Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Bore Size: 50mm, Stroke: 200mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.)
Magnet: D (Built-in Magnet), Mounting: L (Foot), Bore Size: 32mm, Port Thread: Rc: 32 to 100 Bore; M Thread: 20, 25 Bore), Stroke: 50mm, Body Option: M (Rod End Male Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)
Compact Cylinder with Air Cushion and Lock Series RLQ A96V A96 IC circuit 5 V Yes A72 A93V A90V A73C A80C A79W A72H A93 A90 Grommet 200 V 100 V 12 V IC circuit IC circuit No 5 V, 12 V 12 V 100 V or less Relay PLC 2-wire 24 V Yes No Connector 5 V, 12 V 24 V or less Grommet Yes Diagnostic indication (2-color display) Solid state auto switches marked with a are produced upon receipt of order.
A96V A96 IC circuit 5 V Yes A72 A72H 12 V 200 V 100 V Grommet A93V A90V A93 A90 IC circuit 5 V,12 V 12 V 100 V or less No Relay, PLC 2-wire A73C A80C A79W 24 V Yes No Connector IC circuit 5 V,12 V 24 V or less Grommet Yes Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ
Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector), End Lock: N (None)
Size: 50mm, Cushion: R (Internal Shock Absorber), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: Z (5m)
Size: 10mm, Cushion: A (Cushion Pad), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Size: 10mm, Cushion: A (Cushion Pad), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Size: 10mm, Cushion: A (Cushion Pad), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)
Size: 20mm, Cushion: A (Cushion Pad), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Size: 20mm, Cushion: A (Cushion Pad), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Size: 20mm, Cushion: R (Internal Shock Absorber), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Size: 30mm, Cushion: A (Cushion Pad), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Size: 30mm, Cushion: R (Internal Shock Absorber), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Size: 30mm, Cushion: R (Internal Shock Absorber), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: Z (5m)
Size: 50mm, Cushion: A (Cushion Pad), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal
Size: 50mm, Cushion: R (Internal Shock Absorber), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Size: 50mm, Cushion: R (Internal Shock Absorber), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 2 pcs. (Or None in the Case of No Switch), Port Type: XF (G1/8)
Size: 50mm, Cushion: R (Internal Shock Absorber), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Port Type: XN (NPT1/8)