0.4

66 9 8 0 40 COM PWR 35 52 61.5 D side U side Stations 8 7 6 5 4 3 2 1 n C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp screw R R 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A 12 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 18.1 C8 [1(P) SUP port] C8: 8 One-touch fitting P = 10.5 31.5

Electric Slide Tables

0 Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) LES LESH A A A-A !5 !2 @3 !4 LECA6 LECP6 LEC-G LECP1 LECPA @6 !1 t w !6 @4 !3 !8 @7 q @5 Shipped together @8 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 10 11 No.

EX120/121/122

a reverse type is used as a connector shape respectively. 7/8 inch fieldwireable connector [compatible to AWG22-16] PCA-1558797 Plug PCA-1558807 Socket 8.

•

' ~ > (>.3.5 ,A ~ ;8 ,8 <A Asl type (mm) Flat type Flat with rib mm F:M6 x l r F:M8 X1.25 Model ;A + B C D Y Y Model ;A ;B C F :M5 XO.8 F :~ 0 E G Flat Fiat wilh rile 0 E G I D E G 0 G E ZPT02U 2 2.6 1.2 M4 x 0.7 M5XO.8 ZPT04U 4 4:8 f6 0.8 6 23 8 8 29 12 6.2 4 1 .7 ZPT20g 20 23 14 5 23 8 12 29 ZPT06U 6 7 2.5 ZPT08U 8 9 T ZPT25l!

SYJ300/500/700

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

Basic type / Direct mount type Series CY3B/CY3R

6 #6 @9 r A $1 $2 $3 $4 t y w e !1 !2 !3 !4 !5 !7 !8 @8 i o !0 @3 @2 y y u #5 $5 CY1F25 Detailed view of driving cylinder CY1F15 Detailed view of driving cylinder @7 Section A-A Note Component Parts Material Description Description No. Note No.

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 Nil Cable color Circuit 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue S Standard cable Cable color Connector D terminal no. Shield 12 13 7 6 9 8 3 Brown Black Red Black Orange Black Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

VQ4000

X n 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port 4 A 2 B 8 Rc 1/4: Rc 1/4 thread 4 A 2 B A A B A B A B A B A B A Rc 3/8: Rc 3/8 thread SMC SMC SMC SMC SMC SMC SMC 7 B B B A A A A A A A C8: One-touch fitting for 8 4 A 2 B C10: One-touch fitting for 10 6 C12: One-touch fitting for 12 4 A 2 B 5 L1 L2 4 A 2 B 4 B B 4 A 2 B 3 4 A 2 B 2 P = 25 P = 25 4 A 2 B 1 44 50.5 X Stations 12 38 26.5 Cable

CL

F D GA 80 H 8 BQ GK GQ GL GR 5 BZ BP GC GB GD 3.5 B1 AL B B2 BN BC 13 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 Up to 400 55 8 8 41 4 6 4 38 26 40 73.5 15.5 63.5 8 13 20 8 6 Up to 450 64.5 8 9 45 7 9 7 45 4 32 47 83.5 19.5 74.5 10 22 17 90 13 CNS 25 8 6 Up to 450 64.5 8 9 45 7 9 7 45 4 32 47 83.5 19.5 74.5 12 22 17 90 13 32 10 8 Up to 500 70 11 8 50 7 11 8 52 4 41 54 90.5 21 80 14 24 22 100.5 16 40

Prevents Micro-Bubbles

LVA10 LVA20 LVA30 LVA40 LVA60 12 22 LVA50 Model Orifice diameter 2 4 8 20 Body material Note 1) Port size Stainless steel (SUS316) 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 PAX PPS Valve type PFA PB Type Symbol Basic type N.C. PA PB PA N.O. A B B A B A PB Double acting N.O. Double acting N.C. With flow rate adjustment PA PA N.C. B A B A Double acting PB Double acting N.C.

