet 24 V 3-wire (PNP) F8P 12 V 2-wire 3-wire (NPN) F8B Diagnostic indication (2-color indication) M9NWV M9NW 5 V 12 V IC circuit 3-wire (PNP) M9PWV M9PW 12 V 2-wire M9BWV M9BW IC circuit 5 V A96V A96 3-wire (NPN equivalent) Yes 100 V 12 V Grommet A93V A93

RLQ

A96V A96 IC circuit 5 V Yes A72 A93V A90V A73C A80C A79W A72H A93 A90 Grommet 12 V 200 V 100 V IC circuit IC circuit No Relay PLC 5 V, 12 V 12 V 100 V or less 2-wire 24 V Yes No Connector 5 V, 12 V 24 V or less Grommet Yes Diagnostic indication (2-color display) Solid state auto switches marked with a are produced upon receipt of order.

Toggle Type Air Gripper ø 32, ø 40, ø 50, ø 63 Series MHT2

M9NWV M9PWV M9BWV M9NAV M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 5V, 12 V 12 V 5V, 12 V 12 V 5 V, 12 V 12 V IC circuit Solid state switch Reed switch IC circuit Relay, PLC Diagnosis (2-color indication) 24 V Grommet Yes IC circuit Water resistant (2-color indication) M9PAV M9BAV A96 A93

Compact Cylinder with Air Cushion Series RQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order RQ B 32 50 50 32 RDQ B M9BW With auto switch With auto switch Made to Order (Built-in magnet) For details, refer to page 775. Mounting bracket Number of auto

A96 A96V 5 V IC circuit Yes A72 A72H 200 V 100 V 12 V Grommet A93 A90 A93V A90V No IC circuit 5 V,12 V 12 V Relay, PLC 100 V or less 2-wire A73C A80C A79W 24 V Yes No Connector IC circuit 5 V,12 V 24 V or less Yes Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with a "" are produced upon receipt of order.

Magnet: D (Built-in), Series: A2 (Standard), Mounting: B (Basic), Tube Material: Aluminum, Bore Size: 63mm, Port Thread: Rc, Stroke: 100mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in), Series: A2 (Standard), Mounting: F (Rod Flange), Tube Material: Aluminum, Bore Size: 63mm, Port Thread: Rc, Stroke: 200mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: F (Front Flange), Bore Size: 40mm, Stroke: 200mm, Cushion: Rubber Bumper, Rod Boot: None, Lock Style: HN (Rear End Lock Non-locking Style), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Mounting Bracket)

Magnet: D (Built-in), Series: 85 (Standard), Head Cover Type: N (Basic Integrated Clevis), Bore Size: 25mm, Stroke: 125mm, Cushion: Rubber Cushion, Rod Boot: None, Mounting Bracket: None, Accessory: None, Auto Switch Mounting Type: B (Band), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: T (Rear Trunnion), Cushion: N (Rubber Bumper), Bore Size: 40 (1 1/2"), Stroke: 0600 (6"), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Magnet: D (Built-in), Series: A2 (Standard), Mounting: F (Rod Flange), Tube Material: Aluminum, Bore Size: 63mm, Port Thread: Rc, Stroke: 125mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.)

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Bore Size: 50mm, Stroke: 200mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.)

Magnet: D (Built-in Magnet), Mounting: L (Foot), Bore Size: 32mm, Port Thread: Rc: 32 to 100 Bore; M Thread: 20, 25 Bore), Stroke: 50mm, Body Option: M (Rod End Male Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Compact Cylinder with Air Cushion and Lock Series RLQ

A96V A96 IC circuit 5 V Yes A72 A93V A90V A73C A80C A79W A72H A93 A90 Grommet 200 V 100 V 12 V IC circuit IC circuit No 5 V, 12 V 12 V 100 V or less Relay PLC 2-wire 24 V Yes No Connector 5 V, 12 V 24 V or less Grommet Yes Diagnostic indication (2-color display) Solid state auto switches marked with a are produced upon receipt of order.

Compact Cylinder with Air Cushion Series RQ

A96V A96 IC circuit 5 V Yes A72 A72H 12 V 200 V 100 V Grommet A93V A90V A93 A90 IC circuit 5 V,12 V 12 V 100 V or less No Relay, PLC 2-wire A73C A80C A79W 24 V Yes No Connector IC circuit 5 V,12 V 24 V or less Grommet Yes Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ

Slit Valve XGT Series

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector), End Lock: N (None)

Size: 50mm, Cushion: R (Internal Shock Absorber), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: Z (5m)