Digital Pressure Switch

The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the insulation material, whichever is larger. Wire correctly. Incorrect wiring can break the Pressure switch. Do not perform wiring while the power is on. Otherwise damage to the internal parts can result, causing malfunction.

3

14 35 26 18 13.6 2.7 depth 14 3/8 28 22 32 40 50 4.5 5 1.5 78 54 30 60 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 depth 12 3/8, 1/2 34 30 42 48 58 4.5 5 1.5 98 71 38 68 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 depth 12 1/2, 3/4 44 36 48 58 70 5.5 7 2.0 124 92 46 77 62.6 57.6 23.0 41 42 63 48 28 18.0 3.5 depth 14 3/4, 1 104 74 31 52 39.5 1 1/4, 1 1/2 PF3W721/521 108 76 56 91 76.6 71.6 28.5 54 33

NCA1

Cover Cushion Location E, F , G or H G B (Cushion Location Standard) C HEAD END CHART 1 Spare Parts and Repair Kit Item Quantity Description 11 1 Head 12 1 Cap 13 1 Barrel 14* 2 Barrel Seal 15 4 Tie Rods 16 4 Tie Rod Nuts 21 1 Piston (See Note1) 22 1 Piston Rod (See Note1) 24* 2 Piston Packings 26A 1 Piston Rod Assembly (See Note1) 28 1 Wear Band 31 1 Gland Bushing 32* 1 Gland Packing 33

Step Motor Driver （ Pulse input type ）

Note that when the SETON output is OFF, the AREA signal will also be OFF. *1) It maybe takes about ten seconds from turning on SVON to SVRE turned on when after the power supply. *2) The ALARM and ESTOP become the negative-true logic output. 33 - The change of output signal under the condition of the driver.

IDX-OM-W010

direction Port size Ventilation air inlet IDF3E-20 only Drain tube (O.D.10,length approx.0.8m) J L K [200VAC specification] [200VAC specification] Terminal block Power cable outlet(17) H P N M [100VAC specification] Power cable(Length:approx.1.9m) measure mm Model Port size A B C D E F G H J K L M N P Q IDF1E Rc3/8 69 101 270 32 21 330 IDF2E Rc3/8 51 232 138 24 327 IDF3E Rc3/8 473 67 304 33

Booster Regulator/Air Tank

1/8 28 7 28 7 ARJ Silencer (Option) 113 113 IN port 1/4 IN port 1/4 OUT port 1/4 AR425 to 935 23 27 23 27 OUT port 1/4 ARX 22 22 60 4 x 5.5 EXH port 1/4 40 60 4 x 5.5 8.5 AMR 70 50 70 (97) (When silencer installed: 107) (When high-noise reduction silencer installed: 126) ARM EXH port 1/4 ARP VBA11A-02 With elbow silencer (Option) 150 Pressure gauge (Option) IR-A Elbow silencer (Option) 33

48

Refer to the dimensions on page 15 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimension [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 398 410.5 423 435.5 448 460.5

Digital Flow Switch (Remote type monitor unit)

The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the insulation material, whichever is larger. Replace a damaged lead wire with a new one. Wire correctly. Incorrect wiring can break the product. Do not perform wiring while the power is on.

2 Phase Stepper Motor/Without Motor Brake Series LXP

+0.030 0 depth 6 26 D 30 5.5 63 73 12 Stroke + 181 Stroke + 198 10 43 4.5 4H9 +0.030 0 2-M3 x 0.5 (PE terminal) Cross section BB Motor wire (300mm) Effective thread depth 7 Photo micro sensor wire (300mm) M3 x 0.5 (PE terminal) 4H9 +0.030 0 Effective thread depth 4 3 6 Phillips binding head screw (included) 49 38 M3 x 4l Section C detail (Scale: 2/1) 7.5 Label Stroke + 104 Stroke + 121 33

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

212.5 197.5 13 9 235.5 225 208 14 L1 L2 L3 L4 L1 L2 L3 L4 L n 12 260.5 250 229 16 L n 12 273 262.5 239.5 17 10 235.5 225 208 14 11 248 237.5 218.5 15 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 33

High Vacuum Angle Valve

Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33

AC Servo Motor Driver (CC-Link Type)

Please change the parameter in the initial setting. *3 The minimum unit of the travel distance of the actuator should be 1 [m]. *4 When the motor mounting position is right side parallel (LEY*R / LEYG*R) or left side parallel (LEY*L / LEYG*L), the rotation direction selection is 0(+: Counter motors side). -33- Recommended Value of acceleration time constant of Point table No.1 [LEY] LEY63