30

/4 M 12 8.3 1/8" 13.6 3 3.5 D 13.7 10-32UNF 1/8 1/4 A 12.6 9.1 5/32" L2 14.4 4.2 H Connection thread 14.7 3.5 10-32UNF 1/8 1/4 3/8 1/8 1/4 3/8 1/8 1/4 3/8 1/2 1/4 3/8 1/2 13.5 11.7 1/4" 15.9 11.4 (NPT) Applicable tube 18.6 L1 13.7 16.1 21.6 5/16" 19.1 M 20 21.6 D A 16 16.6 3/8" 21 35.2 L2 H Connection thread (with sealant) 22.7 19.6 50.2 18.5 1/2" 23.7 Reference dimensions after installation

High Purity Chemical Valve

LVA10 LVA20 LVA30 LVA40 LVA60 12 22 LVA50 Model Orifice diameter 2 4 8 20 Body material Note) Port size Stainless steel (SUS316) 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 PPS Valve type PFA Type Symbol Basic type N.C. PA PA PB N.O. A B B A B A PB Double acting N.O. Double acting N.C. With flow rate adjustment PA PA N.C. B A B A Double acting PB Double acting N.C. With bypass PA PA N.C.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

8 !1 !3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

CJ2

B A B A B A B A 2 (8.5) B 2 (0.5) A 1 (7.5) B 1 (0) A 6 0 0.5 0 0.5 3 3.5 3 3.5 3.5 4 3.5 4 7.5 8 7.5 8 0.5 1 0.5 1 10 16 2.5 3 2.5 3 1.5 2 1.5 2 ( ) in the table: In case of double rod style, series CJ2W.

SYJ3000/5000/7000

+ + 20 + + + + + 20 stations S F G P R P R A, B port size R port 1/8 R port 1/8 N NPT A B B A M5 M5 x 0.8 A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 T NPTF A, B port M5 x 0.8, C4 C4 One-touch fitting for 4 N3 One-touch fitting for 5/32" Type 41 (5 Port/Base mounted) Applicable solenoid valve SYJ340SYJ343How to Order SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid coil is on

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

24.5 S 8 10 18 24 24 T 20 24 36 44 56 V 18 22 20 28 28 X 3.5 4 8 9 9 Y 38 47 Z 14 14 19 A 68 78 87 105.5 107 Bore size (mm) 16 20 32 40 50 1 8 1 8 1 8 1 8 Note 1) M thread (M5 x 0.8) is applicable for 12 and 16 piping ports.

CJ2

Material: Iron CD (cd) 3.3 5 U 8 10 R 5 8 NB 18.5 23.5 NA 12.5 12.5 MM M4 x 0.7 M5 x 0.8 CB 14 20 CA 17 20 KA 4.2 5.2 BB 12 18.3 H 28 28 BA 15 18.3 GA 8 8 A 15 15 CX 3.2 6.5 Bore size (mm) 10 16 Dimensions by Stroke Applicable bore (mm) Part no.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 4 VSA440 3 4 , 1 2 3 4 1 2 standard 1 2 3 4 , Piping specifications/Side ported, bottom ported Type V Port size Rc EXH port Valve size Applicable valve Manifold base size Rc P EA, EB A, B , 1 4 3 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 1 2 1 2 VSA420 Common EXH , 3 8 1 2 , 1 4 3 8 , 3 8 1 2 , 3 8 1 2 3 8 standard

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

93.5 2 66 9 8 0 40 COM PWR 35 52 61.5 D side U side Stations 8 7 6 5 4 3 2 1 n C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp screw R R 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A 12 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread P = 10.5 31.5 18.1 C8 [1(P) SUP port] C8: 8 One-touch

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

93.5 2 66 9 8 0 40 COM PWR 35 52 61.5 D side U side Stations 8 7 6 5 4 3 2 1 n C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp screw R R 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A 12 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread P = 10.5 31.5 18.1 C8 [1(P) SUP port] C8: 8 One-touch