Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 40 (3-phase 380 to 415 VAC, 50/60 Hz; 3-phase 460 to 480 VAC (60 Hz)), Option: M (Applicable to Deionized Water Piping)
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: 01 (Rc1/8), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only)
Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread
Pressure Range: ISE78G (0 to 16 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: M (SI Unit Only)
Actuation: 4 (3 Position Exhaust Center), Seal: 1 (Rubber Seal), Function: Standard Type (0.4W), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting), Plug Mount Port: None, Manifold Block: M (w/Manifold Block)
Actuation: 4 (3 Position Exhaust Center), Seal: 1 (Rubber Seal), Function: Standard Type (0.4W), Voltage: 5 (24VDC), Electrical Entry: LO (Plug Connector w/o Connector), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: L6 (Top Ported ø6 One-touch Fitting), Port Plug Mounting Port: None, Manifold Block: M (w/Manifold Block)
/N.C.), Seal: 1 (Rubber Seal), Function: N (Negative Common), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: N7 (Side Ported 1/4" One-touch Fitting), Plug Mount Port: None, Manifold Block: M (w/Manifold Block)
/N.C.), Seal: 1 (Rubber Seal), Function: N (Negative Common), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting), Plug Mount Port: None, Manifold Block: M (w/Manifold Block)
Actuation: 4 (3 Position Exhaust Center), Seal: 1 (Rubber Seal), Function: Standard Type (0.4W), Voltage: 5 (24VDC), Electrical Entry: LO (Plug Connector w/o Connector), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: L6 (Top Ported ø6 One-touch Fitting), Plug Mount Port: None, Manifold Block: M (w/Manifold Block)
/N.C.), Seal: 1 (Rubber Seal), Function: N (Negative Common), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C4 (Side Ported ø4 One-touch Fitting), Plug Mount Port: None, Manifold Block: M (w/Manifold Block)
Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread)
Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N7 (1/4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: M (SI Unit Only)
Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N7 (1/4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only)
Rated Pressure Range: -0.1 to 1 MPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: C01 (Rc1/8)
Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread)
Cooling Capacity: 250 (25 kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: M (Applicable to DI Water Piping)
Cooling Capacity: 250 (25kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: M (Applicable to DI Water Piping)
Cooling Capacity: 300 (28 kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: M (Applicable to DI Water Piping)
Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread