SMC Corporation of America
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(Loosen in the case of Y-shape type terminal.) As shown in the right figure, mount a crimped terminal (9), and then again tighten the screw (3f). Note) Tighten within the tightening torque of 0.5 Nm 15%. Note: a) It is possible to wire even in the state of bare wire.

directions, four Vibration proof hours in Z direction, Conforming to JIS D1601 Impact resistance 294.2 m/s, three times each in X, Y and Z directions Enclosure IP65IEC60529 standard When SMC cable and SMC CEU5 counter are used.

External Sensor IZS31-DG IZS31-DE Sensor model IZS31-DF Auto balance sensor [High-precision type] Auto balance sensor Feed back sensor [Body-mounting type] Ambient temperature 0 to 50oC Ambient humidity 35 to 80% Rh (with no condensation) Case material ABS ABS, Stainless steel ABS Vibration resistance Endurance: 50Hz, Amplitude: 1 mm, 2 hours to each direction (X, Y, Z) Impact resistance

Symbol Piping port size A AA B DD E F G H J K L N P Model PF3W504 3/8 70 50 30 45.6 40.6 15.2 24 14 35 26 18 13.6 2.7 depth 14 PF3W520 3/8, 1/2 78 54 30 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 depth 12 PF3W540 1/2, 3/4 98 71 38 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 depth 12 PF3W511 3/4, 1 124 92 46 62.6 57.6 23 41 42 63 48 28 18 3.5 depth 14 Symbol Bracket dimensions Model S T U V W WX Y

9 t y !5 !6 i u q r !1 !0 Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 depth 2 2.5 3.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2-M2 x 0.4 depth 2.2 12 Metal stopper 11-/22-MXP6-10 Max. 10.5 F 4-M3 x 0.5 depth 3 12 2-M2 x 0.4 depth 3 (mm) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 22 45 2 11-/22-MXP6-51 30 35 42 48.5 47 37 11 10 53 27.5 60 9.5 11-/22

9 t y !5 !6 i u q r !1 !0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

1 Piston B Ass,y C shape snap ring Carbon steel Nickel plated e !2 High carbon chrome bearing steel Cylindrical roller Finger Heat treated Electroless nickel plated Carbon steel r !3 Brass Needle Ass'y Side roller Nitriding Electroless nickel plated Carbon steel t !4 Brass Exhaust plug Level shaft Nitriding Electroless nickel plated Stainless steel y !

9 t y !5 i u !6 q r !0 !1 !2 Fingers closed Normally closed !4 !3 Component Parts Component Parts Note Material Material Note No. q w e t y u No. i o !0 !1 !2 !3 !4 !

plate Slider cover assembly Diaphragm plate assembly Diaphragm ring Aluminum alloy Aluminum alloy Special brake lining Stainless steel Stainless steel Stainless steel Carbon steel Carbon steel Hard anodized Hard anodized Cam follower cap Tube cover Brake shoe Joint ring Air coupler 2 Brake disc Manual rod 1 Manual rod 2 Brake spring Air tube Cable Tube guide assembly Guide rod q w e r t y

Pitch moment Yaw moment MXY12 MXY12 MXY12 0.035 0.030 0.025 0.020 0.015 0.010 0.005 0 0.030 0.025 0.020 0.015 0.010 0.005 0 0.05 MXY8 Table deflection mm Table deflection mm Table deflection mm MXY8 MXY8 MXY6 0.04 MXY6 MXY6 0.03 0.02 0.01 0 Load N 0 20 40 60 80 100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 8-9-10 10 Air Slide Table Long Stroke Type Series MXY Construction @3 y

3 Stopper Stainless steel NBR Gasket Special packing y !4 Bearing High carbonate chrome steel O ring NBR u !5 Back-up ring O ring NBR Stainless steel i !

(Loosen in the case of Y-shape type terminal.) As shown in the below figure, mount a crimped terminal (9), and then again tighten the screw (3e). Note) Tighten within the tightening torque of 0.5 Nm15%. Note: a It is possible to wire even in the state of bare wire.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C: Locking type (Manual) 2 position double (rubber) 4 position dual 3 port valve (C) (A) 4 (B) 2 Standard type (1 W) High pressure type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K N R Y (A) 4 (B) 2 Note 1) C Note) 5 (R1) 3 (R2

Seal Metal seal Rubber seal 0 1 1 2 3 Stations D side U side Light/Surge voltage suppressor Function Yes Without light, with surge voltage suppressor Nil E Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) Electrical entry Note 1) Applicable to DC specification. Note 2) Refer to page 2-6-39 for details on external pilot specifications.

Model: U (Union Y, Different Dia. Union Y), Applicable Tube O.D.: 09 (5/16"), Port Size/Applicable Tube: 00 (Same Dia. Tube)

SY1 4, SY1 4A only 1 2 1 2 4-3-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no. Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

Basic type Symbol Piping port size A AA B D E F G H J K L N P Model PF3W704 3/8 70 50 30 66 40.6 15.2 24 14 35 26 18 13.6 2.7 depth 14 PF3W720 3/8, 1/2 78 54 30 66 40.6 15.2 27 18 39 30 18 13.6 2.7 depth 12 PF3W740 1/2, 3/4 98 71 38 68 48.6 19.2 32 28 49 35 28 16.8 2.7 depth 12 PF3W711 3/4, 1 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5 depth 14 Symbol Bracket dimensions Model S T U V W WX Y