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Contents Safety Instructions. 2 1.Outline of clean room specification. 4 1.1 Grease used . 4 1.2 Recommended tube diameter. 4 2.Raising dust characteristic . 4 2.1 Recommended tube diameter. 4 2.2 Amount of vacuum aspiration . 5 3.How to Order . 6 4.Construction. 7 1 11-LEJ Series / Slider type Safety Instructions These safety instructions are intended to prevent hazardous situations and

So even slightly deformed or miss-alignment of component may lead operation failure of the product. (4) Return to origin cannot return while operating.

(Note 4) Repeatability(Note 5) Within 0.5% F.S. (Note 4) Air consumption(Note 6) 11.5L/min(ANR) or less ( at supply pressure of 1.0MPa) Ambient and fluid temperature -5 to 60oC (No freezing) Port size Rc1/4,3/8,1/2 Port size of pressure gauge Rc1/8 [2 places] Weight 0.64kg -4- (Note1) Minimum supply pressure: At a downstream side flow rate of zero.

Number of CH occupied by PLC Number of point occupied by one node address Setting range Max. number of connected slave IN1/OUT1 8 IN : 0 to 1 OUT : 0 to 1 IN 2 OUT 2 IN2/OUT2 8 IN : 0 to 3 OUT : 0 to 3 IN 4 OUT 4 IN4/OUT4 8 IN : 0 to 7 OUT : 0 to 7 IN 8 OUT 8 IN1/OUT1 4 IN : 0 to 3 OUT : 0 to 3 IN 4 OUT 4 IN2/OUT2 4 IN : 0 to 7 OUT : 0 to 7 IN 8 OUT 8 IN4/OUT4 4 IN : 0 to 15 OUT : 0 to 15

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

Mounting 2-4. Air supply 2-5. Piping 2-6. Operating environment 2-7. Lubrication 3. Maintenance 3-1. Precautions 3-2. Replacement of Dust Cover (MHZJ2 / MHZAJ2 Only) 3-3. Construction / Parts list, seal listMHZ2-6 3-4. Construction / Parts list, seal listMHZJ2-6 3-5. Construction / Parts list, seal listMHZA2-6* 3-6.

1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 0.54 0.19 2.2 0.56 0.23 2.4 Sub-plate side Single 0.54 0.19 2.2 0.56 0.23 2.4 Body side 2 position 0.54 0.19 2.2 0.56 0.23 2.4 Sub-plate side Double 0.54 0.19 2.2 0.56 0.23 Body side 2.4 M5 x 0.8 Sub-plate side 0.54 0.21 2.3 0.54 0.19 2.3 Closed center Body side 0.54 0.21 2.3 0.54 0.19 2.3 3 position Sub-plate side 0.52 0.22 2.2 0.52

NPT 1/4 G 1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc 1/4 NPT 1/4 G 1/4 75, 100 60.5 40.5 Bore size (mm) 32 40 50 V W HA OA HB IA IB J KA KB L M N OB RA RB Z +0.2 0 38 10 5 60 58.5 4.5 28 0.2 19.8 7 34 5.5 9 10 7 M5 x 0.8 M6 x 1.0 14 +0.2 0 46 10 10 5 69 67.5 5 33 0.2 23.3 7 40 5.5 9 7 M5 x 0.8 M6 x 1.0 14 +0.2 0 58 12 6 86 84.5 7 42 0.2 29.7 8 50 6.6 11 14 8 M6 x 1.0 M8 x 1.25 19 D-X Individual

How to Order VR 12 1 1 F 06 Body size Applicable tubing outside diameter Metric sizes Inch sizes 1 1/8 standard 3.2 23 04 06 01 03 07 1/8" 5/32" 1/4" 4 6 Use 1/8" tubing for 3.2.

1208 12 8 BU C B Blue (Translucent) Clear (Material color) M-3AU-2, M-3AU-4 M-5AU-2, M-5AU-4 M-5AU-6, M-5H-4 M-5H-6 MS-5AU-4, MS-5AU-6 MS-5H-4, MS-5H-6 Black (Translucent) 500

340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32 32 40 40 54 72 30 32 40 40 52 52 60 65 12 16 20 20 25 30 32 40 G1/8 G1/4 G1/4 G3/8 G3/8 G1/2 G1/2 G3/4 13,5 15,5 17 17 22 19,5 25 30 58 64,5 77 80,5 92 97 119 152 M6 M6 M8 M8 M10 M10 M12

Port 3/4 3/4, 1 D I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER

O 2 x N 4.2 b Section b-b Use two through-holes for mounting. 50, 63 Flat washer: 4 positions (Included) 4 x RR 4 x RH Washer b' 4 x O 4 x N b' Section b'-b' Use four through-holes for mounting.

4-4 /1995 IEC61000-4-4 A /2000 to IEC61000-4-4 /1995 IEC61000-4-4 A2 /2001 to IEC61000-4-4 /1995 IEC61000-4-6 /2001 (4) (5) Fig.1 How to ground the DC motor (Type3) Shielded part (9) (13) (7) (7) (1) (10) (12) (7) (3) (7) (7) P-clip metal cylinder LC3F2 series (2) 100VAC Eart h Poi nt Sym bol Fram e G round ( FG ) (11) * Machinery layout Cable length or less (6) I N PU T PO W ER SU PPLY (

Engagement condition of finger part of bowl Mounting screws (4 pieces) Part A Body Align the notch groove with the finger of the bowl (Part A).

Note 3) The compressed air quality class on the inlet side is [ 1 : 4 : 2 ]. Note 4) Inlet pressure: 0.7 MPa. Flow at 20C, atmospheric pressure, and 65% of relative humidity . -8- 4.

Note 4) Check the operating pressure range and operating temperature range of the tube. 4. Troubleshooting KFG2H*-E series EHEDG Compliant Fittings cannot be disassembled or repaired in order to quality maintenance. When failure such as "Non-removable tubing" occurs, please replace the whole product. 5. Construction No.

Specific Product Precautions (4) Maintenance Connection Thread Tightening Method Warning (4) Removal of equipment and supply/exhaust of compressed air When components are removed, first confirm that measures are in place to prevent workpieces from dropping, run-away equipment, etc.