Ionizer

19.6 25 80 x (n-1) 70 10 25 Emitter cartridge n (Number of emitter cartridges), L Dimension L(mm) 300 380 620 780 1100 1260 1500 1900 2300 n Part no. 3 4 7 9 13 15 18 23 28 (Name plate position at 300 mm length) IZS31-300 IZS31-380 IZS31-620 IZS31-780 IZS31-1100 IZS31-1260 IZS31-1500 IZS31-1900 IZS31-2300 660 A Ionizer Series IZS31 Dimensions End bracket/IZS31-BE When mounted outside in (33

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

. + 4 x (n pcs. 1) 360.3 360.3 360.3 4 x R3 or less 4 x R3 or less 33 ZSE20(F)/ISE20 Series Function Details ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Display examples of the main and sub (set value) screens of each mode.

Fieldbus system CC-Link compatible SI unit

14 Wiring 16 SI Unit Model Indication and How to Order 17 Summary of Product parts 17 Mounting and Installation 18 Wiring 18 Setting and Adjustment 19 LED Display 25 Specification 27 Specifications 27 Dimensions 28 End plate Model Indication and How to Order 29 Summary of Product parts 29 Mounting and Installation 30 Wiring 30 Specification 31 Specifications 31 Dimensions 31 Maintenance 33

pa

filter AIR SUP FLUID OUT FLUID IN Air supply AIR EXH Strainer Silencer Throttle Transfer fluid 17-5-161 Series PAX Dimensions 4-M8 (M6 hexagon socket head screw can be inserted) 10.5 105 7.5 Mounting hole detail 69 Reset button 100 125 23 RESET (175) AIR SUP (Pilot air supply port) Rc 1/4 FLUID IN Rc 1/4, 3/8 FLUID OUT Rc 1/4, 3/8 PROCESS PUMP AIR SUP 110 45 29 FLUID IN FLUID OUT AIR EXH 33

Fieldbus system PROFINET compatible SI Unit

18, 19 diagnostics 0: Short circuit, 1: No error 2 Valve 20, 21 diagnostics 0: Short circuit, 1: No error 3 Valve 22, 23 diagnostics 0: Short circuit, 1: No error 4 Valve 24, 25 diagnostics 0: Short circuit, 1: No error 5 Valve 26, 27 diagnostics 0: Short circuit, 1: No error 6 Valve 28, 29 diagnostics 0: Short circuit, 1: No error 7 Valve 30, 31 diagnostics 0: Short circuit, 1: No error 33

MHZ2/MHZJ2

It is necessary to allow a greater margin for high accelerations and strong impacts, etc. mg F = x a 2 x 33 Standard Type/With Dust Cover Series MHZ 2 Step 1 Effective gripping force: Series MHZ 2 Double acting Expressing the effective gripping force.

JXCx-OMU0026

control) 22 12 6 26 13 7 34 17 9 34 17 9 Supplement 1.2 Initial setting of LEFS series Model LEFS16 LEFS25 Lead symbol A B H A B Lead [mm] 10 5 20 12 6 Stroke (mm) 500 500 500 600 700 800 600 700 800 600 700 800 Max. speed [mm/s] 500 250 100 900 630 550 500 420 330 250 230 180 0 Min. speed [mm/s] (Independent and interpolation) 10 5 20 12 6 Min. speed [mm/s] (Speed tuning control) 17 9 33

One-touch Fittings

10.4 9.7 16.5 28.4 33.6 28.9 13.3 10.4 6 3.2 16.5 10 13.9 11 4.5 19.5 3/8 KQ2LU06-03GS 17 10.4 9.7 16.5 29.8 35 29.9 13.3 10.4 6 4.2 16.5 10 13.9 11 4.5 31.5 N Q1 O 8 1/8 KQ2LU08-01GS 14 13.2 13 18.2 25.7 32.3 29.2 14.2 13.2 8 4.2 18.2 13.1 26.3 18.2 6 16.4 1/4 KQ2LU08-02GS 14 13.2 13 18.2 30.1 36.7 32 14.2 13.2 8 4.2 18.2 13.1 26.3 18.2 6 21.5 3/8 KQ2LU08-03GS 17 13.2 13 18.2 31.5 38.1 33